Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method

Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method

Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated. Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure and mechanical properties of the coatings was studied. It is found that in a...

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Datum:2016
Hauptverfasser: Vasyliev, V.V., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E., Lorentz, B., Reichert, S., Zavaleyev, V., Walkowicz, J., Sawczak, M.
Format: Artikel
Sprache:English
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
Schriftenreihe:Вопросы атомной науки и техники
Schlagworte:
Low temperature plasma and plasma technologies
Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/115454
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method / V.V. Vasyliev, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij, B. Lorentz,S. Reichert, V. Zavaleyev, J. Walkowicz, M. Sawczak // Вопросы атомной науки и техники. — 2016. — № 6. — С. 244-247. — Бібліогр.: 9 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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