Compact-sized excimer laser with two-side preionization
Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The...
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| Datum: | 2010 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Schriftenreihe: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/118566 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm². |
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