Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime
In the present study the characteristics of discharge in crossed EH fields in acceleration and plasma regimes have been researched at low voltages near the breakdown curve. The new experimental data for current-voltage characteristic and their dependence on argon pressure and magnetic fields strengt...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Цитувати: | Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime / A. Jamirzoev, S. Yakovin, A. Zykov // Вопросы атомной науки и техники. — 2013. — № 1. — С. 186-188. — Бібліогр.: 5 назв. — англ. |
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irk-123456789-1092862016-11-23T03:02:34Z Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime Jamirzoev, A. Yakovin, S. Zykov, A. Низкотемпературная плазма и плазменные технологии In the present study the characteristics of discharge in crossed EH fields in acceleration and plasma regimes have been researched at low voltages near the breakdown curve. The new experimental data for current-voltage characteristic and their dependence on argon pressure and magnetic fields strength are presented. It is shown that initial stage of the current-voltage characteristic in acceleration and plasma regime are quite similar and correspond to regime with “oscillating” electrons. The theoretic model based on the energy balance of electrons in plasma regime is presented as well as the comparison of the theory with the experiment. The obtained results may be useful for further development of magnetron sputtering systems and plasma accelerators with closed electrons drift. Исследованы характеристики разряда в скрещенных ЕxН полях в ускорительном и плазменном режимах вблизи порога зажигания. Получены новые экспериментальные данные для вольт-амперных характеристик и их зависимости от давления и напряженности магнитного поля. Показано, что стартовые участки вольт- амперных характеристик в ускорительном и плазменном режимах идентичны и соответствуют режиму с «осциллирующими» электронами. Также представлена теоретическая модель на основе энергетического баланса электронов и проведено сравнение с экспериментом. Полученные результаты представляют интерес для дальнейшего развития магнетронных распылительных систем и плазменных ускорителей с замкнутым дрейфом электронов. Досліджено характеристики розряду в схрещених ЕxН полях у прискорювальному та плазмовому режимах поблизу порогу запалювання. Отримано нові експериментальні дані для вольт-амперних характеристик та їх залежності від тиску та сили магнітного поля. Показано, що стартові участки вольт- амперних характеристик у прискорювальному та плазмовому режимах ідентичні і відповідають режиму з «осцилюючими» електронами. Також представлено теоретичну модель на базі енергетичного балансу електронів та проведено порівняння з експериментом. Отримані дані будуть корисні для подальшого розвитку магнетронних розпилювальних систем та плазмових прискорювачів з замкнутим дрейфом електронів. 2013 2013 Article Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime / A. Jamirzoev, S. Yakovin, A. Zykov // Вопросы атомной науки и техники. — 2013. — № 1. — С. 186-188. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 52.77.-j, 81.15.-z http://dspace.nbuv.gov.ua/handle/123456789/109286 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
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English |
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Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии |
| spellingShingle |
Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии Jamirzoev, A. Yakovin, S. Zykov, A. Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime Вопросы атомной науки и техники |
| description |
In the present study the characteristics of discharge in crossed EH fields in acceleration and plasma regimes have been researched at low voltages near the breakdown curve. The new experimental data for current-voltage characteristic and their dependence on argon pressure and magnetic fields strength are presented. It is shown that initial stage of the current-voltage characteristic in acceleration and plasma regime are quite similar and correspond to regime with “oscillating” electrons. The theoretic model based on the energy balance of electrons in plasma regime is presented as well as the comparison of the theory with the experiment. The obtained results may be useful for further development of magnetron sputtering systems and plasma accelerators with closed electrons drift. |
| format |
Article |
| author |
Jamirzoev, A. Yakovin, S. Zykov, A. |
| author_facet |
Jamirzoev, A. Yakovin, S. Zykov, A. |
| author_sort |
Jamirzoev, A. |
| title |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime |
| title_short |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime |
| title_full |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime |
| title_fullStr |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime |
| title_full_unstemmed |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime |
| title_sort |
characteristics of discharge in crossed еxн fields near breakdown curve in acceleration and plasma regime |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2013 |
| topic_facet |
Низкотемпературная плазма и плазменные технологии |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/109286 |
| citation_txt |
Characteristics of discharge in crossed ЕxН fields near breakdown curve in acceleration and plasma regime / A. Jamirzoev, S. Yakovin, A. Zykov // Вопросы атомной науки и техники. — 2013. — № 1. — С. 186-188. — Бібліогр.: 5 назв. — англ. |
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Вопросы атомной науки и техники |
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2025-07-07T22:51:46Z |
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2025-07-07T22:51:46Z |
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| fulltext |
186 ISSN 1562-6016. ВАНТ. 2013. №1(83)
CHARACTERISTICS OF DISCHARGE IN CROSSED ExH FIELDS NEAR
BREAKDOWN CURVE IN ACCELERATION AND PLASMA REGIME
A. Jamirzoev, S. Yakovin, A. Zykov
V.N. Karazin Kharkov National Universty, Kharkov, Ukraine
In the present study the characteristics of discharge in crossed EH fields in acceleration and plasma regimes have
been researched at low voltages near the breakdown curve. The new experimental data for current-voltage
characteristic and their dependence on argon pressure and magnetic fields strength are presented. It is shown that
initial stage of the current-voltage characteristic in acceleration and plasma regime are quite similar and correspond
to regime with “oscillating” electrons. The theoretic model based on the energy balance of electrons in plasma
regime is presented as well as the comparison of the theory with the experiment. The obtained results may be useful
for further development of magnetron sputtering systems and plasma accelerators with closed electrons drift.
PACS: 52.77.-j, 81.15.-z
INTRODUCTION
The ion source “Radical” has two different operating
modes [1-3]. First of them usually name a "accelerating"
mode (collimated-beam mode), or “a mode with an
anode layer ”, and the second - “magnetron”, "plasma",
or “diffusion-beam mode” [3, 4].
As show experiments [3] transition of a ion source in
such modes depends on the working gas pressure.
Transition from “magnetron” to "accelerating" mode is
observed at reduction of pressure in the ion source less
than
6·10-4 Тоrr. The "accelerating" is characterized by
discharge currents in the order of hundreds mA, and
high values of current efficiency (70…80 %).
At work in “magnetron” mode the discharge expands
from the accelerating channel of a source to the
technological chamber volume. The discharge at this
mode has greater currents in the order of even tens
amperes [4], and small current efficiency (20…30 %).
At such mode intensive sputtering of a cathode material
is observed, that is typical for magnetron sputtering
systems [5].
At the present moment is not enough the
experimental materials necessary for a theoretical
explanation of processes, taking place in the discharge
at transition from one mode in another.
The aim of the present work is experimental research
of transitive characteristics of the discharge in crossed Е
and Н fields near to a threshold of ignition, and also
development of the theoretical model of this
phenomenon.
1. EXPERIMENTAL SETUP
The research was carried out on experimental
installation with the ion source "Radical". The source is
the type of ion source with the cold cathode and gas
discharge in crossed Е and Н fields. In such sources the
closed drift of electrons in crossed Е and Н fields in the
interval anode – cathode is realized. The ionization of
working gas is provided by high-energy electrons
which are kept in specially organized electromagnetic
trap.
The electron location in the interval anode - cathode
is carried out by potential "well" and lenses
configuration magnetic field. Ions, unlike electrons,
practically is not influenced by magnetic field and
accelerated in electric field. Therefore in space of
transportation the tubular ion beam with an initial
diameter about 100 mm is formed. The design of the ion
source is presented on Fig. 1.
Fig. 1 Schematic layout of “Radical” ion source.
1 – solenoid; 2 – cathode; 3 – anode; 4 – gas inlet;
5 – cooling water inlet for anode ; 6 – anode layer
of electrons
2. EXPERIMENTAL RESULTS
In an experimental part of work ignition curves have
been measured depending on a current of the solenoid
and working gas pressure, and also current-voltage
characteristics in different modes of the discharge. On
Fig. 2 the ignition curves of the discharge at various
pressures are presented. As follows from figure,
qualitative character of breakdown does not vary from
pressure of working gas. There is a threshold of the
solenoid current value (0.5…0.8 A) and above which
the magnetic field doesn’t effect on the breakdown
voltage. This size of a magnetic field corresponds to the
Hell’s cut-off.
ISSN 1562-6016. ВАНТ. 2013. №1(83) 187
Fig. 2. The ignition curves of the discharge at various
pressures
Fig. 3. The current-voltage characteristics of the ion
source in linear scale of a current at various pressure of
working gas
Fig. 4. The current-voltage characteristics of the ion
source in logarithmic scale of a current at various
pressure of working gas
The current-voltage characteristics of the ion source
in linear scale of a current at various pressure of
working gas are presented on Fig. 3. The pressure was
measured in the working chamber and the pressure in
the ion source exceeded pressure in the chamber in
7 times.
The investigation of current − voltage characteristics
near the threshold of ignition, at rather small values of
current and voltage, has been made by means of the
digital voltmeter with high resolution. These
characteristics are presented in half-logarithmic scale of
current and voltage on Fig. 4.
As has shown on the Fig. 4 the starting part of
current- voltage characteristics, corresponding to
various operating modes of the ion source are similar,
and at significant pressure reduction the discharge
voltage grows slightly.
3. THEORETICAL MODEL
Theoretical model of a plasma mode is based on a
electron power balance in discharge. The Theoretical
model considers ionization in an electromagnetic trap
by two groups of electrons: the primary high-energy γ -
electrons emitted from the target as ion bombardment
result and the secondary plasma electrons which were
appeared in volume of plasma. Accordingly the energy
loses per ion creation for primary electrons is I, and for
plasma electrons-. ε. At a first approximation the power
balance of system could be presented in the form:
U(I+γI)= U·I+ ε·I1+ I·I2+Te·I1+γ·I· Te , (1)
I=I1+I2 or I1=I-I2. (2)
Where I – a total current of ions on the cathode; I1 – the
current of the ions created by the plasma electron with
temperature Te; I2 – the current of the ions created by γ-
electrons; U – the discharge voltage.
Substituted (2) to (1) it is easy to obtain:
I2(ε-I)=(η- γU)Ii, where η= ε+(1+γ)Te the-energy
losses per ion creation with kinetic losses. It is easy to
obtained final expression in a dimensionless variables:
Y=1-(1-B)/X , (3)
where Y= γU/ η, X=I/I2, B=(I+ γTе) / η.
The limiting case Х → 1 is corresponded to an
initial stage of the discharge, when plasma electrons
don’t take part in ionization and the discharge mode
with «oscillation» electrons is realized (γ –electrons,
located in the electromagnetic trap). Thus Y →В, i.e.
the discharge voltage} is U=I/γ
At X>> 1 ionization is carried out basically by
plasma electrons, and the discharge voltage is U =η /γ.
The dependence (3) is presented on Fig. 5.
0,0
0,2
0,4
0,6
0,8
1,0
1 10 100 1000
0
200
400
600
800
1000
Y
U
, V
I, mA
X
402010521
Fig. 5. The current-voltage characteristics of the ion
source in plasma regime (p=8⋅10-4) and the dimension
less dependence (3). B=5
CONCLUSIONS
In the present work the basic characteristics of the
discharge in crossed ExH fields − ignition curves and
current-voltage characteristic depending on working gas
pressure and intensity of a magnetic field were studied.
188 ISSN 1562-6016. ВАНТ. 2013. №1(83)
Characteristics of the discharge near to a threshold of
ignition in accelerating and plasma (magnetron) modes
were investigated in details and it was shown:
• Transition from accelerating to the plasma mode
depending on pressure take place continuously.
• Breakdown on the bottom branch of a curve of
ignition in accelerating and plasma modes are
equivalent.
• The initial stage of discharge current-voltage
characteristics in accelerating and plasma modes is
identical and corresponds to regime with «oscillation»
electrons.
• The theoretical model on the base of the energetic
balance of electron was presented and demonstrated a
good agreement with experimental results.
The received results are of interest for the further
development of the theory of discharge in crossed ЕxН
fields and for magnetron sputtering systems.
REFERENCES
1. I.S. Hasanov. Plasma and beam technology. Baku:
«Elm», 2007, р. 3.
2. Y.P. Maishev. Ion sources and ion beam equipment
for drawing and etching materials // Vacuum Equipment
and Technology. 1992, № 3, 4, v. 2, р. 53.
3. D.V. Duhopelnikov, E.V. Vorobyov,
S.V. Ivakhnenko. Research and optimization
characteristics of the ion source of AI-200 // Science
and Education. October 10, 2011, p. 4-5.
4. A. Shabalin, M. Amann, M. Kishnevsky, C. Quinn,
N. Capps. Characterisation of the Low-Voltage, High-
Current Single-Cell Ion Source // Advanced Energy
Industries, Fort Collins, CO.
5. B.S. Danilin, V.K. Syrchin. Magnetron sputtering
system. M.: «Radio and communication», 1982, p. 72.
Article received 20.10.12
ХАРАКТЕРИСТИКИ РАЗРЯДА В СКРЕЩЕННЫХ ЕxН ПОЛЯХ ВБЛИЗИ КРИВЫХ ЗАЖИГАНИЯ
В УСКОРИТЕЛЬНОМ И ПЛАЗМЕННОМ РЕЖИМАХ
А. Джамирзоев, С. Яковин, А. Зыков
Исследованы характеристики разряда в скрещенных ЕxН полях в ускорительном и плазменном режимах
вблизи порога зажигания. Получены новые экспериментальные данные для вольт-амперных характеристик
и их зависимости от давления и напряженности магнитного поля. Показано, что стартовые участки вольт-
амперных характеристик в ускорительном и плазменном режимах идентичны и соответствуют режиму с
«осциллирующими» электронами. Также представлена теоретическая модель на основе энергетического
баланса электронов и проведено сравнение с экспериментом. Полученные результаты представляют интерес
для дальнейшего развития магнетронных распылительных систем и плазменных ускорителей с замкнутым
дрейфом электронов.
ХАРАКТЕРИСТИКИ РОЗРЯДУ В СХРЕЩЕНИХ ЕxН ПОЛЯХ ПОБЛИЗУ КРИВИХ
ЗАПАЛЮВАННЯ В ПРИСКОРЮВАЛЬНОМУ ТА ПЛАЗМОВОМУ РЕЖИМАХ
А. Джамірзоєв, С. Яковін, О. Зиков
Досліджено характеристики розряду в схрещених ЕxН полях у прискорювальному та плазмовому
режимах поблизу порогу запалювання. Отримано нові експериментальні дані для вольт-амперних
характеристик та їх залежності від тиску та сили магнітного поля. Показано, що стартові участки вольт-
амперних характеристик у прискорювальному та плазмовому режимах ідентичні і відповідають режиму з
«осцилюючими» електронами. Також представлено теоретичну модель на базі енергетичного балансу
електронів та проведено порівняння з експериментом. Отримані дані будуть корисні для подальшого
розвитку магнетронних розпилювальних систем та плазмових прискорювачів з замкнутим дрейфом
електронів.
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