Gas-Phase Synthesis of Film Structures of Ni—N System
As shown, the magnetron sputtering is effective for the synthesis of various nanostructured phases of nickel nitride (solid solution of nitrogen in nickel, Ni₄N, Ni₃N, and Ni₂N). The regularities of formation of globular or nanocolumnar film structures are determined, depending on the concentration...
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| Datum: | 2015 |
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| Format: | Artikel |
| Sprache: | English |
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Інститут металофізики ім. Г.В. Курдюмова НАН України
2015
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| Schriftenreihe: | Металлофизика и новейшие технологии |
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| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/111892 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Gas-Phase Synthesis of Film Structures of Ni—N System / R. V. Shalaev // Металлофизика и новейшие технологии. — 2015. — Т. 37, № 4. — С. 509-519. — Бібліогр.: 12 назв. — рос. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | As shown, the magnetron sputtering is effective for the synthesis of various nanostructured phases of nickel nitride (solid solution of nitrogen in nickel, Ni₄N, Ni₃N, and Ni₂N). The regularities of formation of globular or nanocolumnar film structures are determined, depending on the concentration of nitrogen in the buffer gas. |
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