Compact-sized excimer laser with two-side preionization
Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The...
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Цитувати: | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
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irk-123456789-1185662017-05-31T03:07:44Z Compact-sized excimer laser with two-side preionization Baschenko, S.M. Marchenko, L.S. Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis height of beam in combination with low weight of laser (5 kg) allow this laser to be used in various optical schemes, where traditional, typical bulky ecximer lasers are unapplicable. Moreover, small dimensions, low weight in combination with low energy consumption (a few watts) allow them to be used in clear “field” conditions. Beside abovementioned characteristics, the designed laser differs from the traditional ones by two-side preionization that has a “spark” character near the “hot” massive electrode and the so-called “capacitive” or “barrier” one under the ground grid. This two-side preionization provides both igniting and sustaining of wider discharge thus allowing to reach beam with higher symmetry – its cross-section is 15×20 mm². 2010 Article Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. 1560-8034 PACS 42.55.Lt http://dspace.nbuv.gov.ua/handle/123456789/118566 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| language |
English |
| description |
Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm². |
| format |
Article |
| author |
Baschenko, S.M. Marchenko, L.S. |
| spellingShingle |
Baschenko, S.M. Marchenko, L.S. Compact-sized excimer laser with two-side preionization Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Baschenko, S.M. Marchenko, L.S. |
| author_sort |
Baschenko, S.M. |
| title |
Compact-sized excimer laser with two-side preionization |
| title_short |
Compact-sized excimer laser with two-side preionization |
| title_full |
Compact-sized excimer laser with two-side preionization |
| title_fullStr |
Compact-sized excimer laser with two-side preionization |
| title_full_unstemmed |
Compact-sized excimer laser with two-side preionization |
| title_sort |
compact-sized excimer laser with two-side preionization |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2010 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118566 |
| citation_txt |
Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
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Semiconductor Physics Quantum Electronics & Optoelectronics |
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AT baschenkosm compactsizedexcimerlaserwithtwosidepreionization AT marchenkols compactsizedexcimerlaserwithtwosidepreionization |
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2025-07-08T14:15:00Z |
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2025-07-08T14:15:00Z |
| _version_ |
1837088482093170688 |
| fulltext |
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2010. V. 13, N 4. P. 426-427.
PACS 42.55.Lt
Compact-sized excimer laser with two-side preionization
S.M. Baschenko, L.S. Marchenko
Institute of Physics, NAS of Ukraine, 46, prospect Nauky, 03028 Kyiv, Ukraine
E-mail: baschenk@iop.kiev.ua
Abstract. Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm2.
Keywords: excimer laser, preionization, dimension, weight.
Manuscript received 17.09.10; accepted for publication 02.12.10; published online 30.12.10.
1. Introduction
Excimer lasers possess yet unquestionable and mutchless
advantage: highest output peak power in DUV-UV
region of spectrum. But concomitant circumstance is low
laser beam quality: high divergence (milliradians) of
radiation and its wide spectrum (tens of cm-1) [1].
Besides, the very low impedance of excimer active
medium results in contracting discharge and, therefore,
the beam cross-section narrows and stretches [2]. In
addition, the latter leads to a difference in beam
divergences for X-Y axes and, as a consequence, to both
difficulties and low efficiency in practical
implementation of beam-matter interaction under
focusing. To overcome this disadvantage, excimer laser
producers were forced to design the so-called beam
“homogenizer” that is quite complex and not so cheap.
Besides, one characteristic feature more of an
excimer laser is its bulkness: large dimensions and high
weight. Even the so-called (by the producer itself)
“mini” excimer laser has dimensions 470×250×250 mm
and weight up to 38 kg (ЕХ5 by Gam Laser Inc.) or
300×260×210 mm and weight 36 kg (PSX-100 by MPB
Inc.) [3]. It is evident that there exist many fields of
investigations where these bulky devices cannot be
implemented, although in some of these fields even a
few laser pulses may be enough to obtain result due to
high sensitivity of modern photodetectors.
2. Construction and results
A common external look of the designed laser (without
any case) in front of traditional, typical one, its
construction and electrical scheme are shown in Photo 1,
Figs 1 and 2, accordingly. The dielectric tube (50 mm
outer diameter and 240 mm length) is the base of its
construction. All the electrodes – main and subsidiary –
are placed inside the tube. A high voltage pulse
generator (the so-called “invertor”) is placed closely
around the tube to minimize discharge loop inductance.
Optical elements – both adjustable aluminium mirror
and silica output window – are mounted on flanges at the
tube ends. As Fig. 1 shows, preionization occures
simultaneously from both sides. First (traditional)
preionization – “sparky” near the “hot” massive
electrode – is fulfilled by mean of additional spark
electrodes placed at 3-mm distance from the “hot”
electrode at both its sides and 15-mm distance from each
other and in the chess-board order. The length of main
electrode is 190 mm, length of discharge – 170 mm.
Second preionization – the so-called “capacitive” or
“barrier” from under “ground” grid electrode – is
© 2010, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
426
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2010. V. 13, N 4. P. 426-427.
fulfilled by mean of additional metal plate electrode
enclosed in several layers of mailar film. The length and
width of plate electrode are 170 mm and 15 mm,
accordingly. The distance between grid and plate
electrodes was adjusted experimentally and found to be
optimal and equal to 2.5…3 mm. Principles of a pulse
generator, both types of preionization action have been
widely considered in literature [e.g., 2].
Photo 1. External look of the designed laser.
1
2 2
4
3
5
6
Fig. 1. Construction of the designed laser: 1 – “hot” massive
electrode, 2 – subsidiary “spark” preionization electrodes, 3 –
“ground” grid electrode, 4 – subsidiary metal plate isolated
electrode of “barrier” preionization, 5 – volume electrical
discharge 15×20×170 mm3, 6 – dielectrical tube.
R1
R0
С0
L0
CP1
Cd CP2
SG
Fig. 2. Electrical scheme of the designed laser: SG – “spark”
gap, triggering voltage is tuned by pressure in the gap and
distance between electrodes; C0 – main storage capacitor
10 nF; L0 – discharge inductance 20 nH; R0 – charging resistor
100 k; Сd – main discharge capacitor 5 nF; Cp2 – capacitor of
“spark” preionization 2 nF; Cp1 – capacitor of “barrier”
preionization 0.5 nF; R1 – resistor of “barrier” preionization
100 k.
The charging high voltage was up to 20…23 kV,
the role of a commutator was played by a passive sparky
gap. The discharging voltage was adjusted previously by
pressure in the gap and remained changeless under
operation. For He:Xe:CCl4 gas mixture (XeCl*, 308 nm)
at the pressure 1 atm, the output energy was equal to
5 mJ. The laser beam cross-section was 15×20 mm2, the
beam divergence measured using a long-focus plane-
convex lens along X, Y-directions was 6×8 milliradians.
The maximal repetition rate reached up to 1…2 pulses
per second.
It ought to be mentioned that main efforts of
authors was directed to laser size minimization, and
electrical scheme is not optimal by its efficiency.
Optimization of the electrical curcuit and gas mixture
will be our next step in designing this laser.
References
1. A.V. Eletskiy // Uspekhi Fizicheskikh Nauk, 2(2),
p. 279-314 (1978), in Russian.
2. V.Yu. Baranov, V.M. Borisov, Yu.Yu. Stepanov,
Electro-discharge Excimer Lasers.
Energoatomizdat, Moscow, 1988 (in Russian).
3. Laser Focus World, Optoelectronics Industry
Sourcebook, 2004 Buyers Guide, PennWell Corp.,
pp. 11, 257.
© 2010, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
427
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