Hydrogen gettering in annealed oxygen-implanted silicon

by Misiuk, A., Barcz, A., Ulyashin, A., Antonova, I.V., Prujszczyk, M.
Published 2010

Structure perfection variations of Si crystals grown by Czochralski or floating zone methods after implantation of oxygen or neon atoms followed by annealing

by Datsenko, L.I., Auleytner, J., Misiuk, A., Klad'ko, V.P., Machulin, V.F., Bak-Misiuk, J., Zymierska, D., Antonova, I.V., Melnyk, V.M., Popov, V.P., Czosnyka, T., Choinski, J.
Published 1999