Surface morphology and structure of nanocrystalline diamond films deposited in CH₄/H₂/Ar glow discharge plasma

von Vyrovets, I.I., Gritsyna, V.I., Dudnik, S.F., Opalev, O.A., Reshetnyak, E.N., Strel'nitskiy, V.E.
Veröffentlicht 2009