The investigation of the optical spectra in process of magnetron deposition

by Demchishin, A.V., Evsyukov, A.N., Goncharov, A.A., Kostin, E.G.
Published 2008

The flow density of atoms sputtered from a cathode of cylinder magnetron

by Panchenko, O.A., Goncharov, A.A., Demchishin, A.V., Kostin, E.G., Pavlov, S.N., Stetsenko, B.V.
Published 2005

Plasma devices for ion beam and plasma deposition applications

by Goncharov, A., Demchishin, A., Dobrovolskiy, A., Kostin, E., Panchenko, O., Pavlov, C., Protsenko, I., Stetsenko, B., Ternovoy, E., Brown, I. G.
Published 2005