Optical properties of the Ti surface structured by femtosecond laser beam
Wavelength-scaled periodic ripples formed on the Ti surface under the action of femtosecond laser irradiation have been investigated. The ripples were oriented in parallel to the incident light polarization. After initial formation of ripples, the following laser induced chemical transformation o...
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
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Zitieren: | Optical properties of the Ti surface structured by femtosecond laser beam / L. Dolgov, R. Kravchuk, A. Rybak, V. Kiisk, I. Sildos, I. Blonskyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 3. — С. 325-329. — Бібліогр.: 26 назв. — англ. |
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irk-123456789-1177502017-05-27T03:04:54Z Optical properties of the Ti surface structured by femtosecond laser beam Dolgov, L. Kravchuk, R. Rybak, A. Kiisk, V. Sildos, I. Blonskyi, I. Wavelength-scaled periodic ripples formed on the Ti surface under the action of femtosecond laser irradiation have been investigated. The ripples were oriented in parallel to the incident light polarization. After initial formation of ripples, the following laser induced chemical transformation of metallic Ti into dielectric compound was established using the Raman scattering data. Weak Wood’s anomaly in the spectra on light diffracted by the structured Ti surface testifies the minor plasmonic activity. 2011 Article Optical properties of the Ti surface structured by femtosecond laser beam / L. Dolgov, R. Kravchuk, A. Rybak, V. Kiisk, I. Sildos, I. Blonskyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 3. — С. 325-329. — Бібліогр.: 26 назв. — англ. 1560-8034 PACS 61.80.Ba, 73.20.Mf, 78.30.Er http://dspace.nbuv.gov.ua/handle/123456789/117750 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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Wavelength-scaled periodic ripples formed on the Ti surface under the action
of femtosecond laser irradiation have been investigated. The ripples were oriented in
parallel to the incident light polarization. After initial formation of ripples, the following
laser induced chemical transformation of metallic Ti into dielectric compound was
established using the Raman scattering data. Weak Wood’s anomaly in the spectra on
light diffracted by the structured Ti surface testifies the minor plasmonic activity. |
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Article |
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Dolgov, L. Kravchuk, R. Rybak, A. Kiisk, V. Sildos, I. Blonskyi, I. |
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Dolgov, L. Kravchuk, R. Rybak, A. Kiisk, V. Sildos, I. Blonskyi, I. Optical properties of the Ti surface structured by femtosecond laser beam Semiconductor Physics Quantum Electronics & Optoelectronics |
author_facet |
Dolgov, L. Kravchuk, R. Rybak, A. Kiisk, V. Sildos, I. Blonskyi, I. |
author_sort |
Dolgov, L. |
title |
Optical properties of the Ti surface structured by femtosecond laser beam |
title_short |
Optical properties of the Ti surface structured by femtosecond laser beam |
title_full |
Optical properties of the Ti surface structured by femtosecond laser beam |
title_fullStr |
Optical properties of the Ti surface structured by femtosecond laser beam |
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Optical properties of the Ti surface structured by femtosecond laser beam |
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optical properties of the ti surface structured by femtosecond laser beam |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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2011 |
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http://dspace.nbuv.gov.ua/handle/123456789/117750 |
citation_txt |
Optical properties of the Ti surface structured by femtosecond laser beam / L. Dolgov, R. Kravchuk, A. Rybak, V. Kiisk, I. Sildos, I. Blonskyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 3. — С. 325-329. — Бібліогр.: 26 назв. — англ. |
series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
work_keys_str_mv |
AT dolgovl opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam AT kravchukr opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam AT rybaka opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam AT kiiskv opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam AT sildosi opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam AT blonskyii opticalpropertiesofthetisurfacestructuredbyfemtosecondlaserbeam |
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2025-07-08T12:44:30Z |
last_indexed |
2025-07-08T12:44:30Z |
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Semiconductor Physics, Quantum Electronics & Optoelectronics, 2011. V. 14, N 3. P. 325-329.
PACS 61.80.Ba, 73.20.Mf, 78.30.Er
Optical properties of the Ti surface structured
by femtosecond laser beam
L. Dolgov1, R. Kravchuk2, A. Rybak2, V. Kiisk1, I. Sildos1
, I. Blonskyi2
1Institute of Physics, University of Tartu, 51014 Tartu, Estonia
2Institute of Physics, NAS of Ukraine, 46, prospect Nauky, 03028 Kyiv, Ukraine
Abstract. Wavelength-scaled periodic ripples formed on the Ti surface under the action
of femtosecond laser irradiation have been investigated. The ripples were oriented in
parallel to the incident light polarization. After initial formation of ripples, the following
laser induced chemical transformation of metallic Ti into dielectric compound was
established using the Raman scattering data. Weak Wood’s anomaly in the spectra on
light diffracted by the structured Ti surface testifies the minor plasmonic activity.
Keywords: laser structuring, titanium, plasmonic waves, Raman spectroscopy.
Manuscript received 28.03.11; accepted for publication 14.09.11; published online 21.09.11.
1. Introduction
Formation of periodic structures on metal and
semiconductor surfaces by powerful laser pulses is now
under the rapt attention. Applied interest is due to the
possibility of obtaining periodic surface nanostructures
without special mechanical or lithographical
performance. Laser induced periodic surface structuring
can be used in preparation of diffractive elements [1],
active surfaces for enhanced Raman scattering [2],
incandescent light sources with improved brightness [3].
According to existing concepts, surface structuring is a
result of interrelation between optical, thermal and
dynamic electronic processes occurring on the interface
during laser irradiation [4-7]. Engaging of different
branches of materials science and desire to obtain
nanostructures with suitable properties stimulate
scientific interest to these laser-structured surfaces.
The most typical laser-induced surface structures
are ripples on a sample surface. Physical mechanisms
providing formation of ripples may differ in details,
therefore they are still staying under discussion. The
character of ripples suggests their launching as a result
of interference. It may be interference between the
incident light and light scattered from surface
inhomogeneities [4, 5, 8, 9]. Interference of incident
light with induced surface plasmon-polariton waves is
also possible [6, 7, 10]. Thus, initial surface roughness
possessing the amplitude comparable with the light
wavelength is necessary in both cases. Polishing the
surface can be used to create initial surface
inhomogeneities. In case of plasmon-polariton wave
generation, the synchronism condition has to be
satisfied: the phase velocity of plasmon-polariton wave
induced on the interface must be equal to the phase
velocity of incident light. Since surface roughness is
changed during laser irradiation, it needs feedback
phenomenon providing the development of the relief
profile. Such feedback is provided by the temperature
difference in the maxima and minima of the interference
pattern during the formation of grating. This temperature
distribution initiates processes responsible for deepening
the relief profile: deformation of surface, melting and
evaporation of surface material, possibly, capillary
waves on the molten surface or surface acoustic waves
[6, 7, 10]. Sometimes, formation of several overlapping
relief structures occurs [5–7, 10–12]. In this case, the
number of induced surface waves corresponds to the
quantity of periodic structures.
Several authors note that the direction of surface
ripples depends on the polarization of incident light.
Initially, Fröhlich and Sack [13] established the
condition later confirmed by other authors [14] that p-
polarized light stronger interacts with electron plasma in
the sample than s-polarized light. In general, the laser
induced ripples are transverse to the polarization (RTP)
of incident light [4–7, 10–12]. It was recently shown that
femtosecond laser pulses allow obtaining several new
types of structures with combined nano- and micro-
structuring [1, 3, 15–19]. In particular, ripples along
polarization (RAP) of incident laser light were obtained
on the titanium surface [1, 18, 19].
© 2011, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
325
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2011. V. 14, N 3. P. 325-329.
This paper is a continuation of our previous work
[19] where the conditions for obtaining different laser-
induced ripples on the Ti surface were ascertained. Here
we investigate the properties and structure of laser-
induced ripples in order to evaluate perspectives of using
the laser-treated Ti samples as plasmonically active
surface.
2. Materials and methods
The femtosecond laser complex based on Ti:sapphire
laser generator Mira Optima was used for
irradiation of the sample. Irradiation was performed
using the laser beam with the wave-length 800 nm. The
duration of each pulse was 130 fs and the repetition rate
was 1000 Hz. The energy of one pulse was 0.95 mJ and
the fluence was about 3×10
F900 −
11 W/cm2. Initially, a
polished titanium plate made of mark vacuum titanium
was used as a target. Polishing was made by
diamond paste with the characteristic size of particles
0.5-1 µm. The residues of polishing material were
removed by different solvents: acetone and ethanol. The
target prepared in this manner was oriented normally to
the laser beam, placed after the focusing lens at the
distance 2.25 cm from the focus and irradiated for 1 min.
01VT −−
The irradiated area of the sample was investigated
using optical and scanning electron microscopy as well
as optical spectroscopy. Raman scattering spectra from
the treated area were recorded employing Renishaw
inVia Raman microspectrometer using a blue laser
(488 nm) for excitation. The same system was employed
for recording spectra of light diffracted on the surface
relief. In this case, the incident beam of white light was
obtained by collimating fiber-coupled halogen lamp
emission. The light scattered or diffracted by the sample
could be detected with spatial resolution down to a few
microns owing to the confocal microscopy system.
3. Results and discussion
Laser irradiation of Ti sample induces pronounced
ripples in its surface structure. The trace from a laser
beam is a dark elliptically shaped area with approximate
size 500×900 μm. At higher magnification, the ripples
appear to be composed of a big amount of small
unidirectional dark lines with the length about 1 μm and
thickness less than 1 μm (Fig. 1).
These small lines appear near the scratches and
roughened areas that left after initial polishing of the
sample surface. It is known that initial chaotic surface
© 2011, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
Fig. 1. Optical microscopic images of the laser-treated Ti area at different magnifications. Laser induced lines of relief are
parallel to the polarization of laser beam (marked by arrows).
Fig. 2. Scanning electron micrographs of laser treated Ti area at different magnifications. Laser induced lines of relief are
parallel to the polarization of laser beam (marked by arrows).
326
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2011. V. 14, N 3. P. 325-329.
0 100 200 300 400 500 600 700 800 900
0
500
1000
1500
2000
2500
3000
3500
4000
4500
1
In
te
ns
ity
, a
.u
.
Raman shift, cm-1
2
Fig. 3. Raman spectra of light scattered from the different
points of laser treated Ti area: (1) away from the relief lines
induced by laser; (2) near the relief lines induced by laser.
irregularities commensurable with the thickness of metal
skin layer provide conditions for surface plasmonic
wave interference with the incident light [ 74 − ].
Scanning electron micrography of laser treated area
revealed periodic nano-relief structures with the period
comparable with the wavelength of incident
laser light (Fig. 2).
m18.0 μ−
In contrast to typical structures with ripples
transverse to the polarization (RTP) of the incident light,
in our case ripples along polarization (RAP) appear like
to [1, 18, 19]. Some authors called this type of laser
induced relief as “anomalous” [10] or “extraordinary”
[6, 11], because of its allegedly atypical orientation.
Previously, RAP were obtained on the dielectric or
semiconductor surfaces such as Ge [5, 8] and glass [11].
In the case of Ti samples, the appearance of RAP is
always accompanied by transformation of surface from
metal to dielectric state [1, 18]. It gives us an initial idea
that dielectric permittivity may have critical influence on
the type of gratings formed on the Ti surface. To unclear
the type of transformations induced on Ti surface, we
analyzed the Raman spectra of the laser treated area.
Gauss profile of the laser beam intensity results in a
higher density of ripples near the center and smaller at
the periphery of the irradiated area (Fig. 1). Raman
spectra from both areas were recorded with micrometer-
scale spatial resolution (Fig. 3). Raman scattering from
materials with metallic properties is restricted by
prohibitive selection rules and a low penetration depth of
the incident light. Therefore, Raman bands are very
weak in the spectrum obtained from less treated metallic
areas of Ti sample (Fig. 3, curve 1). Stronger treated
areas demonstrate Raman bands with shifts to the
regions and . These
bands can be associated with non-stoichiometric
titanium nitride with admixture of oxygen atoms
[20, 21]. Usually, TiN
1cm300100 −− 1cm600400 −−
xOy compound is formed on the
surface when Ti interacts chemically with air. The
integrated intensity of bands obtained from the points
with nano-relief surface is on average 15 times higher
than for less structured areas (Fig. 3). Micromapping the
Raman signals confirms correlation between pronounced
nano-structuring and enhancement in the integrated
intensity of Raman peaks (Fig. 4). It seems reasonable
that laser treatment stimulates reactions of Ti with
nitrogen and oxygen from air. Thus, there is a bigger
amount of dielectric TiOxNy compounds in the treated
areas.
In their previous papers, Akhmanov et al. [6] and
Emel’yanov et al. [10] proposed the plasmonic theory
for RAP formation, which is based on interrelation
between laser-induced interference and evaporation from
the surface of the sample. They pointed that formation of
laser-induced RAP occurs in materials with the real
part of dielectric permittivity situated within the region
–1<ε<1. These values of ε can be obtained in the plasma
escaped from the metal surface under action of
© 2011, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
a b
900 a.u. 14500 a.u.
Fig. 4. Microscopic image of laser treated Ti area: (a) in reflected white light; (b) the same area of the sample with overlapped
mapping of the integrated signal from Raman bands. The gray level scale indicates the relative intensity.
327
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2011. V. 14, N 3. P. 325-329.
femtosecond laser pulses [22]. It is this jump in
dielectric permittivity from metallic to the dielectric type
that can provoke formation of RAP and the following
chemical transformation of surface from metallic to
dielectric compound. There is also another point of view
considering the special types of surface defects and laser
induced polarization and light scattering on the surface
as main reasons for RAP formation [4, 5, 8, 9]. Thus, the
general model explaining formation of laser induced
RAP is under discussion.
© 2011, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
Considering that the interaction of laser irradiation
with surface plasmon waves can give rise to the surface
structuring, one is naturally curious whether surface
plasmons could be optically excited on this structured
surface. The answer to this question would be important
from the practical standpoint (preparation of SERS-
active surfaces, etc.) and also allow us indirectly
estimate the degree of surface transformation. Induction
of surface plasmons is possible in the case of light
diffraction on the periodical metal surface. In this case,
spectra of diffracted light have a dip at a plasmonic
resonance wavelength λ, because of partial
transformation of light energy into the surface
electromagnetic wave. This dip in the spectra is known
as a Wood’s anomaly [23, 24]. Therefore, the specific
plasmon dips in the spectra of light diffracted on laser-
treated surface can reveal the unreacted part of Ti. It is
possible to estimate which angle of incidence θ can
result in inducing the plasmonic wave, if knowing the
dependence of real part for Ti permittivity ε on the
photon energy [25] and the synchronism condition
relation [26]:
2
2
sin
D
D
D n
n
d
mn
+ε
⋅ε
±=
λ
+θ , (1)
where nD is the refractive index of the environment over
the grating, m is the order of diffraction, d is the period
of grating. Registration of the diffracted light partially
transformed into the plasmon waves can be realized at
angles ϕ satisfying the equation [26]:
400 420 440 460 480 500 520 540
0.0
0.2
0.4
0.6
0.8
1.0
2
In
te
ns
ity
, a
.u
.
Wavelength λ, nm
1
Fig. 5. Relative intensities of light diffracted at the angle ϕ.
The angle of incident p-polarized light is θ: (1) θ ≈ 40.5°,
ϕ ≈ 3°, (2) θ ≈ 44.5°, ϕ ≈ 7°.
( ϕ−θ= )λ sinsinDn
d
m . (2)
For example, equations (1) and (2) predict excitation
of a surface plasmonic wave for Ti grating with
d = 0.8 μm by the first order diffraction (m = 1) at
θ ≈ 40°37′, ϕ ≈ 3°8′, λ ≈ 477 nm and corresponding
8.2−≈ε . In this case, we observed diffraction of a
polarized and collimated beam of broadband light. The
experiment was done in two geometries where the plane
of incidence was either perpendicular or parallel to the
surface relief lines. Initially p-polarized light was
especially sensitive to plasmonic effects in the considered
geometries. Relative intensity of diffracted light (m = 1)
in case of initial p-polarization is presented for
experimental cases θ ≈ 40.5°, ϕ ≈ 3° (Fig. 5, curve 1) and
θ ≈ 44.5°, ϕ ≈ 7° (Fig. 5, curve 2). The plasmonic
minimum in the intensity is predicted at λ ≈ 459 nm in the
latter case. One can see that the intensity of p-polarized
light decreases in the expected plasmonic region
459...477 nm. But plasmonic decrease in the intensity is
not very sharp and pronounced in comparison with
reflection dips obtained for traditionally used noble metals
[24, 26]. This pure plasmonic response can be explained
by the fact that our grating is non-regular on the
macroscale (Fig. 1), and most of the surface area is
transformed to a dielectric state.
4. Conclusions
The ripples on Ti surface were produced by the
femtosecond laser irradiation. They consist of the
regular, on the micro-scale, lines directed parallel to the
polarization of incident light. Results of Raman
measurements suggest that laser treatment induces not
only ripples on the surface, but also following
transformation of metallic Ti into dielectric TiOxNy
compounds. Partial chemical transformation limits
usability of the laser treated Ti as plasmonically active
surface. Therefore, laser treatment of samples in the inert
atmospheres can be considered as possible improvement
in future investigations.
Acknowledgements
We greatly acknowledge Center for collective use of
“Laser femtosecond complex” associated with Institute
of Physics of NASU for the hardware support. We thank
kindly V. Styopkin from the department of Physical
electronics, Institute of Physics NASU for the SEM
investigations of the samples. This work was supported
by European Social Fund grant GLOFY0102J and
Estonian Science Foundation grants numbered as 7456
and 6999.
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