Electro-physical properties of γ-exposed crystals of silicon and germanium

The paper represents a review of research data upon changing electrophysical properties of n-Si and n-Ge when radiation defects arise under action of different γ-irradiation doses. Analyzed are consequences of arising deep levels of radiation defects in the forbidden band of silicon and germanium, w...

Повний опис

Збережено в:
Бібліографічні деталі
Дата:1999
Автор: Dotsenko, Yu. P.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 1999
Назва видання:Semiconductor Physics Quantum Electronics & Optoelectronics
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/117933
Теги: Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Electro-physical properties of γ-exposed crystals of silicon and germanium / Yu.P. Dotsenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 47-55. — Бібліогр.: 63 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-117933
record_format dspace
spelling irk-123456789-1179332017-05-28T03:04:08Z Electro-physical properties of γ-exposed crystals of silicon and germanium Dotsenko, Yu. P. The paper represents a review of research data upon changing electrophysical properties of n-Si and n-Ge when radiation defects arise under action of different γ-irradiation doses. Analyzed are consequences of arising deep levels of radiation defects in the forbidden band of silicon and germanium, which leads to the considerable increase of resistivity gradients caused by non-uniform compensation of shallow donor centers. In addition, considered are characteristics of radiation defects energy levels which determine both regularities of electrophysical properties changes and peculiarities of tensoeffects in γ-irradiated crystals. It is noticed that neutron-doped n-Si (P) has larger radiation hardness in respect to γ-irradiation as sompared to silicon doped with phosphorus in the course of crystal growth. 1999 Article Electro-physical properties of γ-exposed crystals of silicon and germanium / Yu.P. Dotsenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 47-55. — Бібліогр.: 63 назв. — англ. 1560-8034 PACS 72.15.E, 72.20, 61.72.T, 72.80.C., 71.55.A http://dspace.nbuv.gov.ua/handle/123456789/117933 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description The paper represents a review of research data upon changing electrophysical properties of n-Si and n-Ge when radiation defects arise under action of different γ-irradiation doses. Analyzed are consequences of arising deep levels of radiation defects in the forbidden band of silicon and germanium, which leads to the considerable increase of resistivity gradients caused by non-uniform compensation of shallow donor centers. In addition, considered are characteristics of radiation defects energy levels which determine both regularities of electrophysical properties changes and peculiarities of tensoeffects in γ-irradiated crystals. It is noticed that neutron-doped n-Si (P) has larger radiation hardness in respect to γ-irradiation as sompared to silicon doped with phosphorus in the course of crystal growth.
format Article
author Dotsenko, Yu. P.
spellingShingle Dotsenko, Yu. P.
Electro-physical properties of γ-exposed crystals of silicon and germanium
Semiconductor Physics Quantum Electronics & Optoelectronics
author_facet Dotsenko, Yu. P.
author_sort Dotsenko, Yu. P.
title Electro-physical properties of γ-exposed crystals of silicon and germanium
title_short Electro-physical properties of γ-exposed crystals of silicon and germanium
title_full Electro-physical properties of γ-exposed crystals of silicon and germanium
title_fullStr Electro-physical properties of γ-exposed crystals of silicon and germanium
title_full_unstemmed Electro-physical properties of γ-exposed crystals of silicon and germanium
title_sort electro-physical properties of γ-exposed crystals of silicon and germanium
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
publishDate 1999
url http://dspace.nbuv.gov.ua/handle/123456789/117933
citation_txt Electro-physical properties of γ-exposed crystals of silicon and germanium / Yu.P. Dotsenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 47-55. — Бібліогр.: 63 назв. — англ.
series Semiconductor Physics Quantum Electronics & Optoelectronics
work_keys_str_mv AT dotsenkoyup electrophysicalpropertiesofgexposedcrystalsofsiliconandgermanium
first_indexed 2025-07-08T13:02:29Z
last_indexed 2025-07-08T13:02:29Z
_version_ 1837083920190930944
fulltext 47© 1999, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine Semiconductor Physics, Quantum Electronics & Optoelectronics. 1999. V. 2, N 1. P. 47-55. 1. Introduction Because the semiconductor exposure by high energy par- ticles can be used with the objective to necessary change their properties, the investigations of the influence of dif- ferent γ-exposure doses on the defect structure and char- acteristics of materials have not only scientific interest, but are also important and from the practical point of view. Besides that, due to the exposure action the change of the properties of the semiconductor materials, struc- tures and devices, which operate in the radiation fields take place. Thus, from the point of view of prediction of the parameter stability of such devices the investigations of the regularities of creation and transformation of radi- ation defects in semiconductors under the radiation expo- sure is becoming more and more actual. The investigations by different methods have estab- lished [1-11], that at the growth of bulk semiconductor crystals in the planes, perpendicular to the growth direc- tion, the practically periodical distribution of the doping impurity arises. Depending on the crystal growth condi- tions [2] the periodicity of such structures is character- ized by the width in the range of 10-6 - 10-3 m and is connected with the different impurity distribution coeffi- cient between liquid and solid phases of crystal, which is grown from the melt. The impurity concentration in the layers can differ by several times [12], because due to the charge carriers diffusion in the crystal volume, the intrin- sic electrical field arises, which is modulated in the direc- tion of the growth axis with the same periodicity as that of the impurity distribution [5]. A theoretical approach to the methods of taking into account in the kinetic phenom- ena the contribution of statistically distributed impurities in the crystal bulk was proposed by Herring [8]. It was shown, in particular, that transverse magnetic resistance connected with the growth layers, in classically strong fields is determined by the dependence ∆ρ ρ⊥ / 0 ∼ H 2 , and in the region of quantizing magnetic fields: ∆ρ ρ⊥ / 0 ∼ ∼ H . The experimental investigations have confirmed the theoretical conclusions [ 9, 13, 14]. The corresponding PACS 72.15.E, 72.20, 61.72.T, 72.80.C., 71.55.A Electro-physical properties of γγγγγ-exposed crystals of silicon and germanium Yu. P. Dotsenko Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Kyiv, 252028, Ukraine Abstract. The paper represents a review of research data upon changing electrophysical proper- ties of n-Si and n-Ge when radiation defects arise under action of different γ-irradiation doses. Analyzed are consequences of arising deep levels of radiation defects in the forbidden band of silicon and germanium, which leads to the considerable increase of resistivity gradients caused by non-uniform compensation of shallow donor centers. In addition, considered are character- istics of radiation defects energy levels which determine both regularities of electrophysical properties changes and peculiarities of tensoeffects in γ-irradiated crystals. It is noticed that neutron-doped n-Si (P) has larger radiation hardness in respect to γ-irradiation as sompared to silicon doped with phosphorus in the course of crystal growth. Keywords: radiation defects, γ-irradiation, electron silicon, electron germanium, radiation hard- ness. Paper received 10.02.99; revised manuscript received 17.05.99; accepted for publication 24.05.99. Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 4 8 SQO, 2(1), 1999 choice of orientation for current J and magnetic field H vector enabled to determine the transverse magnetic re- sistance of n-Ge which is directly connected with the pres- ence of the defect structure in the form of growth layers. Because as a result of γ-exposure in the crystal vol- ume the defects are created which have the acceptor lev- els in the forbidden gap and which cause the compensa- tion of the donor impurity, the properties of semicon- ductors with the increase of radiation dose are sufficiently changed, in particular, due to the essential growth of the gradients of the crystal specific resistance, which are de- termined by the presence of the growth layers [15-18]. It was proved that the most informative methods for the investigations of the origin and properties of the ra- diation defects are the combinations of different experi- mental methods (electron paramagnetic resonance (EPR), capacitance spectroscopy (DLTS), nuclear mag- netic resonance (NMR), optical methods, etc.) with the high pressure methods, in particular, strong directed stresses. Therefore, considerable attention was paid to the investigation of the electro-physical and, in particu- lar, tensor resistive properties of the γ-exposed semicon- ductors [15-21]. At present work the review of the literature and orig- inal data concerning the investigations of the electro- physical properties of the strongly deformed γ-exposed crystals of silicon and germanium of n-type will be ad- duced. 2. Influence of the γγγγγ-radiation on the electro- physical properties of n-type silicon Because the most informative from the stand point of studying the influence of γ-radiation on the properties of materials are the investigation results at different ex- posure doses, including those ones which lead to the drastic changes of the semiconductor properties (for ex- ample, strong compensation, n-p conversion, essential increase of tensor sensitivity, etc.) the investigation re- sults of the influence of different γ-exposure doses on electro-physical and, in particular, tensoresistive prop- erties of silicon and germanium will be presented in present review. The results of the investigations of the γ-exposure in- fluence on the tensor resistive properties of silicon, doped by the phosphor during growth process [22, 23], are pre- sented in Fig. 1. Let us notice that the silicon crystals which were grown in the [100] direction, were doped by the phosphor impurity from the melt up to concentrations 1.2 × 1014 cm-3 . It can be seen from the presented in Fig. 1 data, that after the certain γ-exposure doses Φ ≈ ≈ 1.7×1017 quanta/cm2 ) the essential anisotropy of ρ ρX f X/ ( )0 = dependencies for the samples fabricated in equivalent crystallographic directions ([100] � sam- ples of I group and [001] � samples of II group [22, 23]), but with different orientation relative to the direction of the crystal growth (curves 3-3´, 4-4´) arises. The type of the ρ ρX f X/ ( )0 = dependencies testify that at certain γ-exposure doses the mechanism of the redistribution of the charge carriers between ∆ 1 valleys of conduction band, which lead to the increase of crystal resistance with pres- sure Xº[100] increase, is accompanied by the mechanism of the deformation-induced ionization of the radiation defect energy level (A-center, to which in the forbidden gap the acceptor level E c - 0.17 eV [ 15,24,25] corre- sponds). This leads to the increase of the current carriers concentration at the cost of decreasing energy difference between bottom of the conduction band and the level E c - 0.17 eV with the pressure and respective resistance de- crease. Because of the phosphor impurity donor con- centration is essentially changed through the growth lay- ers at time of γ-exposing, the resistance value and its de- pendence on the pressure for the samples of I group will be determined by the layers with smaller phosphor im- purity concentration, that is by the parts with the bigger compensation degree (in series connection of the growth layers resistance). In samples of the second group, on the contrary, due to the parallel connection of the growth layers resistance, the resistance of the layers and its de- pendence from the pressure will be determined by the properties of the layers with the lesser degree of compen- sation. Presented considerations on the possible origin Fig. 1. Anisotropy of longitudinal tensoresistive effect ρ x /ρ 0 = = f(X) for equivalent crystallographic orientations of samples at T = 78 K using different doses of γ-irradiation, Φ, 1017 quan- ta/cm2: 1, 1' � 0; 2, 2' � 1.36; 3, 3' � 1.76; 4, 4' � 2.08. X, 103 kG⋅cm2 Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 49SQO, 2(1), 1999 of the tensoresistive effect anisotropy in γ-exposed sili- con doped by phosphor during growth time are also con- firmed in sufficient degree by the dependencies of the current carriers mobility on the exposure dose and by temperature dependencies of the resistance for the sam- ples of I and II groups (Fig. 2). Thus, the analysis of the presented results of the ten- soresistive effect investigations for silicon doped during growth process by phosphor are testifying about the es- sential growth of the inessential for the initial samples gradients of the specific resistance at certain doses of γ- radiation due to different degree of donor impurity com- pensation by radiation defect (A-center) with the accep- tor properties. More perfect method of semiconductor doping is, as is known, the doping by exposure of thermal (slow) neu- trons [26]. In silicon, in particular, at exposure by ther- mal neutrons atoms of 30Si isotope are transformed due to nuclear reaction into 31P phosphor atoms (30Si(n,γ) → →31Si → 31P + β). Because the atoms of 30Si isotope, which comprise approximately 3 % from the number of silicon isotopes, are uniformly distributed in the crystal volume, method of transmutation doping enables to obtain also the uniform distribution of phosphor impurity, which gives a possibility to produce the semiconductor devices with the improved parameters in comparison with the devices on the base of semiconductors doped during the growth process by adding the impurity into the melt. The electro-physical properties of the transmutation doped silicon were studied in series of work [26-30]. The results of the tensoresistive effect investigation in crystals of neutron-doped silicon in the range of strong directed deformations [29-30] testify about the noticeable difference in the type of ρ ρX f X/ ( )0 = dependencies recorded for the usually doped by phosphor silicon crys- tals and neutron-doped silicon at small values of impuri- ty concentration ( N p ≤ 1.0 ⋅ 1014 cm-3). For silicon doped by phosphor during growth process, the ρ ρX f X/ ( )0 = dependencies in the region of strong directed pressures have characteristic region of the tensoresistive effect sat- uration at T = 78 K in pure crystals (N p ≈ 1.0⋅1012 - 1.0⋅1014 cm-3) (Fig. 3, curve 1). The tensoresistive effect for the samples of the neutron doped silicon with com- parable phosphor impurity concentration is character- ized by the absence of saturation in the region of the strong directed pressures (X > 0.6⋅103 kG⋅cm-2, Fig. 3, curves 2, 3), which testify about the absence of complete ionization of phosphor impurity in such crystals at T = = 78 K and their additional ionization under the action of pressure in the [100]ºX direction. Thus, the Hall coef- ficient temperature dependence for the neutron doped n- Si(P) in strain-free crystal (X = 0) has the noticeable de- crease in the 78-130 K temperature region (inset to the Fig. 3, curve 2´). Similar interpretation is valid for the absense of saturation in the ρ ρX f X/ ( )0 = dependen- cies, when considering the region of strong pressures for the doped during the growth process n-Si(P) which is com- pensated by the acceptor impurity (compensation degree Fig. 2. Dependencies of the Hall mobility for current carriers (a) and resistivity (b) of n-Si (P) crystals (N p = 1.2⋅1014 cm-3) for samples of the group I (curves 1 and 1', respectively) and sam- ples of the group II (curves 2 and 2') on the dose of irradiation. Fig. 3. Dependencies ρ x /ρ 0 = f(X) obtained at T = 78 K for n-Si samples doped by phosphorus in the course of growing (curves 1, 4) and the transmutationally doped ones (curves 2, 3). Tem- perature dependencies of the Hall coefficients for the samples 1, 2, 4, are shown in the inset. µ H , 10 3 cm 2 V -1 s-1 Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 5 0 SQO, 2(1), 1999 k = N a / N d ≈ 0,9 ) (Fig. 3, curves 4, 4 ´, respectively). The deviation of the lg(n 2 / n 1 ) = f(X) dependencies (where n 2 � concentration of the electrons in valley, which is elevated in energy scale with the pressure, n 1 � concen- tration of the electrons in the descending valley) from linearity [31] (Fig. 4) also testify about the emergence of the additional to the inter-valley charge carrier redistri- bution mechanism of tensoresistive effect, determined by the increase of electron concentration, as in neutron- doped silicon crystals with phosphor concentration with- in ≈ (2.5÷20)⋅1013 cm-3, as well as in the compensated sil- icon. Therefore, it is apparent that for such crystals the method of the determination of the deformation poten- tial constant from the slope of linear dependence lg(n 2 / n 1 ) = F(X) [32] (in which the n 2 / n 1 ratio of electron concentrations is expressed through the value of ρ X / ρ 0 ratio, which is measured in the wide range of directed pressure changes, including the region of pressure satu- ration) cannot be used. The analysis of the main mecha- nisms of the tensoresistive effects, which lead to the de- viation of the lg(n 2 / n 1 ) = F(X) dependencies from linear- ity, is presented in thesis works [21, 33]. As noted previously, transmutation doping of sili- con enables to obtain the uniform distribution of the phosphor impurity, therefore with the aim to determine the influence of the γ-radiation on the properties of neu- tron-doped silicon the investigations of the physical prop- erties of strongly-deformed [29] and γ-exposed with var- ious doses crystals [30], were performed. Neutron doping of the high resistance p-Si crystals which were grown in [100] direction was carried out in the reactor of the Institute of Nuclear Research as at NAS of Ukraine. After technological annealing which has been carried out with the aim of radiation damage removal, samples of n-Si had low phosphor concentra- tion Np = 3.15⋅1014 cm-3. Two groups of samples for mea- surements of longitudinal tensoresistive effects were ori- ented as in the work [22] in equivalent crystallographic directions [100] and [001]. Let us notice that the ratio of electrons concentrations, n 2 / n 1 , which determines the de- pendence of the specific resistance of silicon and germa- nium on pressure in the conditions of action of inter- valley redistribution mechanism (Smith-Herring tenso- effects) can be respectively written for the non-degener- ated crystals as: n n KX sat X sat 2 1 1 1 2 2= −       −       − ρ ρ ρ ρ (1) for n-Si in the conditions XºJº[111]. n n Ksat X sat X 2 1 1 1 8 1 3 3= −       + −       − ρ ρ ρ ρ (2) for n-Ge in the conditions XºJº[111]. Parameter K of mobility anisotropy in relations (1) and (2) is determined both for n-Si and n-Ge (for the above mentioned orientations ) by ρ sat /ρ 0 ratio : K sat= − 3 2 1 20 ρ ρ . (3) The results of the investigations of longitudinal ten- soresistive effect (Fig. 5) testify about the absence of such high anisotropy of the obtained ρ ρX f X/ ( )0 = depen- dencies even for the exposure doses of γ-quanta 60Co, which were essentially higher than those used in work [22]. The data obtained testify on the higher radiation stability in respect to the γ-exposure of neutron-doped silicon, which is necessary to take into account during the development of the solid state devices on the silicon base. The transmutation doping also provides, at respec- tive control of slow neutron exposure dose, the possibil- ity to obtain with the necessary accuracy the required concentration of the doping impurity with practical as- surance of the creation of micro-nonuniformities, which are connected with the association creation: impurity- impurity or impurity - residual impurity atoms, which enables to exclude the creation most dangerous defects structures of single-crystal materials from the point of view of devices functioning reliability [29, 34, 35]. 3. Electrophysics properties of γγγγγ- exposed n-germa- nium The results similar to the results obtained of tensoresis- tive effect anisotropy in γ-exposed n-Si were obtained by the authors of works [19,36,37] under the investigations of the transport phenomena in the γ-exposed directed deformed n-Ge crystals. In the conditions of the crystal Fig. 4. Dependencies ln[(n 2 / n 1 )⋅104] = f(X) are plotted for T = = 150 K (curve1) and T = 78 K (curves 2-5) for silicon crystals doped by phosphorus in the course of growing (1, 2, 5) and neutron-doped n-Si (P) (3, 4) with parameters: 1, 2 � ρ 300 = = 102 Ohm⋅cm, k = N a / N d ≈ 0.25; 3 � ρ 300 = 220 Ohm⋅cm, k ≈ ≈ 0.25: 4 � ρ 300 = 55 Ohm⋅cm, k ≈ 0.52; 5 � ρ 300 = 103 Ohm⋅cm, k ≈ 0.9. X, 103 kG⋅cm2 ln [( n 2 / n 1) ⋅1 04 ] Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 51SQO, 2(1), 1999 growth in the [111] direction, the equivalent directions [ ],[ ],[ ] _ _ _ 111 111 111 are placed at 1100 angle to the direction of the growth, which also enables to carry out the com- parative experiments with the aim to detect the influ- ence of γ-exposure on the anisotropy of tensoresistive properties of n-germanium, for which, as it is known, the maximal tensosensitivity is observed for the samples orientation along Xº{111}ºJ [38,39]. The results of the investigations of longitudinal ten- soresistive effect in γ-exposed n-Ge crystals with the an- timony impurity donor concentration ≈ 2.7⋅1013 cm-3 [36]. Presented in Fig. 6 results of measurements at 78 K tes- tify about the increase of influence of the crystal defect structure, which is connected with non-uniform distri- bution of the doping impurity through the growing lay- ers on the tensoresistive effect anisotropy, which was measured in equivalent directions {111} º X, with the increase of the γ -exposure dose (Fig. 6, curves 1, 1´ - 4, 4´). Contrary to the experimental data for the γ-exposed n-Si(P), in γ-exposed n-Ge(Sb) crystals at T = 78 K no additional ionization of charge carriers at pressures which reach values 1.2⋅103 kG⋅cm-2 is observed. This data testify that under the directed deformation Xº[111] the shift of E c -0.2 eV energy level (which belongs to the V 2 D defect of radiation origin [18]) in the direction towards the bottom of conductivity band [11, 37] is not sufficient for the additional ionization of the free charge carriers at T = 78 K. Taking into account that the mobility anisotropy pa- rameter K = µ Á /µ|| is determined for the inter-valley re- distribution of electrons for the n-Ge (XºJ º[111]), as well as for the n-Si (XºJ º[100]), by the relation (3), the essential decrease of the ρ ì /ρ 0 value (Fig. 6, curves 1-4) cannot be connected, as it was noted earlier [21], with the increase of scattering anisotropy at single-charged radi- ation centers [31, 40], because at exposure dose 1.1⋅1017 quanta/cm2 their concentration is relatively low (∼1013 cm-3). Let us note, that the compensated semiconductors are characterized by the presence of the current carriers scat- tering on the potential relief, amplitude σ of which is de- termined as it was found in [41]: σ χ = e N n t scr 2 2 3 1 3 / / (4) where χ is a dielectric constant, n scr and N t are concentra- Fig. 5. Dependencies ρ x /ρ 0 = f(X) for neutron-doped n-Si(P) (N p = 3.15⋅1014 cm-3) obtained at different doses of γ-irradia- tion, Φ, 1017 quanta /cm2: 1, 1' � 0; 2, 2' � 1.36; 3, 3' � 1.76; 4, 4' � 2.1; 5, 5' � 8. Solid and dash lines are obtained for samples orientated in equivalent crystallographic directions [001] (along the growth direction) and [100] (perpendicularly to the direc- tion of crystal growth). The curves 1, 1' � 4, 4' are obtained at T  = 78 K, and the curves 5, 5' at T = 300 K. Fig. 6. Dependencies ρ x /ρ 0 = f(X) are obtained for n-Ge(Sb) crystals at T = 78 K and different doses of γ-irradiation, Φ, 1016 quanta /cm2: I, I� and 1, 1' � 0; 2, 2' � 6.4; 3, 3' � 8.8; 4, 4' � 11. Concentrations of doping Sb-impurity in Ge - crystals are as follows: I, I� � N Sb ≈ 1⋅1012 cm-3; 1, 1'� 4, 4' � N Sb ≈ 2.7⋅1013 cm-3. X, 103 kG⋅cm2X, 103 kG⋅cm2 Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 5 2 SQO, 2(1), 1999 tions of screening charge carriers and charged defects, respectively. The change of the scattering mechanism in compen- sated crystals leads apparently to the significant decrease of the ρ ì /ρ 0 value with the increase of the compensation degree also in n-Si crystals (Fig. 3, curves 1-4). The data on the dose dependencies of the electrons mobility and ρ ì /ρ 0 value of tensoresistive effect [21], which are presented in Fig. 7 also argues convincingly in favor of that. Not only the electron mobility, but also and the ρ ì /ρ 0 value are essentially decreased for the samples in which the layers with the maximum compensation de- gree are included in series with the layers with minimal compensation degree (samples were prepared in the di- rection of crystal growth, see Fig. 7, curves 1,2). At the same time, the decrease of the electron mobility and ρ ì /ρ 0 value for the samples with the parallel inclusion of layers with minimal and maximal compensation degrees (samples were prepared in the direction perpendicular to the axis of crystal growth) is essentially smaller (Fig. 7, curves 1´, 2´). Let us notice, that tensoresistive effect, which is measured in n-Si and n-Ge crystals in the equivalent directions ( {100} � for n-Si and {111} for n-Ge) has small anisotropy also in unexposed samples, curves 1, 1´ in Fig. 1, 5, 6 and curves I, I´ in Fig. 6 were obtained by us for high- ly pure samples of n-Ge with insignificant doping level of antimony impurity (≈1012 cm-3). We associate the presence of this difference in ρ ì /ρ 0 value obtained in the region of tensoresistive effect satu- ration with residual deformations in crystals caused by the defect structure in the form of growth layers. 4. Characteristics of the energy levels for the defects of radiation origin in γγγγγ-exposed Si and Ge crystals Due to the radiation influence the defects of structure originate in semiconductors, which create the series of complexes to which correspond different energy levels. Because the electrophysics properties of materials are di- rectly connected with the characteristics of energy lev- els, identification of the level type and determination of the model for the respective radiation center are devoted by a number of works [15,18, 20, 24, 25, 40, 42-59]. On the base of analysis of electrophysics properties investi- gations of γ-exposed Si and Ge crystals it was established that in silicon, due to the creation of radiation centers (so called A-centers), the deep energy level E c - 0.17 eV arises in the forbidden gap [15, 24]. The model of A-center in silicon was proposed by au- thors [15] with taking into account the data on paramag- netic resonance investigations in the directly deformed crystals. It is determined that due to the γ-exposure the association of the vacancy with the oxygen atom arises, which under that is shifted from the lattice site in the direction of (100) plane. As follows from the results of theoretical calculations [42], an oxygen atom is stabilized in the site displaced along [100] direction. Closer shifted to it are also enclosing atoms of silicon, whereupon the crystal lattice in the place of A-center localization must have both hydrostatic and directed deformation com- ponent. It is established hereby, that A-center is charac- terized by the determined in the space axis (defect axis) which coincides with the crystallographic orientation [100] and belongs to such non-cubic centers the symme- try of which is lower than the crystal point symmetry and is determined by the point group C 2V . The results of the tensoresistive effect investigation also testify that the rate of the energy shift of the level, which belongs to A-center, is maximal when the defor- mation coincides with [100] direction. Values of coefficient for the change of an energy gap between the silicon conoluetive band bottom and the A- center energy level were estimated for the different ori- entations of the deformation axis. Thus, for Xº [100] the value of such coefficient is α = 3.9 × 10-6 eV cm2/kG ; at the same time for the Xº [111] and Xº [110] this coeffi- cient α ≈ 1.4 × 10-6 eV cm2/kG [21]. The values of the respective parameters, obtained in the work [30] on the base of analysis of the electrophys- ics properties of the γ-exposed neutron-doped n-Si(P) crystals, are: the ionization energy of the A-center � E c - 0.14 eV, and the energy level change with the pressure for the Xº [100] orientation is characterized by the coef- ficient α = 4.5⋅10-6 eV cm2/kG. Obtained were the pa- rameters of the mobility anisotropy K and scattering anisotropy Kτ as were as values of deformation poten- tial constant Ξ u which were the same as for the n-Si doped Fig. 7. Dose dependencies of the Hall mobility values for cur- rent carriers and for ρ∞/ρ 0 ratio in n-Ge crystals with the impu- rity concentration N Sb ≈ 2.7⋅1013 cm-3 obtained at T = 78 K for samples of the group I (curves 1, 2) and the group II (curves 1′, 2′), respectively. µ H , 1 04 cm 2 V -1 s-1 Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 53SQO, 2(1), 1999 by phosphor during the course of growth. These results testify that the values of the elastic constant C 11 and C 12 for the silicon crystals doped by phosphor by different methods also coincide within the experimental accuracy limit values. The essential anisotropy of the shift with pressure for the energy level E c - 0.2 eV of radiation center (com- plex: donor-divacancy [18,40]) was also observed in γ- exposed n-Ge crystals. Thus for the directions of the uniaxial pressure Xº [111] and Xº [110] the energy level E c - 0.2 eV shifts down relative to its position at X = 0, respectively, with the coefficients 5.6⋅10-6 eV cm2/kG and 1 × 10-6 eV cm2/kG, while for the orientation Xº [100] this level shifts upwards in accord to the factor 4⋅10-6 eV cm2/kG [19]. Creation and annealing of the radiation defects in the grown by Chochralsky method and doped by ger- manium neutral impurity p-Si(B), with the oxygen con- centration ≈ 8⋅1017 cm-3 and the carbonone ≈ 5⋅1017 cm-3, were investigated in the work [46] at doses of crystals γ- exposure which reach 5⋅1017 - 5⋅1018 quanta/cm2 . Identi- fied were two types of the radiation defects with the close values of energy levels E v + 0.31 eV and E v + 0.35 eV, which previously have been associated with one type of defect, namely, the so called K-center. It is established that the correlation between concentrations of radiation defects which are created during the course of γ-expo- sure and to which the said energy levels correspond, de- pends on the presence of germanium impurity. It is also established that the rate of creation of the C O V 2 and C i O i complexes depends on the state of oxygen and carbon impurities, which can be in isolated form as well as in the form of associations. On the base of the analysis of the investigation re- sults concerning the influence of the exposure and con- sequent annealing on the semiconductor properties, it was ascertained that the most active impurities which take part in the defects formation are oxygen and car- bon. Stability of silicon devices are mainly determined be stability of radiation defects and connected with them deep energy levels of radiation origin, particularly, after the radiation treatment. It was determined, for exam- ple, that deep radiation centers which have carbon are not stable [49, 50]. In connection with the fact that both creation and structural transformation of radiation defects are directly associated with the initial defect structure of real crys- tals (background impurities, associations of background and doping impurities; enclosed by impurity atmosphere growth dislocations, etc.) the influence of background oxygen and carbon impurities on the above mentioned processes in silicon was studied [15-18, 24, 40, 46-54]; as well as doping (apart shallow impurities): Ge [46, 60], Pt [55, 56], Yb [57]; and doping by compensating impuri- ties [45, 61], etc. The properties of defects in n-silicon after exposure by γ- quanta and particles which are created during the decomposition process of 252Cf and consequent thermal annealing at temperatures up to ≈ 450 0C were investi- gated in the work [47]. It was found, that annealing at T = 300 0C during 30 minutes leads to the creation of the defects (B-centers), which are responsible for the activa- tion energy of electrons transiting into conduction band. This energy equals to (E c - 0.23) eV. It is assumed that B-centers arise due to thermal activation of the defects of interstitial type as the concentration of B-centers is proportional to the exposure dose and does not depend on the type of exposure and doping level. Transformation of the defects of vacancy type, which arises in the conditions of exposure by α-particles at tem- perature T = 77 K and annealed at temperature increase was studied in the work [60], when using the samples of single-crystal silicon grown by Chochralsky method and doped by phosphor and germanium impurities. The parameters of the deep levels of radiation defects which arise during the process of the cyclic exposure of high-resistance silicon by α-particles and its annealing at temperatures close to the room one and in the region 250-400 0C were determined in work [48]. Data obtained are important for predicting characteristics of detectors fabricated on the base of structures using high-resistance silicon, because the analysis of the results testify about the direct connection of the transformation reguliarities of radiation defects with the characteristics of the initial material and technology of structure fabrication. It is as- certained that the transformation of the radiation defects in p+-n-n+ structures from high-resistance silicon after cy- clic exposure by α-particles and consequent annealing is connected with the activation of the formation of com- plexes on the carbon base in crystals with the increased oxygen content. Influence of γ-radiation on the properties of porous silicon was studied in works [62, 63]. It is necessary to notice that wide technological pos- sibilities of ion implantation determine the intensive de- velopment of the reguliarities investigations of exposure influence by different elements ions on the formations and change of the defect structure of a subsurface semi- conductor layer and its electrophysical properties. 5. Conclusions Presented investigation data of the electrophysical prop- erties of γ-exposed n-Si and n-Ge crystals testify about considerable increase of gradients in crystal resistivity with the increase of exposure dose. Increase of resistivity gradients is connected with the increase of compensation degree of donor impurity by radiation defects with ac- ceptor properties. Thus, at significant exposure doses when the compensation degree approaches to unit, the crystal resistance increases, so that the measurements of electrophysical characteristics are noticeably complicat- ed [21, 30], because the concentration of free charge car- riers considerable decreases. It is found also, that the neutron-doped n-Si(P) crys- tals are more stable in relation to the γ-radiation in com- Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 5 4 SQO, 2(1), 1999 parison with silicon doped by phosphor in the course of growing. Other characteristics of the mentioned materi- als, such as : constants of deformation potential, elastic constants, parameter of electron mobility anisotropy, co- efficients which determine the shift rate of energy levels caused by radiation with pressure change for the defor- mation axis orientation along the main crystallographic directions, etc., within the limits of accuracy of the meth- ods for their determination coincide. Analysis of the tensoresistive effect investigations in strongly deformed γ-exposed crystals enables on the base of the determination of the shift rate of radiation defect energy level for different crystallographic directions of pressure to obtain certain conclusions about the micro- structure of defect. It is necessary to notice, that the defects of crystalline structure of semiconductors, which create deep energy levels in the forbidden gap (in particular, defects of radi- ation origin) determine, as useful consequences of their presence, impurity photoconductivity, high tenso- and thermal sensitivity, centers of high-speed recombination, etc., as weel as appearance of the undesirable consequenc- es, namely: capture effects, oscillations, negative resis- tance, gradients increase, which are connected with the non-uniformities of the structure, etc. Therefore, the investigations of the properties of semi- conductors, determined by the peculiarities of the defect structure of actual crystals remain actual both from the scientific and the practical point of view, in particular, in the field of materials science, which investigates the change of physical properties under the influence of ra- diation. References 1. P. R. Camp. Resistivity Striations in Germanium Crystals // J. Appl. Phys. 25(4), pp.459-463. (1954). 2. H. Ueda. Resistivity Striations in Ge Single Crystals // J. Phys. Soc. Japan. 16(1), pp.61-66 (1961). 3. V. M. Turovskii, M. G. Milvinskii. Peculiarities of crystal growth from the melt by the Chokhralsky method // Fizika tverdogo tela 3 (9), pp. 2519-2524 (1961), in Russian. 4. H. C. Gatos et al. Impurity Striations in Unrotated Crystals of InSb // J. Appl. Phys. 32(10), pp. 2057 - 2058 (1961). 5. H. Frank. Lichtelectrisch Messung des Inneren electrischen Feld in inhomogenen Halbllitern // Czechoslov. Joum. Phys. 6(6), pp. 433-442 (1956). 6. P. I. Baranskii. The Peltier bulk effect in germanium// Zhournal tekhnicheskoi fiziki. 28(2), pp. 225-230 (1958), in Russian. 7. P. I. Baranskii, P. M. Kurilo. Dependence of the Peltier bulk ef- fect on conductivity gradients // Fizika tverdogo tela 2(3), pp. 458- 462(1960), in Russian. 8. Ñ. Herring. Effect of Random Ingomogenities on Electrical and Galvanomagnetic Measurements // J. Appl. Phys. 31(11), pp.1939 - 1964 (1960). 9. V. M. Babich, P. I. Baranskii, V. V. Gaiduchenko. Influence of n- Ge monocrystal layered structure on a magnetoresistance in strong magnetic fields // Fizika i tekhnika poluprovodnikov. 1(8), pp. 1271- 1274 (1967), in Russian. 10. A. V. Fedosov, L. I. Panasyuk, Yu. Ya. Tkachuk. Influence of a layer growth on electrophysical properties of germanium and sil- icon. - In the book: Influence of defects and impurities on trans- port phenomena in silicon and germanium// The manuscript was deposited in Ukr. NIINTI, ¹2773, Uk., pp. 20-28 (1986), in Rus- sian. 11. A. K. Semenyuk, A. V. Fedosov, P. F. Nazarchuk, V. R. Bukalo. Piezoresistance of an irradiated n-Ge at presence of layered non- uniformities// Fizika i tekhnika poluprovodnikov. 16(7), pp. 1284- 1287(1982), in Russian. 12. W. Spalek, H. Dorendorf. Widerstand-messungen an Feinstraifen in Germanium // Z. Angew. Phys. 29(6), pp. 344-346 (1970). 13. H. L. Frisch, J. A.Morrisson. High Field Magnetoresistance of Ingomogenous semiconductors and Plasmas - The stratified Me- dium // Ann. Phys. (USA). 26(2), pp. 181-221(1964). 14. V. M. Babich. Experimental examinations of the spectra and of the current carriers scattering anisotropy influence on galvano- magnetic effects in ï-Ge// Abstr. of cand. thesis. Kiev, Inst. of Semicond., Academy of Sciences of Ukr SSR, 1969, 15p., in Rus- sian. 15. G. D.Watkins, J. M. Corbett. Defects in Irradiated Silicon. ESR of the Si A-Center // Phys. Rev. - 121(4), pp. 1001-1014 (1961). 16. Radiation effects in semiconductors. Ed. L. S. Smirnov. Nauka, Novosibirsk (1979), 221p., in Russian. 17. V. L. Vinetskii, G. A. Kholodar. Radiation physics of semicon- ductors, Naukova dumka, Kiev (1979), 335p., in Russian. 18. V. V. Yemtsev, T. V. Mashovets. Impurities and point defects in semiconductors, Radio i svyaz, Moscow (1981), 248p., in Rus- sian. 19. A. K. Semenyuk, A. V. Fedosov, P. F. Nazarchuk, Piezoresis- tance of n-Ge with radiation defects// Fizika i tekhnika polupro- vodnikov, 14(9), pp. 1809-1811(1980), in Russian. 20. A. K. Semenyuk. Examination of radiation damages and their influence on kinetic effects in germanium and silicon // Abstr. of cand. thesis. Kiev, Inst. of Physics, Academy of sciences of Ukr SSR, 1969, 16p., in Russian. 21. A. V. Fedosov, Kinetic effects in multivalley semiconductors n-Si and n-Ge in conditions of uniaxial elastic deformations // Doct. Thesis. Kiev, Inst. of Semicond., Academy of sciences of Ukr SSR, 1992, 315p., in Russian. 22. A. K. Semenyuk, A. V. Fedosov, L. I. Panasyuk, V. S. Timosh- chuk. Piezoresistance of irradiated n-Si with a layered distribu- tion of impurity// Fizika i tekhnika poluprovodnikov. 20(3), pp. 545-547(1986), in Russian. 23. A. K. Semenyuk, A. V. Fedosov, L. I. Panasyuk, V. R. Bukalo, O. V. Kovalchuk. Peculiarities of layered non-uniformities in- fluence on a piezoresistance in silicon single crystals // Izvestiya vuzov. Fizika, ¹1, pp. 115-116 (1989), in Russian. 24. I. D. Konozenko, A. K. Semenyuk, V. I. Khivrich. Radiation effects in silicon// Naukova dumka, Kiev (1974), 200p., in Rus- sian. 25. A. I. Semenyuk, P. F. Nazarchuk. Influence of uniaxial defor- mation on an ionization energy of the A - centre in n-Si // Fizika i tekhnika poluprovodnikov. 19(7), pp.1331-1333 (1985), in Russian. 26. Neutron transmutation doping of semiconductors. Ed. J. Miz. Mir, Moscow (1982). 264p., in Russian. 27. P. I. Baranskii, V. M. Babich, V. P. Borblik et al. Carrier current scattering mechanisms responsible for arising the magnetoresis- tance of n-Si in the range of strong elastic deformations // Fizika i tekhnika poluprovodnikov. 17(6), pp. 1064-1067(1983), in Russian. 28. P. I. Baranskii, V. V. Kolomoyets, A. V. Fedosov. Piezoresistance of usual and neutron-doped silicon crystals // Fizika i tekhnika poluprovodnikov. 5(5), pp. 864-867(1981), in Russian. 29. P. I. Baranskii, V. M. Babich, Yu. P. Dotsenko, V. V. Kolomoy- ets, V. P. Shapovalov. Influence of heat treatment on electrophys- ical properties of usual and neutron-doped silicon crystals // Fiz- ika i tekhnika poluprovodnikov. 14(8), pp. 1546-1549 (1980), in Russian. 30. A. Ye. Gorin, N. N Dmytrenko, V. V. Kolomoyets, L. I. Panasyuk, A. V. Fedosov, V. I. Khivrich. Influence of strong directed defor- mation on properties of neutron-doped g-irradiatted silicon // Ukrainskii fizicheskii zhournal , 39(5), pp. 636-640 (1994), in Ukrai- nian. 31. P. I. Baranskii, I. S. Buda, I. V. Dakhovskii, V. V. Kolomoyets. Electrical and galvanomagnetic phenomena in anisotropic semi- Yu. P. Dotsenko al.: Electro-physical properties of γγγγγ-exposed crystals ... 55SQO, 2(1), 1999 conductors, Naukova dumka, Kiev (1977), 269p., in Russian. 32. P. I. Baranskii, I. V. Dakhovskii, V. V. Kolomoyets, A. V. Fe- dosov. Determination of a deformation potential shear constant in silicon // Fizika i tekhnika poluprovodnikov. 10(7), pp.1387-1389. (1976), in Russian. 33. V. V. Kolomoyets. Physical principles of tensoeffects in multival- ley semiconductors under extreme conditions// Doct. thesis. Kiev, Inst. of Semicond., Academy of Sciences of Ukr SSR, 1985, 348p., in Russian. 34. P. M. Henry, J. W. Farmer, J. M. Meess. Symmetry and elec- tronic properties of the oxygen donor in pulled silicon // Appl. Phys. Lett. 45(4), pp.454-456 (1984). 35. Yu. P. Dotsenko, V. M. Ermakov, V. V. Kolomoets, V. F. Ma- chulin, E. F. Venger, I. V. Prokopenko, N. M. Ponomarjev, B. A. Suss. Crystalline structure defects and strength of Si and Ge / / Inst. Phys.Conf. Ser. IOP Publishing Ltd., 1997-1998. ¹160, pp.281-284. 36. A. V. Fedosov, V. R. Bukalo, V. S. Timoshchuk. On anisotropy of a piezoresistance in irradiated n-Ge with layered distribution of impurities // Fizika i tekhnika poluprovodnikov. 18(6), pp. 1135- 1137 (1984), in Russian. 37. A. V. Fedosov, L. I. Panasyuk, V. S. Timoshchuk. Piezoresis- tance of the irradiated germanium// Fizika i tekhnika poluprovod- nikov. 22(7), pp. 1297-1299(1988), in Russian. 38. G. L. Bir, G. Ye. Pikus. Symmetry and deformation effects in semiconductors, Nauka, Moscow (1972), 584p., in Russian. 39. V. V. Kolomoets. Influence of uniaxial elastic strain on resistance and magnitoresistance of n-Ge // Doct. thesis. Kiev, Inst. of Semi- cond., Academy of Sciences of Ukr SSR, 1971, 178p., in Rus- sian. 40. V. V. Yemtsev, T. V. Mashovets, E. A. Tropp. Kinetics of defects creation in semiconductors under series capture of several vacan- cies by an impurity atom// Fizika i tekhnika poluprovodnikov. 12(2), pp. 293-298 (1978), in Russian. 41. B. I. Shklovskii, A. L. Efros. Impurity band and conductance of compensated semiconductors // Zhournal eksperimentalnoi i teo- reticheskoi fiziki. 60(2), pp.867-878 (1971), in Russian. 42. S. T. Pantelides, W. A. Harrison, F. Yudarian. Theory of off- center impurities in semiconductors // Phys. Rev. B. 34(8), pp.6038- 6040 (1986). 43. R. I. Agarwall, A. R. Ramdas. Effect of Uniaxial Stress on the Excitation Spectra of Donors in Silicon // Phys Rev.B. 137(2A), pp.602-612 (1965). 44. A. A. Lebedev, N. A. Sultanov, B. Ekke. Influence of uniaxial stress on a non-stationary capacitance spectroscopy of deep lev- els in Si (Zn) // Fizika i tekhnika poluprovodnikov, 21(2), pp.321- 324 (1987), in Russian. 45. L. S. Berman, A. A. Lebedev. Capacitance spectroscopy of deep centres in semiconductors, Nauka, Leningrad (1981), 176p., in Russian. 46. V. I. Kuznetsov, P. F Luganov, A. P. Salmanov, A. V. Tsikunov. Accumulation and annealing of radiation defects in p-Si (Ge) // Fizika i tekhnika poluprovodnikov, 23(4), pp. 1492-1495(1989), in Russian. 47. P. V. Kuchinskii, V. M. Lomano, L. M. Shakhlevich. Peculiari- ties of arising and properties of radiation defects in n-silicon after an irradiation followed by annealing // Fizika i tekhnika polupro- vodnikov, 28(11), pp. 1928-1936 (1994), in Russian. 48. Ye. M. Verbitskaya, V. K. Yeriomin, A. M. Ivanov, Z. Li, B. Shmidt. Generation of radiation defects in high-resistance silicon during cyclic irradiation and annealing // Fizika i tekhnika polu- provodnikov. 31(2), pp., 235-240 (1997), in Russian. 49. M. T. Asom, J. L Benson, R. Saner, L. C. Kimerling // Appl. Phys. Lett., 51, p.256, (1987). 50. L. W. Song, X. D. Zhan, B. W. Benson, G. D.Watkins // Phys. Rev., B42, p.5765, (1990). 51. Z. Su, A. Husain, J. W. Farmer // J. Appl. Phys., 67, p.1903 (1990). 52 I. L. Kolokovski, P. E. Luganov, V. V. Lukjanitsa, V. V. Shusha. Phys. Stat. Sol. (a), 118, 65 (1990). 53. I. I. Kolokovskii, P. E. Luganov, V. V. Shusha // Phys. Stat. Sol. (a), 127, p.103 (1991). 54. I. L. Kolokovski, V. V. Lukjanitsa. Peculiarities of accumulation of vacancy and interstitial defects in dislocationless silicon with different oxygen amount // Fizika i tekhnika poluprovodnikov, 31(4), pp.405-409 (1997), in Russian. 55. M. S. Yunusov, M. Akhmadaliyev, S. S. Sabirov. Processes of creation and annealing of radiation defects in p-Si (P, Pt) // Fizika i tekhnika poluprovodnikov. 29(4), p. 725 (1995), in Russian. 56. M. S. Yunusov, M. Karimov, M. Alikulov, A. Akhmadaliyev, B. L. Oksengendler, S. S. Sabirov. On peculiarities of a defect cre- ation in p-Si (Â, Pt) // Fizika i tekhnika poluprovodnikov. 31(2), pp.722-726 (1997), in Russian. 57. F. M. Talipov. Influence of ytterbium on radiation defect creation in silicon irradiated at Ò = 77 Ê // Fizika i tekhnika poluprovodni- kov. 31(6), pp.728-732 (1997), in Russian. 58. A. A. Lebedev. Capacitance spectroscopy of severe levels at pres- ence of current carriers exchange with both allowed bands // Fiz- ika i tekhnika poluprovodnikov, 31(4), pp.437-440 (1997), in Rus- sian. 59. Kh. A. Abdullin, B. N. Mukashev. Defects in p-Si irradiated at 77 Ê. Energy spectrum and annealing kinetics // Fizika i tekhnika poluprovodnikov. 28(10), pp. 1831-1839 (1994), in Russian. 60. Kh. A. Abdullin, B. N. Mukashev. Investigation of vacancy de- fects in monocrystal line silicon irradiated at Ò = 77 Ê // Fizika i tekhnika poluprovodnikov, 29(2), pp. 335-345 (1995), in Russian. 61. M. K. Bagdyrkhanov, K. A. Azizov, A. A. Tursunov, K. Kh. Khai- darov. Influence of γ - irradiation on electrical and photoelectrical properties of silicon compensated by manganese // Fizika i tekhni- ka poluprovodnikov. 17(6), pp. 973-976 (1983), in Russian. 62. Ye. V. Astrova, V. V. Yemtsev, A. A. Lebedev, D. I. Poloskin, A. D. Remenyuk, Yu. V. Rud, V. Ve. Khartsiyev. Degradation of porous silicon photoluminescence forced by 60 Co γ- irradiation // Fizika i tekhnika poluprovodnikov. 29(7), pp.1301-1307(1995), in Russian. 63. Ye. V. Astrov, R. F. Vitman, V. V. Yemtsev, A. A. Lebedev, D. I. Poloskin, A. D. Remenyuk, Yu. V. Rud. Influence of γ- irra- diation on properties of porous silicon // Fizika i tekhnika polu- provodnikov. 30(3), pp.507-510 (1996), in Russian.