Sequential implantations of deuterium and helium ions into tungsten-coated composite structures
The trapping and thermal desorption of deuterium and helium implanted into tungsten-coated composite structures were studied. The amount of accumulated deuterium and helium, and the shape of thermal desorption spectra were shown to be depended on the way of irradiation by the D⁺ and He⁺ ions: indivi...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Цитувати: | Sequential implantations of deuterium and helium ions into tungsten-coated composite structures / N.A. Azarenkov, V.V. Bobkov, L.P. Tishchenko, R.I. Starovoitov, Yu.I. Kovtunenko, Yu.E. Logachev, L.A. Gamayunova // Вопросы атомной науки и техники. — 2016. — № 6. — С. 73-76. — Бібліогр.: 9 назв. — англ. |
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irk-123456789-1153202017-04-03T03:02:26Z Sequential implantations of deuterium and helium ions into tungsten-coated composite structures Azarenkov, N.A. Bobkov, V.V. Tishchenko, L.P. Starovoitov, R.I. Kovtunenko, Yu.I. Logachev, Yu.E. Gamayunova, L.A. ITER and fusion reactor aspects The trapping and thermal desorption of deuterium and helium implanted into tungsten-coated composite structures were studied. The amount of accumulated deuterium and helium, and the shape of thermal desorption spectra were shown to be depended on the way of irradiation by the D⁺ and He⁺ ions: individually or sequentially. The possible mechanisms of these processes are proposed. Изучены процессы захвата и термической десорбции дейтерия и гелия, имплантированных в композиционные структуры с вольфрамовым покрытием. Количества накопленных дейтерия и гелия и вид спектров термической десорбции показаны в зависимости от схемы облучения ионами D⁺ и He⁺ : по отдельности или последовательно в разной очерёдности. Предложены возможные механизмы этих процессов. Вивчено процеси захоплювання та термічної десорбції дейтерію та гелію, імплантованих у композиційні структури з вольфрамовим покриттям. Кількості накопичених дейтерію та гелію та вигляд спектрів термічної десорбції показано в залежності від схеми опромінення іонами D⁺ та He⁺ : окремо або послідовно в різній черговості. Запропоновані можливі механізми цих процесів. 2016 Article Sequential implantations of deuterium and helium ions into tungsten-coated composite structures / N.A. Azarenkov, V.V. Bobkov, L.P. Tishchenko, R.I. Starovoitov, Yu.I. Kovtunenko, Yu.E. Logachev, L.A. Gamayunova // Вопросы атомной науки и техники. — 2016. — № 6. — С. 73-76. — Бібліогр.: 9 назв. — англ. 1562-6016 PACS: 61.80.-x, 61.80.Jh http://dspace.nbuv.gov.ua/handle/123456789/115320 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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| language |
English |
| topic |
ITER and fusion reactor aspects ITER and fusion reactor aspects |
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ITER and fusion reactor aspects ITER and fusion reactor aspects Azarenkov, N.A. Bobkov, V.V. Tishchenko, L.P. Starovoitov, R.I. Kovtunenko, Yu.I. Logachev, Yu.E. Gamayunova, L.A. Sequential implantations of deuterium and helium ions into tungsten-coated composite structures Вопросы атомной науки и техники |
| description |
The trapping and thermal desorption of deuterium and helium implanted into tungsten-coated composite structures were studied. The amount of accumulated deuterium and helium, and the shape of thermal desorption spectra were shown to be depended on the way of irradiation by the D⁺ and He⁺ ions: individually or sequentially. The possible mechanisms of these processes are proposed. |
| format |
Article |
| author |
Azarenkov, N.A. Bobkov, V.V. Tishchenko, L.P. Starovoitov, R.I. Kovtunenko, Yu.I. Logachev, Yu.E. Gamayunova, L.A. |
| author_facet |
Azarenkov, N.A. Bobkov, V.V. Tishchenko, L.P. Starovoitov, R.I. Kovtunenko, Yu.I. Logachev, Yu.E. Gamayunova, L.A. |
| author_sort |
Azarenkov, N.A. |
| title |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| title_short |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| title_full |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| title_fullStr |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| title_full_unstemmed |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| title_sort |
sequential implantations of deuterium and helium ions into tungsten-coated composite structures |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2016 |
| topic_facet |
ITER and fusion reactor aspects |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/115320 |
| citation_txt |
Sequential implantations of deuterium and helium ions into tungsten-coated composite structures / N.A. Azarenkov, V.V. Bobkov, L.P. Tishchenko, R.I. Starovoitov, Yu.I. Kovtunenko,
Yu.E. Logachev, L.A. Gamayunova // Вопросы атомной науки и техники. — 2016. — № 6. — С. 73-76. — Бібліогр.: 9 назв. — англ. |
| series |
Вопросы атомной науки и техники |
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| fulltext |
ISSN 1562-6016. ВАНТ. 2016. №6(106)
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2016, № 6. Series: Plasma Physics (22), p. 73-76. 73
SEQUENTIAL IMPLANTATIONS OF DEUTERIUM AND HELIUM IONS
INTO TUNGSTEN-COATED COMPOSITE STRUCTURES
N.A. Azarenkov, V.V. Bobkov, L.P. Tishchenko, R.I. Starovoitov, Yu.I. Kovtunenko,
Yu.E. Logachev, L.A. Gamayunova
V.N. Karazin Kharkiv National University, Kharkov, Ukraine
E-mail: vbobkov@mail.ru
The trapping and thermal desorption of deuterium and helium implanted into tungsten-coated composite
structures were studied. The amount of accumulated deuterium and helium, and the shape of thermal desorption
spectra were shown to be depended on the way of irradiation by the D
+
and He
+
ions: individually or sequential-
ly. The possible mechanisms of these processes are proposed.
PACS: 61.80.-x, 61.80.Jh
INTRODUCTION
Tungsten coating of multilayer functional structures
is a promising material for devices contacting with the
plasma in fusion installations. The possibility of its use
in such devices is largely depend on its radiation re-
sistance to the accumulation in it hydrogen isotopes and
helium, forming in the result of the interaction with
plasma streams. As very actual, this problem is inten-
sively studied in recent years [1-6]. In [1-3] a compre-
hensive analysis of formation of matrix radiation de-
fects, as well as the capture, retention and thermal de-
sorption of deuterium and helium, ion-implanted in
tungsten coatings of multilayer composite systems sepa-
rately, was done. It is of interest to carry out these stud-
ies at sequential implantation of Не
+
and D
+
ions. Only
a few literature data showed a mutual influence on each
other sequentially implanted ions of hydrogen isotopes
and helium in tungsten during irradiation and after heat-
ing [4-6]. In this paper we studied the influence of pre-
implantation of He
+
ions (or D
+
) on the accumulation of
deuterium (or helium) in tungsten coatings of multilayer
composite structures and their thermal desorption in a
vacuum. The types of radiation damage, formed during
single and sequential irradiations by D
+
and Не
+
ions,
were cleared, their influence on the structural features
and radiation resistance of tungsten coatings was shown.
1. EXPERIMENTS
Tungsten coatings of about 1 micron in thickness
deposited by magnetron sputtering of W target in Ar
atmosphere at the pressure of 1.0
Pa were studied. Dep-
osition was carried out at a rate of 0.6 nm s
-1
on a stain-
less steel substrate (SSt) 0.5 mm thick at a temperature
T = 600 K with pre-deposited Ti layer of thickness less
than 10 nm (SSt + W). Tungsten coatings have a poly-
crystalline structure with an average grain size of about
60 nm and a low degree of texture with texture axis
[110]. The samples were irradiated at the room tempera-
ture sequentially by 10 keV D
+
(20 keV D2
+
) and
20 keV He
+
ion beams at a current density
5
µА cm
-2
up to doses Ф in the range (0.2…5.0)×10
17
cm
-2
in the
sequence: He
+
, D
+
or D
+
, He
+
. Mean projective and
full ranges of D
+
(10 keV) and He
+
(20 keV) ions in the
tungsten coatings from the calculations [7] were about
60 and 160 nm respectively; they were comparable for
compared ions and significantly less than the coatings
thickness. According to [7], profiles of W lattice radia-
tion damages, generated by D
+
and He
+
ions, were iden-
tical and situated in the area of implanted ions. In exper-
iments with implantation of only one type of ions their
energy and dose were the same as at combined sequen-
tial implantations.
In the studies we used the methods of thermal de-
sorption spectrometry (TDS) (on PTI-7A gas mass spec-
trometer, with calibrated helium leak valve GELIT-1)
and electron microscopy. We got the spectra of thermal
desorption of helium and deuterium and, using the data
of the cross section of ionization of helium and deuteri-
um particles [8] in the source of the mass spectrometer,
determined the concentrations C and capture coefficient
of implanted gases η = C/Ф. A more detailed descrip-
tion of the experimental procedure was given in [9].
The desorption spectra of helium atoms and deuteri-
um molecules were got, heating the irradiated samples
with a constant rate α
=
0.8 K∙s
-1
in the temperature
range 290…1800 K. The temperature measurements
error was ±
5 K. The spectra represented dependencies
of the number S of implanted gas particles, released at
the heating temperature T, on this temperature. The
sensitivity of the used method of determining the num-
ber of helium and deuterium particles was not worse
than 2×10
12
cm
-2
. When heated the non-irradiated sam-
ples the partial pressures of helium and deuterium were
less than 1×10
-7
Pa. Initial background of particles with
m
=
4 was not greater than S
=
0.001×10
16
cm
-2
at
T < 1200 K and S
<
0.005×10
16
см
-2
in the temperature
range ΔT = 1600…1800 K, where the evaporation of
stainless steel substrate components and a slight in-
crease in the residual vacuum in the chamber were ob-
served. In the thermal desorption spectra of helium and
deuterium implanted separately, at T < 1200 K the value
S for the helium did not exceed the background S, and
the S value for the deuterium at T
≥
1200 K also did not
exceed the background value. The latter fact allowed to
suggest that the thermal desorption spectra of helium
and deuterium ions which were implanted in sequential
mailto:vbobkov@mail.ru
74 ISSN 1562-6016. ВАНТ. 2016. №6(106)
combinations, at T < 1200 K showed the D2 release
from the W coating in vacuum, and He release when
T ≥ 1200 K.
Studies of changes of microstructures of the W coat-
ing near surface layers with implanted helium and deu-
terium were done on thinned samples using a transmis-
sion electron microscope TEM-100
L. The morphology
of the surface of the irradiated samples was monitored
with a scanning electron microscope SEM
-100
U.
2. RESULTS AND DISCUSSION
When heated the composite structures with tungsten
coatings single or sequentially irradiated by D
+
and He
+
ions, thermal release of implanted gases into the vacu-
um was observed. In Fig.1 the spectra of deuterium
thermal desorption from tungsten coated composite
structure (SSt + W (µm)), irradiated only by D
+
ions up
to different doses are shown. The desorption of helium
from the tungsten coating of the same composite struc-
ture, irradiated only by He
+
ions to different doses, are
shown in Fig.
2. In Fig.
3 there are shown the spectra of
thermal desorption of deuterium and helium from the
tungsten coated composite structure (SSt + W (µm)),
irradiated sequentially D
+
and He
+
ions under the
schemes: (He
+
– D
+
) – curve 1 and (D
+
– He
+
) – curve
2. For other doses of the sequential irradiations by the
named ions spectra of thermal desorption of deuterium
and helium were similar.
As seen from Fig. 1, a significant deuterium release
from the coatings started at temperatures T
≥
350 K, and
ended at T ≈ 1000
K (curves 1-4). At ФD+
≥
5.0×10
17
cm
–
2
small D2 release took place up to T
≈
1200 K (curve 5).
There was one peak of deuterium thermal desorption
with the maximum temperature Tm near 640 K.
As seen from Fig.
2 (curves 1-4), the temperature
range of helium release ΔT ≈ (900…1800) K did not
agree with ΔT of deuterium. Helium released mainly at
Tm ≈ 1500 K. At ФHe+ ≥ 4.7×10
17
сm
-2
(curves 5, 6) in
the spectra of helium thermal desorption there appeared
the low-temperature region of this gas release:
ΔT
≈
(350…900) K, which superposed with the area of
D2 release (see Fig. 1). From a comparison of Figs. 1-3
it could be concluded that, if the irradiation doses did
not exceed 5.0×10
17
сm
-2
, the spectra of thermal desorp-
tion of deuterium and helium ions which had been im-
planted in different sequences represented a superposi-
tion of spectra of thermal desorption D2 and He, im-
planted with the same doses separately. The temperature
ranges of deuterium and helium release remained the
same; maxima of peaks of thermal desorption had the
same Tm both for single and sequentially implantations
of D
+
and He
+
ions.
Fig.
4 shows the dependences of the concentration
CHe (1) and capture coefficient ηHe (2) of helium in the
tungsten coating on the dose ФНе+ of He
+
ions irradia-
tion in different schemes (only He
+
– ●,
▲; sequentially:
(He
+
– D
+
) – ○,
Δ, or (D
+
– He
+
) – ×, ж). Fig. 5 shows the
dependences of the CD (1) and ηD (2) of deuterium on
the dose ФD+ of D
+
ions irradiation in various schemes
(only D
+
– ●,
▲; sequentially: (He
+
– D
+
) – ○,
Δ, or (D
+
–
He
+
) – ×,
ж). As can be seen from Figs.
4 and 5, for
different schemes of D
+
, He
+
ions irradiation the values
CHe and ηHe for implanted helium much more than simi-
lar values of CD and ηD for implanted deuterium.
The dependences in Fig.
6 show the influence of pre-
implantation of one type of gas on accumulation of
another gas in sequential irradiation of tungsten coatings
by D
+
, He
+
ions.
0
0.2
0.4
0.6
0.8
1
200 600 1000 1400 1800
T , K
S
,
1
0
1
6
cm
-2
5
2
1
4
3
Fig.
1. Spectra of deuterium thermodesorption from
the tungsten coatings of the composite structure
(SSt+ W(µm)) that irradiated by D
+
ions (10 keV,
ФD+, 10
17
cm
-2
: 1 – 1.0; 2 – 2.0; 3 – 3.0; 4 – 4.0;
5
– 5.0); α = 0.8
K∙s
-1
0
2
4
6
8
10
200 600 1000 1400 1800
T , K
S
,
1
0
1
6
cm
-2
1
2
3
4
6
5
Fig.
2. Spectra of helium thermodesorption from the
tungsten coatings of the composite structure
(SSt+
W(µm)) that irradiated by He
+
ions (20 keV,
ФHe+, 10
17
cm
-2
: 1 – 1.0; 2 – 2.0; 3 – 3.1; 4 – 4.0;
5 – 4.7; 6 – 8.3); α
= 0.8
K∙s
-1
0
1
2
3
4
5
200 600 1000 1400 1800
T , K
S
,
1
0
1
6
cm
-2
2
1
Fig. 3. Spectra of deuterium and helium thermo-
desorption from the tungsten coating of the com-
posite structure (SSt.+ W(µm)) that were sequen-
tially irradiated by:(He
+
– D
+
) – curve 1; (D
+
–
He
+
) – curve 2; D
+
(10 keV, 2.0×10
17
cm
-2
); He
+
(20 keV, 2.0×10
17
cm
-2
); α
= 0.8
K∙s
-1
ISSN 1562-6016. ВАНТ. 2016. №6(106) 75
As followed from the results, pre-implantation of heli-
um to different doses did not change the values of CD
and ηD for deuterium (see the dependences
CD = ƒ(ФHe+) (curve 1) and ηD
=
ƒ(ФHe+) (curve 2) in
Fig.
6). Deuterium pre-implantation to different doses
also did not change the values of CHe and ηHe for helium
(see the dependences CHe = ƒ(ФD+) (curve 1') and ηHe
=
ƒ(ФD+) (curve 2') in Fig.
6.
In the works of other authors [4-6] for W foil there
was shown the influence of pre-implantation of He
+
ions
with the scheme (He
+
– D
+
) on the capture of deuterium.
Pre-irradiation of He
+
ions (8…10 keV) at
0.3
ФHe+
1.0×10
17
cm
-2
, did not change the retention
of D
+
ions, implanted at ФD+
=(1–2)×10
17
cm
-2
[4] and
increased it by 3 times, when the dose of He
+
ions
reached ФHe+
=
2.0×10
17
cm
-2
[5]. The authors connect-
ed these facts with the capture of D particles in radiation
defects of matrix in the first case [4] and the influence
of a field of strong tension around individual helium
bubbles in the second [5]. According to [6], with a fur-
ther increase of the dose of He
+
ions (3 keV) up to
ФHe+
=
1.0×10
19
cm
-2
, the capture of deuterium de-
creased in the result of the influence of the formed net-
work of helium bubbles on the accumulation of deuteri-
um. Authors [6] noted a decrease of deuterium capture
in sequential implantation (D
+
–Не
+
)
(ФD+
=
1×10
17
cm
2
), ФHe+
=
1.0×10
17
cm
-2
) in the result
of radiation enhanced diffusion of weakly retained deu-
terium atoms to the surface of the sample and released
in the vacuum at the further irradiation by He
+
ions.
TEM studies of the authors of this paper [2, 3] of
tungsten coatings single irradiated at room temperature
by He
+
(ФHe+
2.0×10
17
cm
-2
) or D
+
(ФD+
≤
6×10
18
cm
-2
)
ions showed that deuterium and helium bubbles did not
formed in the grains of the crystal structure. Helium
bubbles were visible at ФHe+
≥
7×10
17
cm
-2
, they have
the average diameter and density 2.5
nm and 5×10
12
cm
-2
respectively at ФHe+
=
7×10
17
cm
-2
. It was also observed
the formation of interstitial dislocation loops and dislo-
cation networks with an average diameter >
5
nm and a
density greater than 3.2×10
12
сm
-2
. On the obtained data
the following types of radiation defects, formed in the
volumes of tungsten coatings under sequential irradia-
tion by He
+
and D
+
ions, were proposed: vacancy-type
defects, interstitial dislocation loops, gas-vacancy
complexes HemVn
, DmVn
.
CONCLUSIONS
The radiation resistance of tungsten coatings compo-
site structure (SSt + W (µm)) to the sequential irradia-
tion by D
+
and He
+
ions of medium energies up to doses
ФD+
4,0×10
17
cm
-2
and ФHe+
4,7×10
17
cm
-2
at the
room temperature was studied. The spectra of the ther-
mal desorption of deuterium and helium from the sam-
ple in vacuum was analyzed; capture coefficients for
these gases in the coatings were determined. At single
and sequential implantation of D
+
and He
+
ions in tung-
sten coatings such regularities were established: deuter-
ium was accumulated in tungsten coatings at lower
concentrations compared with helium, and its capture
coefficient was about one order of magnitude lower.
Fig.
4. Dependences of the concentration CHe (1) and
capture coefficient ηHe (2) of helium particles in the
tungsten coating of the composite structure on ФHe+
fluency for different ways of irradiation: ●,
▲–He
+
ions; ×,
ж– (D
+
– He
+
) ions; ○,
∆ – (He
+
– D
+
) ions;
D
+
(10 keV, 2.0×10
17
cm
-2
); He
+
(20 keV)
0
0.4
0.8
1.2
1.6
0 1 2 3 4 5 6
Ф D+, 10
17
cm
-2
C D,10
17
cm
-2
0
0.04
0.08
0.12
0.16
η D
1
2
Fig.
5. Dependences of the concentration CD (1) and
capture coefficient ηD (2) of deuterium particles in the
tungsten coating of the composite structure on the ФD+
fluency for different ways of irradiation: ●,
▲ – D
+
ions;
×,
ж – (D
+
– He
+
) ions; ○,
∆ – (He
+
– D
+
) ions;
He
+
(20
keV, 2.0×10
17
cm
-2
); D
+
(10 keV)
0
1
2
3
4
0 1 2 3 4 5
ФHe+, 10
17
cm
-2
, ФD+, 10
17
cm
-2
C D, 10
17
cm
-2
C He,10
17
cm
-2
0
0.2
0.4
0.6
0.8
η D
η He
1 2
1'
2'
Fig.
6. Dependences of CD
=
ƒ(ФHe+) (curve 1) and
CHe
=
ƒ(ФD+) (curve 1'), ηD
=
ƒ(ФHe+) ( curve 2) and
ηHe
=
ƒ(ФD+) (curve 2') for D2 and He in the tungsten
coating irradiated: single D
+
or He
+
ions – ●,
▲;
(He
+
– D
+
) sequentially – ○,
∆; (D
+
– He
+
) sequentially –
×,
ж
.The curves 1, 2 for ФD+
= 2.0×10
17
cm
-2
and the
curves 1', 2' – for ФHe+
= 2.0×10
17
cm
-2
0
2
4
6
8
0 2 4 6 8
Ф He+, 10
17
cm
-2
C He,10
17
cm
-2
0
0.2
0.4
0.6
0.8
η He
1
2
76 ISSN 1562-6016. ВАНТ. 2016. №6(106)
At sequential implantations of these ions the tempera-
ture range of deuterium or helium release and the tem-
peratures of the peaks maxima in the spectra of thermal
desorption were the same as in the single implantation;
accumulation of deuterium (helium) was independent of
He
+
(D
+
) ion pre-implantation. It was suggested that into
tungsten coatings under sequential irradiations the fol-
lowing types of radiation damage were formed: defects
of the vacancy type, interstitial dislocation loops, gas –
vacancy complexes HemVn
, DmVn
.
REFERENCES
1. V.V. Bobkov, A.V. Onishchenko, et al. Ion-
Implanted Deuterium Accumulation in a Deposited
Tungsten Coating // J. Surface Investigation. X-ray,
Synchrotron and Neutron Techniques. 2010, v.
4, № 5,
p.
852-858.
2. V.V. Bobkov, L.P. Tishchenko, et al. Implantation of
Helium and Deuterium Ions into Tungsten-Coated
Composite Structures // J. Surface Investigation. X-ray,
Synchrotron and Neutron Techniques. 2011, v. 5, № 4,
p. 806-811.
3. V.V. Bobkov, R.I. Starovoitov, et al. Deuterium-Ion
Implantation into Composite Structures with Tungsten
Coatings // J. Surface Investigation. X-ray, Synchrotron
and Neutron Techniques. 2014, v.
8, №
5, p.
853-858.
4. S. Nagata, K. Takahiro. Effect of Helium Irradiation
on Trapping and Thermal Release of Deuterium Im-
planted in Tungsten // J. Nucl. Mater. 2001, v.
290-293,
p. 135–139.
5. H. Iwakiri, K. Morishita, N. Yoshida. Effects of Heli-
um Bombardment on the Deuterium Behavior in Tung-
sten // J. Nucl. Mater. 2002, v.
307-311, p.
135-138.
6. Y. Sakoi, M. Miyamoto, et al. Helium Irradiation
Effects on Deuterium Retention in Tungsten // J. Nucl.
Mater. 2013, v.
442, p.
S715-S718.
7. J.F. Ziegler, J.P. Biersack., and M.D. Ziegler. The
Stopping and Range of Ions in Solids, available from
www.SRIM. org (2008.04).
8. B.M. Smirnov. Atomnye stolknovenija i elementarnye
processy v plazme. M.: “Atomizdat”, 1968 (in Russian).
9. L.P. Tishchenko, T.I. Peregon, et al. Issledovanie
processov zahvata i gazovydelenija ionno-implantirovan
nogo dejterija iz plenok vol'frama // Izv. RAN. Ser. fiz.
2006, v.
70, №
8, p.
1197-1200 (in Russian).
Article received 21.10.2016
ПОСЛЕДОВАТЕЛЬНАЯ ИМПЛАНТАЦИЯ ИОНОВ ДЕЙТЕРИЯ И ГЕЛИЯ В ВОЛЬФРАМОВЫЕ
ПОКРЫТИЯ КОМПОЗИЦИОННЫХ СТРУКТУР
Н.А. Азаренков, В.В. Бобков, Л.П. Тищенко, Р.И. Старовойтов, Ю.И. Ковтуненко, Ю.Е. Логачёв,
Л.А. Гамаюнова
Изучены процессы захвата и термической десорбции дейтерия и гелия, имплантированных в компози-
ционные структуры с вольфрамовым покрытием. Количества накопленных дейтерия и гелия и вид спек-
тров термической десорбции показаны в зависимости от схемы облучения ионами D
+
и He
+
: по отдельно-
сти или последовательно в разной очерёдности. Предложены возможные механизмы этих процессов.
ПОСЛІДОВНА ІМПЛАНТАЦІЯ ІОНІВ ДЕЙТЕРІЮ ТА ГЕЛІЮ У ВОЛЬФРАМОВІ ПОКРИТТЯ
КОМПОЗИЦІЙНИХ СТРУКТУР
М.О. Азаренков, В.В. Бобков, Л.П. Тищенко, Р.І. Старовойтов, Ю.І. Ковтуненко, Ю.Є. Логачов,
Л.О. Гамаюнова
Вивчено процеси захоплювання та термічної десорбції дейтерію та гелію, імплантованих у компози-
ційні структури з вольфрамовим покриттям. Кількості накопичених дейтерію та гелію та вигляд спектрів
термічної десорбції показано в залежності від схеми опромінення іонами D
+
та He
+
: окремо або послідов-
но в різній черговості. Запропоновані можливі механізми цих процесів.
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