Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction
Narrow-gap mercury cadmium telluride thin films grown by MBE methods onto various substrates (HgCdTe/Si, HgCdTe/GaAs) were investigated as a piezoelectric heterostructure for IR detection. Mechanical stresses at the layer-substrate interface were analyzed. It was determined that for [310] oriente...
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2012
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Цитувати: | Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction/ A. B. Smirnov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 2. — С. 170-175. — Бібліогр.: 22 назв. — англ. |
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irk-123456789-1183062017-05-30T03:03:27Z Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction Smirnov, A. B. Narrow-gap mercury cadmium telluride thin films grown by MBE methods onto various substrates (HgCdTe/Si, HgCdTe/GaAs) were investigated as a piezoelectric heterostructure for IR detection. Mechanical stresses at the layer-substrate interface were analyzed. It was determined that for [310] oriented MCT-based structures under the anisotropic restriction of the deformation the nonzero shear components of the strain tensor arise and stress induced piezoelectric polarization is generated. Existence of the built-in electric field in the strained MCT-based heterostructure results in the spatial separation of the nonequilibrium carriers and the possibility of the room temperature detection of the IR radiation is realized. 2012 Article Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction/ A. B. Smirnov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 2. — С. 170-175. — Бібліогр.: 22 назв. — англ. 1560-8034 PACS 72.40.+w, 77.65.Ly, 81.05.Dz http://dspace.nbuv.gov.ua/handle/123456789/118306 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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English |
description |
Narrow-gap mercury cadmium telluride thin films grown by MBE methods
onto various substrates (HgCdTe/Si, HgCdTe/GaAs) were investigated as a piezoelectric
heterostructure for IR detection. Mechanical stresses at the layer-substrate interface were
analyzed. It was determined that for [310] oriented MCT-based structures under the
anisotropic restriction of the deformation the nonzero shear components of the strain
tensor arise and stress induced piezoelectric polarization is generated. Existence of the
built-in electric field in the strained MCT-based heterostructure results in the spatial
separation of the nonequilibrium carriers and the possibility of the room temperature
detection of the IR radiation is realized. |
format |
Article |
author |
Smirnov, A. B. |
spellingShingle |
Smirnov, A. B. Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction Semiconductor Physics Quantum Electronics & Optoelectronics |
author_facet |
Smirnov, A. B. |
author_sort |
Smirnov, A. B. |
title |
Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction |
title_short |
Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction |
title_full |
Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction |
title_fullStr |
Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction |
title_full_unstemmed |
Residual stresses and piezoelectric properties of the HgCdTe – based compound heterostructures under the anisotropic deformation restriction |
title_sort |
residual stresses and piezoelectric properties of the hgcdte – based compound heterostructures under the anisotropic deformation restriction |
publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
publishDate |
2012 |
url |
http://dspace.nbuv.gov.ua/handle/123456789/118306 |
citation_txt |
Residual stresses and piezoelectric properties of the HgCdTe –
based compound heterostructures under the anisotropic
deformation restriction/ A. B. Smirnov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 2. — С. 170-175. — Бібліогр.: 22 назв. — англ. |
series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
work_keys_str_mv |
AT smirnovab residualstressesandpiezoelectricpropertiesofthehgcdtebasedcompoundheterostructuresundertheanisotropicdeformationrestriction |
first_indexed |
2025-07-08T13:41:44Z |
last_indexed |
2025-07-08T13:41:44Z |
_version_ |
1837086392108187648 |
fulltext |
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
170
PACS 72.40.+w, 77.65.Ly, 81.05.Dz
Residual stresses and piezoelectric properties of the HgCdTe –
based compound heterostructures under the anisotropic
deformation restriction
A. B. Smirnov
V. Lashkaryov Institute of Semiconductor Physics of NAS of Ukraine
41, prospect Nauky, 03028 Kyev, Ukraine
Phone: (044) 525-18-13; fax: (044) 525 1810
E-mail: alex_tenet@isp.kiev.ua
Abstract. Narrow-gap mercury cadmium telluride thin films grown by MBE methods
onto various substrates (HgCdTe/Si, HgCdTe/GaAs) were investigated as a piezoelectric
heterostructure for IR detection. Mechanical stresses at the layer-substrate interface were
analyzed. It was determined that for [310] oriented MCT-based structures under the
anisotropic restriction of the deformation the nonzero shear components of the strain
tensor arise and stress induced piezoelectric polarization is generated. Existence of the
built-in electric field in the strained MCT-based heterostructure results in the spatial
separation of the nonequilibrium carriers and the possibility of the room temperature
detection of the IR radiation is realized.
Keywords: strained heterostructure, piezoelectric properties, HgCdTe.
Manuscript received 05.03.12; revised version received 20.03.12; accepted for
publication 27.03.12; published online 15.05.12.
1. Introduction
Lattice strain is a matter of paramount importance for
solid-state devices, and it is exploited to improve the
electrical and optical properties of these devices. For
example, significant enhancement in the hole mobility of
a SiGe-on-insulator metal-oxide-semiconductor field-
effect transistor was achieved using the lateral-strain-
relaxation process [1].
An important phenomenon in strained structures
grown along a polar crystallographic axis is availability
of a piezoelectric field, which deeply modifies
semiconductor band configuration and physical
properties. Piezoelectric field in strained heterostructures
was theoretically predicted in [2, 3] and then
experimentally proved [4-6]. The fields in exceeding of
105 V/cm experimentally studied in III-V [7] and II-VI
[8-10] heterostructures, can have applications in electro-
optics and nonlinear optics [11, 12]. These electric fields
can also cause charge accumulation, which can be used
in a field effect transistor [13] and resonant tunneling
structures. Strain-induced piezoelectric effects in
arbitrary shaped II-VI quantum wires are described [14].
In this work, the HgCdTe (MCT) – based strained
heterostructures are considered under the anisotropic
restriction of the deformation. The purpose of this study
is demonstration of the possibility to detect IR radiation
by using piezoelectric heterostructure HgCdTe on Si
without cryogenic cooling and to achieve its improved
performance.
In this work, the following glassy system was
investigated: SAs undoped and doped with
manganese and chromium in various concentrations.
2. Experimental: MCT-based heterostructure
growth and characterisation
The MCT-based heterostructure, shown in Fig. 1, was
grown by MBE with intermediate buffer layers on [310]-
oriented Si and GaAs substrates [15]. To decrease the
influence of surface recombination, MCT layers were
grown with the Cd content increasing to the surface.
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
171
Fig. 1. A cross-sectional view of the typical MBE grown HgCdTe-based heterostructure with photolithographicaly patterned
contact metallization.
Close to the buffer layer, the Cd content also increases,
and a potential barrier can be formed in some cases
between the buffer and photosensitive layers. The
structures were characterized by X-ray diffraction, FTIR
spectroscopy and temperature dependent Hall
measurements. The change in the curvature radius (ΔR),
measured by the changes of Bragg maximum angle
position, before and after layer structure deposition, was
used to estimate the residual stresses in the MCT-based
heterostructures. Hall measurements allowed estimating
the parameters of charge carrier transport (p1016 cm-3,
p230 cm2V–1c–1 at 80 K). FTIR transmission analysis
was used to determine the MCT composition.
3. Results and discussion
3.1. Residual stresses of the MCT – based
heterostructures
It is worth noting that, for compound heterostructures
(such as HgCdTe/CdTe/ZnTe/Si or
HgCdTe/CdTe/ZnTe/GaAs, observable here), the
presence of residual stresses is a specific character
caused by their physical nature. Mechanical stresses
arise from various causes, including the physical nature
of the as-deposited material, thermal expansion
difference between the film and substrate materials,
chemical or structural changes occurring in the film in
the course of processing.
The main factors determining the degree of
perfection of the layer (l) - substrate (s) structure are the
differences between their crystal lattice parameters a =
as - al and linear thermal expansion coefficients = s
-l. The stress at the layer substrate interface with a
large difference between the lattice parameters can be
expressed in the form [16]:
)1(
E
misfit , (1)
where saa , E – is the Young modulus, - is the
Poisson’s ratio. For E and , the average values between
the film and substrate are calculated. Calculations show
that the initial misfit stress for all epitaxial systems
under study is very large (1010 Pa).
Achievements in crystal growth technology have
improved the situation with heterostructures, which
acquire strain owing to lattice mismatch. The well-
known method of reducing mechanical stresses in a
semiconductor heterostructure is based on use fitting to
the lattice parameter of intermediate layers. During the
growth process, the stresses decrease owing to the
introduction of misfit dislocations, since the film
thickness d increases and completely relaxes at a certain
critical depth dcr. A thickness-dependent misfit strain can
be described as [17]:
init
cr
d
d
d )( , (2)
The critical thickness of CdTe on silicon was estimated
to be approximately 0.5 nm and for CdTe on GaAs 0.9
nm [17]. If the ZnTe nucleation layers are used, the
critical thickness becomes equal to 1.2 nm in the case of
Si substrate and 4 nm in the case of GaAs substrate [17].
For a CdTe film with the thickness close to 6.3 m,
which is typical for the film thicknesses used in this
work, the thickness-dependent residual misfit stress
calculated with regard to the equations (1) and (2) is
*
misfit equal to 6 MPa.
This value is significantly lower than the stress
resulted from the thermal expansion mismatch:
)1( l
l
thermal
TE
, (3)
where T is the difference between the synthesis and
operation temperatures. The absolute values of the
thermal stresses for epitaxial systems under study reach
107 Pa and they are quite similar to the data of ref. [17].
Variband layer HgCdTe
Absorber layer HgCdTe
Variband layer HgCdTe
Buffer layer CdTe, 6.3 m
Buffer layer ZnTe, 0.05 m
[310] Si or [013] GaAs substrate
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
172
The residual stresses for heterostructures
observable here were estimated experimentally by the X-
ray diffraction technique. Due to strain-induced bowing,
Bragg peak positions will differ slightly in different
points on the film surface. X-ray diffraction rocking
curve of full-width at half-maximum mapping is used to
generate a surface profile from which a radius of
curvature (ΔR) is extracted. The change in radius, before
and after layer structure deposition, may be used to
estimate the residual film stresses using the Shoney’s
equation:
Rd
dE
ls
ss
1
)1(6
2
exp (4)
where dl and ds are the layer and substrate thickneses,
respectively, Es and s are the linear elastic modulus and
Poissons ratio of the substrate respectively.
Calculated misfit and residual thermal stresses,
obtained according to equations (1) – (3), as well as the
absolute value of the experimentally determined residual
stresses for heterostructures under study, reaches 2 to 15
MPa and are in agreement with the predicted data (see
Table 1). The ZnTe layer was ignored during our stress
analysis, since there is a presumption that the thick CdTe
layer should dominate over the stress characteristics of
the buffered substrate.
Table 1. Calculated (total) and experimentally obtained
(exp) residual stresses for HgCdTe-based heterostructure,
*
misfit is a thickness-dependent misfit stress, total = *
misfit +
+ thermal.
Substrate misfit *
misfit thermal total exp
CdTe/ZnTe/GaAs -13
GPa
-8.6
MPa
-17
MPa
-25.6
MPa
-2
MPa
CdTe/ZnTe/Si 27
GPa
-5 MPa 50
MPa
45
MPa
15
MPa
Thus, we have demonstrated the presence of
residual stresses in the MCT-based heterostructures. In
particular, CdTe/ZnTe/GaAs structure is grown in
compression since the sign of total (as well as exp) is
negative, whereas, for CdTe/ZnTe/Si structure, the total
residual stresses are tensile.
Let us consider the mechanical deformations of a
strained layer in the heterostructure with lattice mismatch
in terms of local strains along the coordinate axes.
The standard strain – displacement ratio is given by
below:
i
j
j
i
ij x
u
x
u
2
1
(5)
where ui and xi denote displacement and space
coordinate along the i-th crystallographic axis,
respectively. For zinc-blend biaxial strained material
grown on (001) surface the deformation components are
derived as [18]:
33
//2211 ,
),(0 jiij
(6)
where the symbols and denote the xy-plane and the
z-axis, respectively. The MCT-based heterostructure
under study were grown in (310) orientation, and the
principal coordinate system x-y-z does not coincide with
that of the MCT unit cell. Tensors in the x-y-z
coordinate system can be transformed to the MCT
coordinate system x-y-z using Euler's angles , , .
The components of the strain in the new coordinate
system are related by the equality mnjnimij cc " . The
values of Euler's angles, as well as transformation matrix
and strain tensor in the new coordinate systems for [310]
and [111] directions are presented in Table 2.
The data in Table 2 clearly show that, for zinc-
blend material grown on (001) surface substrate, only
the stretching (compressive) strain components have
nonzero values. At the same time, for the structure
grown on (310) surface y-component of the shear strain
acting on a plane perpendicular to the x-axis (xy) as well
as x-component of the shear strain acting on a plane
perpendicular to the y-axis (yx) have nonzero value.
And, for the structure grown on (111) surface all strain
components have nonzero values.
3.2. Piezoelectric properties of the MCT – based
heterostructures
Under normal conditions, MCT crystallizes in F43m
lattice (Td) and has one independent piezoelectric
constant e14. Therefore, mechanical stresses can induce
electric fields and/or surface charges in MCT due to
piezoelectric effects [8].
The piezoelectric effect can be described by the
following equation:
jkijkjkijki deP (7)
where Pi are the polarization vectors, jk and jk are
tensors of the mechanical strains and stresses,
respectively, and eijk and dijk are the piezoelectric
tensors.
For cubic symmetry, in principal coordinate axes,
all the nonzero components of the piezoelectric tensor
for F43m lattice are equal: e123 = el32 = e231 = e213 = e312 =
e321 = e14, where e14 = 0.0136 C/m2 for MCT [9]. The
matrix form of strain tensor is:
6
5
4
3
2
1
345
426
561
333231
232221
131211
2
1
2
1
2
1
2
1
2
1
2
1
,
(8)
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
173
Table 2. Strain transformation parameters for MCT-based heterostructures grown with (001), (310) and (111) orientation.
The Euler's
angles
Transformation matrix Strain tensor in the new coordinate systems
OZ(001) ______ _____
00
00
00
'
//
//
ij , //
11
122
c
c
OZ(310)
= -18.45,
= -90,
= 0
001
sincos0
cossin0
ijC
//
////
////
'
00
09.01.03.0
03.09.01.0
ij
OZ(111)
= -45,
= -54,73,
= 0
cos0sin
sinsincoscossin
sincossincoscos
ijC
//////
//////
//////
2
2
2
3
1'
ij
and the matrix form of the induced polarization vector
can be expressed as:
6
5
4
3
2
1
14
14
14
3
2
1
00000
00000
00000
e
e
e
P
P
P
(9)
It is necessary to note that only the shear strains can
induce electric polarization, and the extensional strains
do not induce polarization. It is easy to show that for
zinc-blend biaxial strained bulk material, as well as for
[100], [010], or [001]-oriented layer structures, the
piezoresponse does not arise 0 jkijki eP .
But for the anisotropic restriction of the
deformation, when the substrate specifies the strain of
layer along the x and y axes, the values of 11 and 22 are
specified by a thickness-dependent misfit as well as a
thermal expansion mismatch strain in xy-plane (see eq.1-
3) and they are different from the value of 33 (see
eq.6).Consequently, nonzero shear strain components
appear as a result of strain tensor transformation (see
Table 2).
The components of the piezoelectric tensor in the
new coordinate system are related by the equality
mnlkljnimijk eccce "
and for [310]-oriented MCT layer
in the new coordinate system the induced polarization
vector is derived as:
//
14
3
2
1
0
0
2cos6.0 e
P
P
P
(10)
Like to that for the [111]-oriented MCT layer the
induced polarization vector is derived as:
//
//
//
14
3
2
1
3
2
e
P
P
P
(11)
It is worth noting that, for [100], [010], or [001]-
oriented MCT layers, no piezoelectric polarization will
be induced.
Thus, for [310] oriented MCT-based structures
with the anisotropic deformation restriction the nonzero
shear strain components arise. As a consequence,
electric polarization is generated in a strained
heterostructure (see Eq.10). On the base of the
experimentally obtained residual stresses for the MCT-
based heterostructures, the value of the plane strain is
estimated to reach 1.3x10-4 for MCT on Si structure and
0.17x10-4 for MCT on GaAs structure. The values of the
induced polarization P3 of the [310]-oriented MCT layer
grown onto various substrates are found to be in the
range from 0.85x10-6 C m-2 (MCT/Si) down to 0.1x10-6
C m-2 (MCT/GaAs), and, the electric field is found to be
in the range from 0.6 kV m-1 (MCT/GaAs) to 5 kV m-1
(MCT/Si) estimated according to equations E3 = -P3
/0.
Evidently, it is need to take into account that
variband layer at the MCT surface also creates built-in
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
174
electric field in the heterostructure:
dx
dE
e
E
g
iband
1
var .
This field tends to push carriers into the sample and an
excess of the negative charge is accumulated on the
surface of the sample with p-type conductivity.
Consequently, the variband built-in electric field is
directed to the structure surface in the same direction as
the piezoelectric field induced by tensile stresses
(MCT/Si). The resultant built-in electric field value will
be reinforced. At the same time, the piezoelectric field
induced by compressive stresses in MCT/GaAs
heterostructure is directed into the sample. It is opposite
to the direction of the variband built-in electric field, and
the resultant field can be canceled.
3.3. Room temperature IR detection
It is well known that thermal processes dominate at
temperatures close to the room one in MCT-based
devices used for middle and long wavelength IR spectral
regions, and in the conventional photon detector it is
impossible to accurately detect any infrared radiation
other than that of high output power as in a CO2 gas
laser. Conventional MCT-based photon detectors need
significant cooling in order to reduce noise and leakage
currents resulting from generation and recombination
processes.
It has been recently suggested that Auger
recombination and generation rates can be reduced using
the phenomena of exclusion and extraction to produce
nonequilibrium carrier distributions [19]. Photodiode
HgCdTe/Si structures based on this concept were
manufactured for near-room temperature operation. In
addition, three types of IR photovoltaic detectors can
operate at near-room temperature: photoelectromagnetic
detectors, magnetoconcentration detectors, and Dember
effect detectors [20]. The operation principle of these
devices is based on the separation of excess carriers.
0.2
0.4
0.8
0.6
Wavelength, m
S, a.u.
1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0
1.0
Fig. 2. Spectra of the photovoltaic responsitivity of the
Hg0.7Cd0.3Te/Si element.
Existence of the built-in electric field in the studied
herein strained MCT-based heterostructures results in
the spatial separation of the nonequilibrium carriers, too.
As a consequence, the possibility of the room
temperature detection of the IR radiation is
implemented. In particular, for MCT/Si stressed
semiconductor heterostructure with piezoelectric
properties. At the same time, the built-in electric field in
MCT/GaAs heterostructure is very likely compensated,
and we cannot detect IR radiation at room temperature.
This conclusion was confirmed experimentally
elsewhere [21, 22]. It was observed that
Hg0.68Cd0.32Te/CdTe/ZnTe/Si heterostructure obtained
by MBE method exhibits spectral photoresponse under
IR photoexcitation without electrical bias at room
temperature (see Fig. 2). At the same time, spectral
response of the MCT-based structures grown on GaAs
substrates was insignificant.
To estimate the voltage responsivity, the prototype
of MCT-based photovoltaic detector was exposed to
infrared photons from a laser source (continuously
operating He-Ne laser, LGN 113) with the wavelengths
0.63, 1.15 and 3.39 m. The measured value of
responsivity was from ~0.5 V/W to ~4.3 V/W at 0.5 mW
laser beam power in the focal spot [21]. It was also
found out that the prototype of photovoltaic detector is
sensitive to CO2 laser radiation on the level of ~0.04
V/W at 1 mW laser beam power in the focal spot [22].
An element of the prototype (1x1 mm) achieves
photovoltaic spectral sensitivity at the level D* = 2.6109
(W-1cm Hz1/2) for 300 K and 3 m. The noise
measurements were performed with the 1 Hz bandwidth.
4. Conclusions
Thus, the presence of residual stresses in HgCdTe-based
heterostructures grown by MBE with intermediate buffer
layers on [310]-oriented Si and GaAs substrates was
demonstrated. In particular, HgCdTe/CdTe/ZnTe/GaAs
structure was grown in compression stresses, whereas,
for HgCdTe/CdTe/ZnTe/Si structure, the total residual
stresses are tensile. It was obtained that the
experimentally confirmed stress for heterostructures
under the study reaches 2 to 15 MPa and is in agreement
with the predicted data.
It was confirmed that for [310] oriented MCT-
based structures under the anisotropic restriction of
deformation, when the substrate specifies the in-plane
strain of layer, the nonzero shear components of the
strain tensor arise and stress induced piezoelectric
polarization is generated. Existence of the built-in
electric field in the studied herein strained MCT-based
heterostructures observable here results in the spatial
separation of the nonequilibrium carriers and the
possibility of the room temperature detection of the IR
radiation is realized. This conclusion is confirmed
experimentally.
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
175
Acknowledgment
The authors would like to express their thanks
Dr R Savkina all her critical help in the process writing
this article.
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blende heterostructure //Appl. Phys. Lett. 56 p. 659
(1990).
8. C. F. Wan, J. D. Luttmer, R. S. List, and R. L.
Strong, Piezoelectric effects in HgCdTe devices //
Journal of Electronic Materials 24 p. 1293-1297
(1995).
9. A. T. Paxton, A. Sher, M. Berding, M. Van
Schilfgaarde, and M. W. Muller, How dislocations
affect transport //Journal of Electronic Materials
24 p. 525 (1995).
10. R. Andre, C. Deshayes, J. Cibert, L. S. Dang, S.
Tatarenko and K. Saminadayar, Optical studies of
the piezoelectric effect in (111)-oriented CdTe/
Cd1-xZnxTe strained quantum wells //Phys. Rev. B
42 p.11392-11395 (1990).
11. V. Ortiz, N. T. Pelekanos, and G. Mula, Efficient
all-optical light modulation in a piezoelectric
heterostructure at room temperature // Appl. Phys.
Letters 72 p.963 (1998).
12. D.L. Smith, Piezoelectric effects in strained layer
heterostructures grown on novel index //
Microelectronics Journal Volume 28 p.707 (1997).
13. Peng Fei, Ping-Hung Yeh, Jun Zhou, Sheng Xu,
Yifan Gao, Jinhui Song, Yudong Gu, Yanyi Huang,
and Zhong Lin Wang, Piezoelectric Potential Gated
Field-Effect Transistor Based on a Free-Standing
ZnO Wire // Nano Letters 9 p.3435 (2009).
14. S. Patil, B. Wen and R. V. N. Melnik, Strain
E�ects and Temperature-Dependent Phase
Stability of II-VI Semiconductor Nanostructures //
AIP Conf. Proc. 1199 p.303 (2010).
15. V. Yakushev, V. S. Varavin, V. V. Vasiliev, S. A.
Dvoretsky, I. V. Sabinina, U. G. Sidorov, A.
Sorochkin, and A. L. Aseev, Photodiodes, ed
Jeong-Woo Park (InTech), (2011) p. 367-400.
16. Yu. L. Tkhorik and L. S. Khazan, Plastic
Deformation and Misfit Dislocations in
Heteroepitaxial Systems (Kiev: Naukova Dumka)
[in Russian] (1983) p.304.
17. R.N. Jacobs, L.A. Almeida, J. Markunas,
J. Pellegrino, M. Groenert, M. Jaime-Vasquez, N.
Mahadik, C. Andrews, S. B. Qadri, T. Lee, and M.
Kim //Journal of Electronic Materials 37 p. 1480
(2008).
18. K. Arimoto, and K. Nakagawa, Elastic theory for
strained heterostructures with in-plane anisotropy
//J. Appl. Phys. 104, p. 063512-8 (2008).
19. T. Ashley, C. T. Elliott, and A. T. Harker, Non-
equilibrium modes of operation for infrared
detectors // Infrared Phys. 26, p. 303-315 (1986).
20. J. Piotrowski and A. Rogalski, Uncooled long
wavelength infrared photondetectors // Infrared
Physics Technology 46, p. 115-131 (2004).
21. T. Kryshtab, R. Savkina, F. Sizov, A. Smirnov, M.
Kladkevich, and V. Samoylov, Infrared radiation
detection by a piezoelectric heterostructure at room
temperature // Physica Status Solidi (c) 9, in press
(2012).
22. F.F. Sizov, A.B. Smirnov, R.K. Savkina, V.A.
Deriglazov, M.V. Yakushev, Narrow-gap
piezoelectric heterostructure as IR detector //
Semiconductor physics, quantum electronics and
photoelectronics 15, p. 65-71 (2012)
(www.journal-spqeo.org.ua).
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2012. V. 15, N 2. P. 170-175.
PACS 72.40.+w, 77.65.Ly, 81.05.Dz
Residual stresses and piezoelectric properties of the HgCdTe –
based compound heterostructures under the anisotropic
deformation restriction
A. B. Smirnov
V. Lashkaryov Institute of Semiconductor Physics of NAS of Ukraine
41, prospect Nauky, 03028 Kyev, Ukraine
Phone: (044) 525-18-13; fax: (044) 525 1810
E-mail: alex_tenet@isp.kiev.ua
Abstract. Narrow-gap mercury cadmium telluride thin films grown by MBE methods onto various substrates (HgCdTe/Si, HgCdTe/GaAs) were investigated as a piezoelectric heterostructure for IR detection. Mechanical stresses at the layer-substrate interface were analyzed. It was determined that for [310] oriented MCT-based structures under the anisotropic restriction of the deformation the nonzero shear components of the strain tensor arise and stress induced piezoelectric polarization is generated. Existence of the built-in electric field in the strained MCT-based heterostructure results in the spatial separation of the nonequilibrium carriers and the possibility of the room temperature detection of the IR radiation is realized.
Keywords: strained heterostructure, piezoelectric properties, HgCdTe.
Manuscript received 05.03.12; revised version received 20.03.12; accepted for publication 27.03.12; published online 15.05.12.
1. Introduction
Lattice strain is a matter of paramount importance for solid-state devices, and it is exploited to improve the electrical and optical properties of these devices. For example, significant enhancement in the hole mobility of a SiGe-on-insulator metal-oxide-semiconductor field-effect transistor was achieved using the lateral-strain-relaxation process [1].
An important phenomenon in strained structures grown along a polar crystallographic axis is availability of a piezoelectric field, which deeply modifies semiconductor band configuration and physical properties. Piezoelectric field in strained heterostructures was theoretically predicted in [2, 3] and then experimentally proved [4-6]. The fields in exceeding of 105 V/cm experimentally studied in III-V [7] and II-VI [8-10] heterostructures, can have applications in electro-optics and nonlinear optics [11, 12]. These electric fields can also cause charge accumulation, which can be used in a field effect transistor [13] and resonant tunneling structures. Strain-induced piezoelectric effects in arbitrary shaped II-VI quantum wires are described [14].
In this work, the HgCdTe (MCT) – based strained heterostructures are considered under the anisotropic restriction of the deformation. The purpose of this study is demonstration of the possibility to detect IR radiation by using piezoelectric heterostructure HgCdTe on Si without cryogenic cooling and to achieve its improved performance.
In this work, the following glassy system was investigated:
S
As
-
undoped and doped with manganese and chromium in various concentrations.
2. Experimental: MCT-based heterostructure
growth and characterisation
The MCT-based heterostructure, shown in Fig. 1, was grown by MBE with intermediate buffer layers on [310]-oriented Si and GaAs substrates [15]. To decrease the influence of surface recombination, MCT layers were grown with the Cd content increasing to the surface. Close to the buffer layer, the Cd content also increases, and a potential barrier can be formed in some cases between the buffer and photosensitive layers. The structures were characterized by X-ray diffraction, FTIR spectroscopy and temperature dependent Hall measurements. The change in the curvature radius (ΔR), measured by the changes of Bragg maximum angle position, before and after layer structure deposition, was used to estimate the residual stresses in the MCT-based heterostructures. Hall measurements allowed estimating the parameters of charge carrier transport (p(1016 cm-3, (p(230 cm2V–1c–1 at 80 K). FTIR transmission analysis was used to determine the MCT composition.
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
e
e
e
=
e
^
0
0
0
0
0
0
'
//
//
ij
//
11
12
2
e
-
=
e
^
c
c
3. Results and discussion
3.1. Residual stresses of the MCT – based heterostructures
It is worth noting that, for compound heterostructures (such as HgCdTe/CdTe/ZnTe/Si or HgCdTe/CdTe/ZnTe/GaAs, observable here), the presence of residual stresses is a specific character caused by their physical nature. Mechanical stresses arise from various causes, including the physical nature of the as-deposited material, thermal expansion difference between the film and substrate materials, chemical or structural changes occurring in the film in the course of processing.
The main factors determining the degree of perfection of the layer (l) - substrate (s) structure are the differences between their crystal lattice parameters (a = as - al and linear thermal expansion coefficients (( = (s -(l. The stress at the layer ( substrate interface with a large difference between the lattice parameters can be expressed in the form [16]:
)
1
(
n
-
e
=
s
E
misfit
,
(1)
where
s
a
a
D
=
e
, E – is the Young modulus, ( - is the Poisson’s ratio. For E and (, the average values between the film and substrate are calculated. Calculations show that the initial misfit stress for all epitaxial systems under study is very large ((1010 Pa).
Achievements in crystal growth technology have improved the situation with heterostructures, which acquire strain owing to lattice mismatch. The well-known method of reducing mechanical stresses in a semiconductor heterostructure is based on use fitting to the lattice parameter of intermediate layers. During the growth process, the stresses decrease owing to the introduction of misfit dislocations, since the film thickness d increases and completely relaxes at a certain critical depth dcr. A thickness-dependent misfit strain can be described as [17]:
init
cr
d
d
d
e
=
e
)
(
,
(2)
The critical thickness of CdTe on silicon was estimated to be approximately 0.5 nm and for CdTe on GaAs (0.9 nm [17]. If the ZnTe nucleation layers are used, the critical thickness becomes equal to 1.2 nm in the case of Si substrate and 4 nm in the case of GaAs substrate [17]. For a CdTe film with the thickness close to 6.3 (m, which is typical for the film thicknesses used in this work, the thickness-dependent residual misfit stress calculated with regard to the equations (1) and (2) is (*misfit equal to 6 MPa.
This value is significantly lower than the stress resulted from the thermal expansion mismatch:
)
1
(
l
l
thermal
TE
n
-
D
a
D
=
s
,
(3)
where (T is the difference between the synthesis and operation temperatures. The absolute values of the thermal stresses for epitaxial systems under study reach (107 Pa and they are quite similar to the data of ref. [17].
The residual stresses for heterostructures observable here were estimated experimentally by the X-ray diffraction technique. Due to strain-induced bowing, Bragg peak positions will differ slightly in different points on the film surface. X-ray diffraction rocking curve of full-width at half-maximum mapping is used to generate a surface profile from which a radius of curvature (ΔR) is extracted. The change in radius, before and after layer structure deposition, may be used to estimate the residual film stresses using the Shoney’s equation:
R
d
d
E
l
s
s
s
D
n
-
=
s
1
)
1
(
6
2
exp
(4)
where dl and ds are the layer and substrate thickneses, respectively, Es and (s are the linear elastic modulus and Poisson(s ratio of the substrate respectively.
Calculated misfit and residual thermal stresses, obtained according to equations (1) – (3), as well as the absolute value of the experimentally determined residual stresses for heterostructures under study, reaches 2 to 15 MPa and are in agreement with the predicted data (see Table 1). The ZnTe layer was ignored during our stress analysis, since there is a presumption that the thick CdTe layer should dominate over the stress characteristics of the buffered substrate.
Table 1. Calculated ((total) and experimentally obtained ((exp) residual stresses for HgCdTe-based heterostructure, (*misfit is a thickness-dependent misfit stress, (total = (*misfit + + (thermal.
Substrate
(misfit
(*misfit
(thermal
(total
(exp
CdTe/ZnTe/GaAs
(-13 GPa
-8.6 MPa
-17 MPa
-25.6 MPa
(-2 MPa
CdTe/ZnTe/Si
(27 GPa
-5 MPa
50 MPa
45 MPa
(15 MPa
Thus, we have demonstrated the presence of residual stresses in the MCT-based heterostructures. In particular, CdTe/ZnTe/GaAs structure is grown in compression since the sign of (total (as well as (exp) is negative, whereas, for CdTe/ZnTe/Si structure, the total residual stresses are tensile.
Let us consider the mechanical deformations of a strained layer in the heterostructure with lattice mismatch in terms of local strains along the coordinate axes.
The standard strain – displacement ratio is given by below:
÷
÷
ø
ö
ç
ç
è
æ
¶
¶
+
¶
¶
=
e
i
j
j
i
ij
x
u
x
u
2
1
(5)
where ui and xi denote displacement and space coordinate along the i-th crystallographic axis, respectively. For zinc-blend biaxial strained material grown on (001) surface the deformation components are derived as [18]:
^
e
=
e
e
=
e
=
e
¹
=
e
33
//
22
11
,
),
(
0
j
i
ij
(6)
where the symbols (( and ( denote the xy-plane and the z-axis, respectively. The MCT-based heterostructure under study were grown in (310) orientation, and the principal coordinate system x-y-z does not coincide with that of the MCT unit cell. Tensors in the x-y-z coordinate system can be transformed to the MCT coordinate system x(-y(-z( using Euler's angles (, (, (. The components of the strain in the new coordinate system are related by the equality
mn
jn
im
ij
c
c
e
=
e
"
. The values of Euler's angles, as well as transformation matrix and strain tensor in the new coordinate systems for [310] and [111] directions are presented in Table 2.
The data in Table 2 clearly show that, for zinc-blend material grown on (001) surface substrate, only the stretching (compressive) strain components have nonzero values. At the same time, for the structure grown on (310) surface y-component of the shear strain acting on a plane perpendicular to the x-axis ((xy) as well as x-component of the shear strain acting on a plane perpendicular to the y-axis ((yx) have nonzero value. And, for the structure grown on (111) surface all strain components have nonzero values.
3.2. Piezoelectric properties of the MCT – based heterostructures
Under normal conditions, MCT crystallizes in F43m lattice (Td) and has one independent piezoelectric constant e14. Therefore, mechanical stresses can induce electric fields and/or surface charges in MCT due to piezoelectric effects [8].
The piezoelectric effect can be described by the following equation:
jk
ijk
jk
ijk
i
d
e
P
s
=
e
=
(7)
where Pi are the polarization vectors, (jk and (jk are tensors of the mechanical strains and stresses, respectively, and eijk and dijk are the piezoelectric tensors.
For cubic symmetry, in principal coordinate axes, all the nonzero components of the piezoelectric tensor for F43m lattice are equal: e123 = el32 = e231 = e213 = e312 = e321 = e14, where e14 = 0.0136 C/m2 for MCT [9]. The matrix form of strain tensor is:
÷
÷
÷
÷
÷
÷
÷
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ø
ö
ç
ç
ç
ç
ç
ç
ç
ç
è
æ
e
e
e
e
e
e
=
÷
÷
÷
÷
ø
ö
ç
ç
ç
ç
è
æ
e
e
e
e
e
e
e
e
e
=
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
e
e
e
e
e
e
e
e
e
6
5
4
3
2
1
3
4
5
4
2
6
5
6
1
33
32
31
23
22
21
13
12
11
2
1
2
1
2
1
2
1
2
1
2
1
,
(8)
a
-
=
j
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
j
j
j
-
j
=
0
0
1
sin
cos
0
cos
sin
0
ij
C
and the matrix form of the induced polarization vector can be expressed as:
÷
÷
÷
÷
÷
÷
÷
÷
ø
ö
ç
ç
ç
ç
ç
ç
ç
ç
è
æ
e
e
e
e
e
e
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
=
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
6
5
4
3
2
1
14
14
14
3
2
1
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
e
e
e
P
P
P
(9)
It is necessary to note that only the shear strains can induce electric polarization, and the extensional strains do not induce polarization. It is easy to show that for zinc-blend biaxial strained bulk material, as well as for [100], [010], or [001]-oriented layer structures, the piezoresponse does not arise
0
=
e
=
jk
ijk
i
e
P
.
But for the anisotropic restriction of the deformation, when the substrate specifies the strain of layer along the x and y axes, the values of (11 and (22 are specified by a thickness-dependent misfit as well as a thermal expansion mismatch strain in xy-plane (see eq.1-3) and they are different from the value of (33 (see eq.6).Consequently, nonzero shear strain components appear as a result of strain tensor transformation (see Table 2).
The components of the piezoelectric tensor in the new coordinate system are related by the equality
mnl
kl
jn
im
ijk
e
c
c
c
e
=
"
and for [310]-oriented MCT layer in the new coordinate system the induced polarization vector is derived as:
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
e
-
e
j
=
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
^
//
14
3
2
1
0
0
2
cos
6
.
0
e
P
P
P
(10)
Like to that for the [111]-oriented MCT layer the induced polarization vector is derived as:
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
e
-
e
e
-
e
e
-
e
=
÷
÷
÷
ø
ö
ç
ç
ç
è
æ
^
^
^
//
//
//
14
3
2
1
3
2
e
P
P
P
(11)
It is worth noting that, for [100], [010], or [001]-oriented MCT layers, no piezoelectric polarization will be induced.
Thus, for [310] oriented MCT-based structures with the anisotropic deformation restriction the nonzero shear strain components arise. As a consequence, electric polarization is generated in a strained heterostructure (see Eq.10). On the base of the experimentally obtained residual stresses for the MCT-based heterostructures, the value of the plane strain is estimated to reach 1.3x10-4 for MCT on Si structure and 0.17x10-4 for MCT on GaAs structure. The values of the induced polarization P3 of the [310]-oriented MCT layer grown onto various substrates are found to be in the range from 0.85x10-6 C m-2 (MCT/Si) down to 0.1x10-6 C m-2 (MCT/GaAs), and, the electric field is found to be in the range from 0.6 kV m-1 (MCT/GaAs) to 5 kV m-1 (MCT/Si) estimated according to equations E3 = -P3 /(((0.
Evidently, it is need to take into account that variband layer at the MCT surface also creates built-in electric field in the heterostructure:
dx
dE
e
E
g
iband
1
var
=
. This field tends to push carriers into the sample and an excess of the negative charge is accumulated on the surface of the sample with p-type conductivity. Consequently, the variband built-in electric field is directed to the structure surface in the same direction as the piezoelectric field induced by tensile stresses (MCT/Si). The resultant built-in electric field value will be reinforced. At the same time, the piezoelectric field induced by compressive stresses in MCT/GaAs heterostructure is directed into the sample. It is opposite to the direction of the variband built-in electric field, and the resultant field can be canceled.
3.3. Room temperature IR detection
It is well known that thermal processes dominate at temperatures close to the room one in MCT-based devices used for middle and long wavelength IR spectral regions, and in the conventional photon detector it is impossible to accurately detect any infrared radiation other than that of high output power as in a CO2 gas laser. Conventional MCT-based photon detectors need significant cooling in order to reduce noise and leakage currents resulting from generation and recombination processes.
It has been recently suggested that Auger recombination and generation rates can be reduced using the phenomena of exclusion and extraction to produce nonequilibrium carrier distributions [19]. Photodiode HgCdTe/Si structures based on this concept were manufactured for near-room temperature operation. In addition, three types of IR photovoltaic detectors can operate at near-room temperature: photoelectromagnetic detectors, magnetoconcentration detectors, and Dember effect detectors [20]. The operation principle of these devices is based on the separation of excess carriers.
0.2
0.4
0.8
0.6
Wavelength,
m
m
S, a.u.
1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0
1.0
Fig. 2. Spectra of the photovoltaic responsitivity of the Hg0.7Cd0.3Te/Si element.
Existence of the built-in electric field in the studied herein strained MCT-based heterostructures results in the spatial separation of the nonequilibrium carriers, too. As a consequence, the possibility of the room temperature detection of the IR radiation is implemented. In particular, for MCT/Si stressed semiconductor heterostructure with piezoelectric properties. At the same time, the built-in electric field in MCT/GaAs heterostructure is very likely compensated, and we cannot detect IR radiation at room temperature.
This conclusion was confirmed experimentally elsewhere [21, 22]. It was observed that Hg0.68Cd0.32Te/CdTe/ZnTe/Si heterostructure obtained by MBE method exhibits spectral photoresponse under IR photoexcitation without electrical bias at room temperature (see Fig. 2). At the same time, spectral response of the MCT-based structures grown on GaAs substrates was insignificant.
To estimate the voltage responsivity, the prototype of MCT-based photovoltaic detector was exposed to infrared photons from a laser source (continuously operating He-Ne laser, LGN 113) with the wavelengths 0.63, 1.15 and 3.39 (m. The measured value of responsivity was from ~0.5 V/W to ~4.3 V/W at 0.5 mW laser beam power in the focal spot [21]. It was also found out that the prototype of photovoltaic detector is sensitive to CO2 laser radiation on the level of ~0.04 V/W at 1 mW laser beam power in the focal spot [22]. An element of the prototype (1x1 mm) achieves photovoltaic spectral sensitivity at the level D* = 2.6(109 (W-1cm Hz1/2) for 300 K and ((3 (m. The noise measurements were performed with the 1 Hz bandwidth.
4. Conclusions
Thus, the presence of residual stresses in HgCdTe-based heterostructures grown by MBE with intermediate buffer layers on [310]-oriented Si and GaAs substrates was demonstrated. In particular, HgCdTe/CdTe/ZnTe/GaAs structure was grown in compression stresses, whereas, for HgCdTe/CdTe/ZnTe/Si structure, the total residual stresses are tensile. It was obtained that the experimentally confirmed stress for heterostructures under the study reaches 2 to 15 MPa and is in agreement with the predicted data.
It was confirmed that for [310] oriented MCT-based structures under the anisotropic restriction of deformation, when the substrate specifies the in-plane strain of layer, the nonzero shear components of the strain tensor arise and stress induced piezoelectric polarization is generated. Existence of the built-in electric field in the studied herein strained MCT-based heterostructures observable here results in the spatial separation of the nonequilibrium carriers and the possibility of the room temperature detection of the IR radiation is realized. This conclusion is confirmed experimentally.
Acknowledgment
The authors would like to express their thanks Dr R Savkina all her critical help in the process writing this article.
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T. Ashley, C. T. Elliott, and A. T. Harker, Non-equilibrium modes of operation for infrared detectors // Infrared Phys. 26, p. 303-315 (1986).
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J. Piotrowski and A. Rogalski, Uncooled long wavelength infrared photondetectors // Infrared Physics Technology 46, p. 115-131 (2004).
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T. Kryshtab, R. Savkina, F. Sizov, A. Smirnov, M. Kladkevich, and V. Samoylov, Infrared radiation detection by a piezoelectric heterostructure at room temperature // Physica Status Solidi (c) 9, in press (2012).
22.
F.F. Sizov, A.B. Smirnov, R.K. Savkina, V.A. Deriglazov, M.V. Yakushev, Narrow-gap piezoelectric heterostructure as IR detector // Semiconductor physics, quantum electronics and photoelectronics 15, p. 65-71 (2012) (www.journal-spqeo.org.ua).
Table 2. Strain transformation parameters for MCT-based heterostructures grown with (001), (310) and (111) orientation.
The Euler's angles
Transformation matrix
Strain tensor in the new coordinate systems
OZ((((001)
______
_____
� EMBED Equation.3 ���, � EMBED Equation.3 ���
OZ((((310)
( = -18.45(,
( = -90(,
( = 0(
� EMBED Equation.3 ���
� EMBED Equation.3 ���
OZ((((111)
( = -45(,
( = -54,73(,
( = 0(
� EMBED Equation.3 ���
� EMBED Equation.3 ���
�
�
Variband layer HgCdTe
Absorber layer HgCdTe
Variband layer HgCdTe
Buffer layer CdTe, (6.3 (m
Buffer layer ZnTe, (0.05 (m
[310] Si or [013] GaAs substrate
�
Fig. 1. A cross-sectional view of the typical MBE grown HgCdTe-based heterostructure with photolithographicaly patterned contact metallization.
© 2012, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
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