Application of the modified plasma accelerator for amorphous diamond-like films production
In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm with deposition velocity 200...400 nm/hour were received. For production of hyd...
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| Date: | 2003 |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2003
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/110615 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Application of the modified plasma accelerator for amorphous diamond-like films production / A.A. Bizukov, V.N. Borisko, А.Е. Kashaba, К.D. Sereda, N.N. Yunakov, D.V. Zinov’ev // Вопросы атомной науки и техники. — 2003. — № 1. — С. 144-146. — Бібліогр.: 9 назв. — англ. |
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