Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field
An implicit 2D3V PIC/MCC code has been developed for the kinetic simulation of low pressure RF discharges. The code uses coupled particle-in-cell method (PIC) for calculation collisionless dynamic of the plasma particles and Monte-Carlo method (MCC) for taking in account the particle collisions. For...
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| Datum: | 2012 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2012
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/109107 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Kinetic simulation of low pressure RF discharge in nonuniform axisymmetric magnetic field / V.V. Olshansky // Вопросы атомной науки и техники. — 2012. — № 6. — С. 77-80. — Бібліогр.: 9 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | An implicit 2D3V PIC/MCC code has been developed for the kinetic simulation of low pressure RF discharges. The code uses coupled particle-in-cell method (PIC) for calculation collisionless dynamic of the plasma particles and Monte-Carlo method (MCC) for taking in account the particle collisions. For the computation time reduction a number of physical and numerical methods of speeding up the code were introduced, such as the implicit schemes of the particles motion and fields computation, the electron sub-cycling and so on. The developed code is applied to the plasma dynamic investigation in capacitively coupled plasma RF discharge enhanced by the external magnetic field which is used in the neutral loop discharges (NLD). |
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