Deposition of W and W-RE alloys by gas-phase and plasma chemical methods

by Glushko, P.I., Yevsiukov, A.I., Ghuravlyov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Shijan, А.V.
Published 2016

Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge

by Deryzemlia, A.N., Yevsiukov, A.I., Radchenko, V.I., Khizhnyak, D.A., Kryshtal, P.G., Zhuravlov, A.Yu., Shijan, A.V., Strigunovskiy, S.V., Pelypets, Yu.A., Shirokov, B.M.
Published 2019

Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods

by Zhuravlov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Semenov, N.A., Shijan, А.V., Strigunovskiy, S.V., Yevsiukov, A.I., Shevtsov, A.B., Nazarenko, E.A., Pilipenko, N.N.
Published 2017