The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air
The behavior was investigated of current-voltage characteristics of Penning discharges in air atmosphere. Such materials were used as cathodes: stainless steel 12KH18N10T, iron, nickel, titanium, copper, aluminum, tungsten. It had been shown the behavior of current-voltage characteristics of Ti, Cu,...
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irk-123456789-1092882016-11-23T03:02:43Z The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air Glazunov, G.P. Bondarenko, M.N. Konotopskiy, A.L. Низкотемпературная плазма и плазменные технологии The behavior was investigated of current-voltage characteristics of Penning discharges in air atmosphere. Such materials were used as cathodes: stainless steel 12KH18N10T, iron, nickel, titanium, copper, aluminum, tungsten. It had been shown the behavior of current-voltage characteristics of Ti, Cu, W is typical for Penning discharges. But, if to use stainless steel or Al cathodes, no typical behavior of current-voltage characteristics was observed, namely, the discharge current abrupt increase after threshold value of discharge voltage. The physical-chemical mechanism is suggested and discussed to explain this effect. Исследовано поведение вольт-амперных характеристик (ВАХ) разрядов Пеннинга в атмосфере воздуха. В качестве катодов были использованы такие материалы: нержавеющая сталь 12Х18Н10Т, железо, никель, титан, медь, алюминий, вольфрам. Показано, что поведение вольт-амперных характеристик плазмы для таких материалов катода как титан, медь, вольфрам типично для отражательного разряда. Но при использовании в качестве материалов катода нержавеющей стали и алюминия наблюдалось не типичное поведение вольт-амперных характеристик, а именно, резкий рост тока при превышении порогового значения напряжения. Предлагается физико-химический механизм для объяснения этого эффекта. Досліджена поведінка вольт-амперних характеристик (ВАХ) розрядів Пеннінга в атмосфері повітря. Як катоди були використані такі матеріали: нержавіюча сталь 12Х18Н10Т, залізо, нікель, титан, мідь, алюміній, вольфрам. Показано, що поведінка вольт-амперних характеристик плазми для таких матеріалів катода як титан, мідь, вольфрам типово для відбивного розряду. Але при використанні в якості матеріалів катода нержавіючої сталі і алюмінію спостерігалася не типова поведінка вольт-амперних характеристик, а саме, різке зростання струму при перевищенні порогового значення напруги. Пропонується фізико-хімічний механізм для пояснення цього ефекту. 2013 2013 Article The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air / G.P. Glazunov, M.N. Bondarenko, A.L. Konotopskiy // Вопросы атомной науки и техники. — 2013. — № 1. — С. 192-194. — Бібліогр.: 3 назв. — англ. 1562-6016 PACS: 52.40.Hf http://dspace.nbuv.gov.ua/handle/123456789/109288 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии |
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Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии Glazunov, G.P. Bondarenko, M.N. Konotopskiy, A.L. The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air Вопросы атомной науки и техники |
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The behavior was investigated of current-voltage characteristics of Penning discharges in air atmosphere. Such materials were used as cathodes: stainless steel 12KH18N10T, iron, nickel, titanium, copper, aluminum, tungsten. It had been shown the behavior of current-voltage characteristics of Ti, Cu, W is typical for Penning discharges. But, if to use stainless steel or Al cathodes, no typical behavior of current-voltage characteristics was observed, namely, the discharge current abrupt increase after threshold value of discharge voltage. The physical-chemical mechanism is suggested and discussed to explain this effect. |
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Article |
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Glazunov, G.P. Bondarenko, M.N. Konotopskiy, A.L. |
author_facet |
Glazunov, G.P. Bondarenko, M.N. Konotopskiy, A.L. |
author_sort |
Glazunov, G.P. |
title |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
title_short |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
title_full |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
title_fullStr |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
title_full_unstemmed |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
title_sort |
influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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2013 |
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Низкотемпературная плазма и плазменные технологии |
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http://dspace.nbuv.gov.ua/handle/123456789/109288 |
citation_txt |
The influence of plasma treatment of different cathode materials on current-voltage characteristics of mirror discharge in air / G.P. Glazunov, M.N. Bondarenko, A.L. Konotopskiy // Вопросы атомной науки и техники. — 2013. — № 1. — С. 192-194. — Бібліогр.: 3 назв. — англ. |
series |
Вопросы атомной науки и техники |
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192 ISSN 1562-6016. ВАНТ. 2013. №1(83)
THE INFLUENCE OF PLASMA TREATMENT OF DIFFERENT
CATHODE MATERIALS ON CURRENT-VOLTAGE
CHARACTERISTICS OF MIRROR DISCHARGE IN AIR
G.P. Glazunov, M.N. Bondarenko, A.L. Konotopskiy
Institute of Plasma Physics of NSC “Kharkov Institute of Physics and Technology”,
Kharkov, Ukraine
E-mail: glazunov@ipp.kharkov.ua
The behavior was investigated of current-voltage characteristics of Penning discharges in air atmosphere. Such
materials were used as cathodes: stainless steel 12KH18N10T, iron, nickel, titanium, copper, aluminum, tungsten. It
had been shown the behavior of current-voltage characteristics of Ti, Cu, W is typical for Penning discharges. But, if
to use stainless steel or Al cathodes, no typical behavior of current-voltage characteristics was observed, namely, the
discharge current abrupt increase after threshold value of discharge voltage. The physical-chemical mechanism is
suggested and discussed to explain this effect.
PACS: 52.40.Hf
INTRODUCTION
Desorption of the essential quantity of heavy
impurity gases (water vapor, СО, N2, О2, СО2 ,
hydrocarbons, etc.) is observed at the RF- or UHF-
discharge cleaning of non heated vacuum chamber wall
surfaces of plasma devices during their preparing for
plasma experiments. This can lead to serious change of
work gas composition and, in turn, adversely effect on
vacuum-plasma characteristics of plasma facing
materials (erosive, emissive etc.). Really, there are about
~1019 particles in the Uragan-2M (U-2M) vacuum
chamber (volume ~5 m3) at the pressure of ~10-4 Torr. If
to suppose only 0.1 desorbing monolayer from the
plasma facing surfaces (~25 m3) during plasma pulse,
we will obtain ~1019 impurity particles. In other words,
no pure hydrogen plasma interacts with plasma facing
materials (mainly stainless steel), but plasma with high
quantity (~50 %) of impurities. So, it was of interest to
study behavior of stainless steel (SS) and others
materials, used in plasma devices, in conditions of the
impact by plasma discharges in air atmosphere. It had
been shown earlier [1], in particular, that treatment of
SS by magnetron type plasma discharges in air
stimulates forming of modified layer (thin films) on the
cathode surface. In this work the behavior was
investigated of current-voltage characteristics (CVC) of
mirror discharges in air atmosphere with cathodes made
of SS and others materials.
1. EXPERIMENTAL AND RESULTS
The experiments were carried out on the diagnostic
stand of materials DSM-1, operating in regime with
mirror discharges [2]. The work gas pressure for all
experiments was 2·10-3 Torr, discharge duration
10…15 min. Magnetic field in the centre of plasma
column was 500 Oe. Discharge voltage varied in the
range of -300…2000 V. At the same time discharge
current was changed from 5 to 90 mA. The scheme of
the experiment is presented in Fig. 1. Cathodes (1) were
polished disks made of stainless steel 12KH18N10T
22 mm in diameter and 2 mm thickness. Plasma column
diameter was 20 mm, the distance between cathodes
was 200 mm. Current-voltage characteristics were
measured as dependencies of discharge current on absolute
value of negative voltage on cathodes (Figs. 2-8).
Fig. 1. Scheme of the experiment: 1 – cathode;
2 – anode, 3 – plasma column
0
20
40
60
80
100
250 750 1250 1750
Discharge voltage [ V ]
D
is
ch
ar
ge
c
ur
re
nt
[
m
A
]
Al Air
SS Air
SS He
SS Ar
SS N
SS dry Air
Fig. 2. Current-voltage characteristics of mirror
discharges with SS-cathodes
It was founded that the discharge current abruptly
increases from few muliampers to 90 mA, when
discharge voltage value runs up to threshold magnitude
(in case of SS it is ≈950 V). At the same time in mirror
discharges with SS-cathodes in helium, nitrogen or
argon atmosphere such effect was not observed.
ISSN 1562-6016. ВАНТ. 2013. №1(83) 193
2. DISCUSSION
To clear up the mechanism of the process of abrupt
current increase in the case of mirror discharges with
SS-cathodes in air atmosphere CVC behavior had been
studied under impact of plasmas of mirror discharges in
various gases (air, nitrogen, helium, argon) on the
metals, which are in SS composition: Fe (steel-3), Ni,
Ti, and, also on Cu, Al, W. It turn out, that plasma CVC
behavior for such metals as Ti, Cu, W is typical for
Penning discharges, i.e., monotone current increasing
with discharge voltage increase (see Figs. 3-5). The
similar CVC behavior for these cathodes is observed in
plasmas of mirror discharges in others gases: helium,
nitrogen, argon. For cathodes made of Ni and Fe the
increase of discharge current had been measured at the
another discharge voltages and has the different
character in compare with SS (Figs. 6, 7).
0
10
20
30
40
600 1100 1600 2100
Discharge voltage [ V ]
D
is
ch
ar
ge
c
ur
re
nt
[
m
A
]
Air
Nitrogen
Helium
Argon
Fig. 3. Current-voltage characteristics of mirror
discharges with Ti-cathodes
But for Al (Fig. 8) the effect of abrupt increasing
discharge current has the similar character as for SS, but
it is observed at the low value of discharge voltage
(~300 V) and for all work gases, except argon.
0
2
4
6
8
10
12
450 1450
Disharge voltage [ V ]
D
is
ha
rg
e
cu
rr
en
t [
m
A
]
Nitrogen
Air
Helium
Argon
Fig. 4. Current-voltage characteristics of mirror
discharges with Cu-cathodes
Note, the air freeze out drying in liquid nitrogen did
not effect on the behavior of CVC of mirror discharges
with SS-cathodes, i.e. it is not founded the water vapor
influence. The cathode temperature increase during
discharge could be the reason of above mentioned
effect, but its absence for SS in case of helium, nitrogen
and argon plasmas is the evidence of highly unlikely
such explanation.
0
2
4
6
8
10
12
14
900 1400 1900
Discharge voltage [ V ]
D
is
ch
ar
ge
C
ur
re
nt
[
m
A
]
Argon
Nitrogen
Air
Helium
Fig. 5. Current-voltage characteristics of mirror
discharges with W-cathodes
0
5
10
15
20
400 900 1400 1900
Discharge voltage [ V ]
D
is
ch
ar
ge
c
ur
re
nt
[
m
A
]
Helium
Air
Nitrogen
Argon
Fig. 6. Current-voltage characteristics of mirror
discharges with Ni-cathodes
0
5
10
15
20
25
30
500 1500
DIsharge voltage [ V ]
D
is
ha
rg
e
cu
rr
en
t [
m
A
]
Air
Argon
Nitrogen
Fig. 7. Current-voltage characteristics of mirror
discharges with Fe-cathodes
0
20
40
60
80
100
120
140
160
250 450 650 850 1050 1250
Discharge voltage [ V ]
D
is
ch
ar
ge
c
ur
re
nt
[
m
A
] Air
Dry Air
Nitrogen
Helium
Argon
Fig. 8. Current-voltage characteristics of mirror
discharges with Al-cathodes
The analysis of the obtained data has shown that
discharge current abrupt increase could be caused by
plasma-chemical reaction behavior on the cathode
surface [1], which can lead to surface modification (thin
194 ISSN 1562-6016. ВАНТ. 2013. №1(83)
films forming), cathode emission current increase and,
consequently, to discharge current increase. Really, well
known the method of current emission increase from
metal surfaces by deposition of various films [3]. For
example, the electro-positive thorium deposition on W
surface changes its surface electron structure,
decreasing work function of electrons. In the case of
oxide-coated cathodes it arises due to, e.g., BaO or
others oxides deposition. In our case it could also be
oxides and, perhaps, carbides forming on the surface of
SS- and Al-cathodes because of O2, CO2 and
hydrocarbons presence in discharges.
In conclusion note, that such essential change of
emissive characteristics of stainless steel (main material
of plasma devices) under impact of plasmas of
discharges in chemical active gases can lead to serious,
undesirable consequences in real plasma machines –
arcs, breakdowns, increasing of SS erosion rate etc.
CONCLUSIONS
Current-voltage characteristics behavior had been
investigated of Penning discharges in air atmosphere. It
had been shown that current-voltage characteristics for
such cathode materials as, Ti, Cu, W are typical for
mirror discharges in all work gases. But if to use
stainless steel or Al cathode material, CVC non typical
behavior is observed, when discharge current abruptly
increases after threshold value of discharge voltage.
This effect could be caused by plasma-chemical
reactions on the cathode surface, its modification, which
leads to increase of current emission and, consequently,
discharge current.
REFERENCES
1. G.P. Glazunov, А.А. Аndreev, М.N. Bondarenko,
А.L. Konotopskiy, V.E. Moiseenko, V.А. Stolbovoy.
Erosion of vacuum-arc TiN-coatings and stainless steel
under impact of stationary plasma of magnetron type
discharges // Physical surface engineering. 2011, v. 9,
№ 3, p. 250-255.
2. G.P. Glazunov, E.D. Volkov, D.I. Baron,
A.P. Dolgiy, A.L. Konotopskiy, A. Hassanein. Effect of
Low/High Hydrogen Recycling Operation on Palladium
Sputtering under Steady State Plasma Impact // Physica
Scripta. 2003, v. T103, p. 89-92.
3. L.A. Ashkinazi, V.S. Petrov. Materials of electron
emitters . Part II. Thermal cathodes. Moscow. 1997,
p. 68 (in Russian).
Article received 03.10.12
ВЛИЯНИЕ ПЛАЗМЕННОЙ ОБРАБОТКИ РАЗЛИЧНЫХ МАТЕРИАЛОВ КАТОДА НА ВОЛЬТ-
АМПЕРНЫЕ ХАРАКТЕРИСТИКИ ОТРАЖАТЕЛЬНОГО РАЗРЯДА
Г.П. Глазунов, М.Н. Бондаренко, А.Л. Конотопский
Исследовано поведение вольт-амперных характеристик (ВАХ) разрядов Пеннинга в атмосфере воздуха. В
качестве катодов были использованы такие материалы: нержавеющая сталь 12Х18Н10Т, железо, никель,
титан, медь, алюминий, вольфрам. Показано, что поведение вольт-амперных характеристик плазмы для
таких материалов катода как титан, медь, вольфрам типично для отражательного разряда. Но при
использовании в качестве материалов катода нержавеющей стали и алюминия наблюдалось не типичное
поведение вольт-амперных характеристик, а именно, резкий рост тока при превышении порогового
значения напряжения. Предлагается физико-химический механизм для объяснения этого эффекта.
ВПЛИВ ПЛАЗМОВОЇ ОБРОБКИ РІЗНИХ МАТЕРІАЛІВ КАТОДА НА ВОЛЬТ-АМПЕРНІ
ХАРАКТЕРИСТИКИ ВІДБИВНОГО РОЗРЯДУ
Г.П. Глазунов, М.Н. Бондаренко, А.Л. Конотопський
Досліджена поведінка вольт-амперних характеристик (ВАХ) розрядів Пеннінга в атмосфері повітря. Як
катоди були використані такі матеріали: нержавіюча сталь 12Х18Н10Т, залізо, нікель, титан, мідь, алюміній,
вольфрам. Показано, що поведінка вольт-амперних характеристик плазми для таких матеріалів катода як
титан, мідь, вольфрам типово для відбивного розряду. Але при використанні в якості матеріалів катода
нержавіючої сталі і алюмінію спостерігалася не типова поведінка вольт-амперних характеристик, а саме,
різке зростання струму при перевищенні порогового значення напруги. Пропонується фізико-хімічний
механізм для пояснення цього ефекту.
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