Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters

Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters

Basic problems arising at the processing of the insulation of p-n transition of photo converters at the conditions of batch production with the use of the industrial plant "Carter" are determined. The way of elimination of these problems is shown. The modernized plant "Carter" ha...

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Datum:2007
Hauptverfasser: Fedorovich, O.A., Kruglenko, M.P., Lukomskij, D.V., Marinenko, A.A., Polozov, B.P.
Format: Artikel
Sprache:English
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
Schriftenreihe:Вопросы атомной науки и техники
Schlagworte:
Low temperature plasma and plasma technologies
Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/110578
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters/ O.A. Fedorovich, M.P. Kruglenko, D.V. Lukomskij, A.A. Marinenko, B.P. Polozov // Вопросы атомной науки и техники. — 2007. — № 1. — С. 203-205. — Бібліогр.: 5 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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