Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method
Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated. Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure and mechanical properties of the coatings was studied. It is found that in a...
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| Date: | 2016 |
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| Main Authors: | , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/115454 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method / V.V. Vasyliev, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij, B. Lorentz,S. Reichert, V. Zavaleyev, J. Walkowicz, M. Sawczak // Вопросы атомной науки и техники. — 2016. — № 6. — С. 244-247. — Бібліогр.: 9 назв. — англ. |