Catalyst-free deposition of nanocolumnar carbon nitride films

von Shalaev, R.V., Ulyanov, A.N., Prudnikov, A.M., Varyukhin, V.N.
Veröffentlicht 2010

Influence of intensive etching processes on structure and properties of carbon nitride films

von Shalaev, R.V., Varyukhin, V.N., Prudnikov, A.M., Linnik, A.I., Zhikharev, I.V., Belousov, N.N., Raspornya, D.V., Ulyanov, A.N.
Veröffentlicht 2008