Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method
Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated. Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure and mechanical properties of the coatings was studied. It is found that in a...
Gespeichert in:
| Datum: | 2016 |
|---|---|
| Hauptverfasser: | , , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
|
| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/115454 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method / V.V. Vasyliev, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij, B. Lorentz,S. Reichert, V. Zavaleyev, J. Walkowicz, M. Sawczak // Вопросы атомной науки и техники. — 2016. — № 6. — С. 244-247. — Бібліогр.: 9 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated.
Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure and
mechanical properties of the coatings was studied. It is found that in all coatings formed solid solution of (Cr, Al)N
with a cubic structure type NaCl. High voltage pulsed potential bias causes formation of the coatings structure
with fine grains (6…7 nm) and strong axial texture [110]. Residual compressive stress varies nonmonotonously
from 2 to 7 GPa when the amplitude of the pulses increases. The coatings are characterized by high hardness
30…36 GPa, the surface roughness at the level of 40…50 nm and a low friction coefficient, which allows their
use as protective coatings for tools and friction units |
|---|