Application of the modified plasma accelerator for amorphous diamond-like films production

In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hyd...

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Datum:2003
Hauptverfasser: Bizukov, A.A., Borisko, V.N., Kashaba, А.Е., Sereda, К.D., Yunakov, N.N., Zinov’ev, D.V.
Format: Artikel
Sprache:English
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2003
Schriftenreihe:Вопросы атомной науки и техники
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Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/110615
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Application of the modified plasma accelerator for amorphous diamond-like films production / A.A. Bizukov, V.N. Borisko, А.Е. Kashaba, К.D. Sereda, N.N. Yunakov, D.V. Zinov’ev // Вопросы атомной науки и техники. — 2003. — № 1. — С. 144-146. — Бібліогр.: 9 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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Zusammenfassung:In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hydrogen the metal hydride block of exterior filling was used. As a hydride forming material the intermetallide LaNi5 was used which ensures necessary hydrogen-capacity and velocity of a sorption - desorption of hydrogen.The electron-diffraction, electron-microscopic and optical investigations of film properties were carried out. It is shown that the described method allows to get amorphous diamond-like films. It is established that films obtained according to classification of Grigorovici R., concern to a structural sandwich-type. The carbon atoms in a layer have a strong covalent bond and between layers there is a weak double bond such as Van der Waals.