Application of the modified plasma accelerator for amorphous diamond-like films production
In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hyd...
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Datum: | 2003 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2003
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Schriftenreihe: | Вопросы атомной науки и техники |
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Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/110615 |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Zitieren: | Application of the modified plasma accelerator for amorphous diamond-like films production / A.A. Bizukov, V.N. Borisko, А.Е. Kashaba, К.D. Sereda, N.N. Yunakov, D.V. Zinov’ev // Вопросы атомной науки и техники. — 2003. — № 1. — С. 144-146. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of UkraineZusammenfassung: | In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hydrogen the metal hydride block of exterior filling was used. As a hydride forming material the intermetallide LaNi5 was used which ensures necessary hydrogen-capacity and velocity of a sorption - desorption of hydrogen.The electron-diffraction, electron-microscopic and optical investigations of film properties were carried out. It is shown that the described method allows to get amorphous diamond-like films. It is established that films obtained according to classification of Grigorovici R., concern to a structural sandwich-type. The carbon atoms in a layer have a strong covalent bond and between layers there is a weak double bond such as Van der Waals. |
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