Calculation of macroparticle flow in filtered vacuum ARC plasma systems
Model of macroparticle behavior inside plasma guiding channels of vacuum arc systems and program for calculation of macroparticle flow in plasma filters (separators) used in vacuum arc film deposition are described. Several magnetic filters have been modeled to compare calculated and experimental da...
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Datum: | 2012 |
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1. Verfasser: | Aksyonov, D.S. |
Format: | Artikel |
Sprache: | English |
Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2012
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Schriftenreihe: | Вопросы атомной науки и техники |
Schlagworte: | |
Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/108630 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Zitieren: | Calculation of macroparticle flow in filtered vacuum ARC plasma systems / D.S. Aksyonov // Вопросы атомной науки и техники. — 2012. — № 2. — С. 108-113. — Бібліогр.: 4 назв. — англ. |
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