Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target

by A. A. Onoprienko, V. I. Ivashchenko, A. O. Kozak, A. K. Sinelnichenko, T. V. Tomila
Published 2019

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target

by A. A. Onoprienko, V. I. Ivashchenko, I. I. Timofeeva, A. K. Sinelnitchenko, O. A. Butenko
Published 2015