High-temperature characteristics of zone-melting recrystallized silicon-on-insulator MOSFETs
The characteristics of enhancement-mode MOS transistors fabricated on zone-melting recrystallized (ZMR) silicon-on-insulator (SOI) films were systematically experimentally investigated in the temperature range 25–300°C. The main temperature-dependent parameters (the threshold voltage, the channel mo...
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| Date: | 1998 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1998
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| Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/114677 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | High-temperature characteristics of zone-melting recrystallized silicon-on-insulator MOSFETs / V.S. Lysenko, T.E. Rudenko, A.N. Nazarov, V.I. Kilchitskaya, A.N. Rudenko, A.B. Limanov, J.-P. Colinge // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1998. — Т. 1, № 1. — С. 101-107. — Бібліогр.: 11 назв. — англ. |