The forming system simulation for reactive gas ion source with decreased neutral gas inleakage
This report is devoted to research of possibility of acceleration N ions with original system of ions extraction and acceleration. The simulations of its electrode geometry for nitrogen ions acceleration are described. The parameters of its optimization for nitrogen ions acceleration are described....
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irk-123456789-1221592017-06-29T03:03:04Z The forming system simulation for reactive gas ion source with decreased neutral gas inleakage Martynenko, P.A. Низкотемпературная плазма и плазменные технологии This report is devoted to research of possibility of acceleration N ions with original system of ions extraction and acceleration. The simulations of its electrode geometry for nitrogen ions acceleration are described. The parameters of its optimization for nitrogen ions acceleration are described. Comparison of the simulation results with the experimental dates was done. Работа посвящена исследованию системы постускорения ионов азота, использованной в прикладном источнике реактивных ионов. Проведены численные расчёты геометрии электродов для получения ускоренных ионов азота. Проводится оптимизация систем ускорения-формирования источника ионов реактивных газов для использования в установке прикладного назначения. Проведено сравнение результатов расчёта с экспериментальными данными. Робота присвячена дослідженням системи постприскорення іонів азоту, що використана в прикладному джерелі реактивних іонів. Проведені обчислення геометрії електродів для отримання прискорених іонів азоту. Проводиться оптимізація системи прискорення-формування джерела іонів реактивних газів для використання в установці прикладного призначення. Проведено порівняння результатів обчислення з експериментальними даними. 2017 Article The forming system simulation for reactive gas ion source with decreased neutral gas inleakage / P.A. Martynenko // Вопросы атомной науки и техники. — 2017. — № 1. — С. 152-154. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 29.25.Ni http://dspace.nbuv.gov.ua/handle/123456789/122159 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии |
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Низкотемпературная плазма и плазменные технологии Низкотемпературная плазма и плазменные технологии Martynenko, P.A. The forming system simulation for reactive gas ion source with decreased neutral gas inleakage Вопросы атомной науки и техники |
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This report is devoted to research of possibility of acceleration N ions with original system of ions extraction and acceleration. The simulations of its electrode geometry for nitrogen ions acceleration are described. The parameters of its optimization for nitrogen ions acceleration are described. Comparison of the simulation results with the experimental dates was done. |
| format |
Article |
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Martynenko, P.A. |
| author_facet |
Martynenko, P.A. |
| author_sort |
Martynenko, P.A. |
| title |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
| title_short |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
| title_full |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
| title_fullStr |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
| title_full_unstemmed |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
| title_sort |
forming system simulation for reactive gas ion source with decreased neutral gas inleakage |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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2017 |
| topic_facet |
Низкотемпературная плазма и плазменные технологии |
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http://dspace.nbuv.gov.ua/handle/123456789/122159 |
| citation_txt |
The forming system simulation for reactive gas ion source with decreased neutral gas inleakage / P.A. Martynenko // Вопросы атомной науки и техники. — 2017. — № 1. — С. 152-154. — Бібліогр.: 5 назв. — англ. |
| series |
Вопросы атомной науки и техники |
| work_keys_str_mv |
AT martynenkopa theformingsystemsimulationforreactivegasionsourcewithdecreasedneutralgasinleakage AT martynenkopa formingsystemsimulationforreactivegasionsourcewithdecreasedneutralgasinleakage |
| first_indexed |
2025-07-08T21:16:04Z |
| last_indexed |
2025-07-08T21:16:04Z |
| _version_ |
1837114971856568320 |
| fulltext |
ISSN 1562-6016. ВАНТ. 2017. №1(107)
152 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2017, № 1. Series: Plasma Physics (23), p. 152-154.
THE FORMING SYSTEM SIMULATION FOR REACTIVE GAS ION
SOURCE WITH DECREASED NEUTRAL GAS INLEAKAGE
P.A. Martynenko
National Science Center “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine
E-mail: martynenkopetr91@gmail.com
This report is devoted to research of possibility of acceleration N ions with original system of ions extraction and
acceleration. The simulations of its electrode geometry for nitrogen ions acceleration are described. The parameters
of its optimization for nitrogen ions acceleration are described. Comparison of the simulation results with the
experimental dates was done.
PACS: 29.25.Ni
INTRODUCTION
The ions beams are used in the advanced industrial
technologies to change the form and to modify the
physical, chemical, electric and magnetic properties of
the processed products surface. An applied plant project
based on the reactive gases ion source is considered in
the work [1]. The accelerated beam properties are
described. The work describes the possibility of use for
physical research in the NSC KIPT. The experiments
with 50 keV reactive gas ion beam acceleration were
carried out at different ion source designs and described
in the literature [2]. The same forming system used for
calculation the accelerated beam properties. The purpose
of numerical settlements to check the electrode size and
place taking into account the space charge of the beam
and the breakdown voltage and to determine the optimal
voltage distribution on the ion source main electrodes in
which ion beam has required cross-size, longitudinal and
transversal velocities. There is a reasonably well
developed computer calculation code, which facilitates
and accelerates the development of the complex
geometries electronic-optical systems (EOS).
THE ELECTRON GUN MODEL
The program features a method of successive
approximations for solving the system of equations,
describing the electromagnetic field and the electron
flow. When calculating the density of the space charge is
used discrete flow model. Flow represented by a finite
number of tubes with constant current, which follows
from the continuity equation, used for each current tube.
The algorithm that simulates the transition process the
system uses to establish a self-consistent state of the
flow method relaxation of current injected into the
system. Given a current determined by the conditions at
the cathode, determined the trajectory of the particles
and the distribution of the charge density in the space
corresponding to the found particle trajectories. Given
the distribution of the charge density determined the
potential distribution. Repeating this sequence at each
step examined the transition process in the system [3].
It may be as a stationary and periodic or chaotic state
of dynamic system in the given external stationary
electric or magnetic fields [4].
COMPLEX BEHAVIOUR
Since the process of establishing a self-consistent
state step by step, it is appropriate in the method current
relaxation use difference equations relating the current
density at the (n+1)-th step with the previous n-th step.
This relationship is not linear, as for the determination of
the current density at given potential distribution use of
the law "3/2 power" with limited maximum emitting
ability of the cathode to avoid non-physical situations. In
Fig. 1, taken from work [5], the example of high
perveance electron gun calculation is given.
The program solves the problem of modeling the
electron gun with 4 microperveance at 15…20
approximations. Table contains the first 25 steps
microperveance values for different values of parameter.
It is seen that for values of the parameter less than 0.7
perveance converge to a value of 4, regardless of the
parameter setting.
Fig. 1. High perveance electron gun
ISSN 1562-6016. ВАНТ. 2017. №1(107) 153
If the value of parameter 0.7 or more, after a
transitional regime perveance oscillates between two
values, i.e. instead of steady state system demonstrates
cyclical behavior. Perveance experimental sample
electron gun coincides with the calculated accurately.
This makes it possible to hope for a good accuracy of
calculation of ion EOS, which will described hereinafter.
Perveance on the first iterations of a mapping for
different values of parameter at an accelerating voltage
of 50 kV
n/r 0.1 0.3 0.5 0.7 0.9
1 0.37 1.05 0.37 0.37 0.37
2 1.05 4.43 1.05 9.88 12.6
3 2.18 4.63 6.68 1.14 0.16
4 2.92 4.14 4.23 9.12 14.03
5 3.39 3.75 2.28 1.01 0.07
6 3.67 3.73 4.62 10.49 14.48
7 3.84 3.94 4.06 0.83 0.07
8 3.92 4.06 3.74 11.25 14.5
9 3.95 4.05 3.99 0.68 0.06
10 3.95 4 4.08 11.7 14.5
11 3.95 3.98 3.99 0.55 0.06
12 3.94 3.98 3.97 12.37 14.5
13 3.94 4 4 0.43 0.06
14 3.94 4 4 12.91 14.5
15 3.95 4 399 0.42 0.06
16 3.96 4 3.99 12.65 14.5
17 3.97 3.99 4 0.39 0.06
18 3.98 4 4 12.93 14.5
19 3.98 4 4 0.41 0.06
20 3.99 4 4 12.51 14.5
21 3.99 4 4 0.39 0.06
22 3.99 4 4 12.99 14.5
23 3.99 4 4 0.41 0.06
24 3.99 4 4 0.98 14.5
25 3.99 4 4 0.49 0.06
ION SOURCE SYSTEM
Three-electrode axially symmetric accelerating-
focusing system used for the preparation high current
ion beam with current over 10 mА and energy over
50 keV. The accelerating electrode and the focusing
electrode form should calculated many times. High
accuracy is required for the adjustment of the electrodes
to repeat the computational geometry. High potential
apply between gas discharge chamber body (the first
electrode cathode of ion source) and experiment
chamber body (the third electrode) such that the
experiment chamber grounded and ion source chamber
under high positive potential. The intermediate
electrode (the second electrode) was under negative
potential 5…10 % from full acceleration potential. Two-
potential system provides formation of accelerated ion
beam on the desired size of the target in the
experimental chamber (Fig. 2).
Fig. 2. Formation of the beam two-potential system
CONCLUSIONS
For the design and analysis of axial electro-optical
systems with thermionic cathode created "GUN"
program. This program solves the problem of the
analysis of electronic-optical systems. In the program
for given geometry and potentials of the electrodes and
the mode of emission from the cathode the charged
particle trajectories are determined.
The electrode system of ion source with a small gas
inleakage with the energies up to 50…60 keV was
calculated. With EOS analysis "GUN" program
calculated for configurations matching the ion beam
parameters at the outlet for the injection into the
working chamber. The accelerating and focusing
electrode geometry founded for reception of the beam
given parameters. It was shown opportunity
improvement quality of a flow by selection the
appropriate curvature of emitting surface. The
numerical model shows complex behavior at formation
self-consistent state the charged particles flow and can
used at study of properties complex dynamic systems
described by the large number ordinary differential
equations.
The calculation results are compared the
experimental data from the measurements with
decreased leakage ion source.
REFERENCES
1. A. Guglya, V. Drakin, A. Limar, N. Stervoedov.
Scientific Industrial Ion Implantation Plant
“MAESTRO” // ISVTE-3. 1999, v. 1, p. 91-94.
2. A.G. Lymar, P.A. Martynenko, V.A. Popov. Ion
Source of Reactive Gases with Decreased Neutral Gas
Inleakage // Problems of Atomic Science and
Technology. Series "Plasma Physics". 2005, № 2(11),
p. 173-175.
3. P.T. Kirstein, G.S. Kino, W.Е. Waters. Space-charge
flow. New York: "McGraw-Hill", 1967.
154 ISSN 1562-6016. ВАНТ. 2017. №1(107)
4. A.G. Lymar, P.A. Martynenko, N.A. Khizhniak.
Slozhnoe povedenie v modeli elektronnoy pushki s
termokatodom // Problems of Atomic Science and
Technology. Series “Plasma Electronics and New
Methods of Acceleration”. 1998, № 1(1), p. 79.
5. V.V. Belikov, A.V. Zvyagintsev, A.G. Lymar,
P.A. Martynenko, N.A. Khizhniak. Vyisokoperveansnaya
elektronnaya pushka s osevyim otverstiem i koeffitsientom
poperechnoy kompressii 100 // Problems of Atomic
Science and Technology. Series “Techniques of Physics
Experiment”. 1987, № (35), p. 58 (in Russian).
Article received 22.10.2016
ЧИСЛЕННОЕ МОДЕЛИРОВАНИЕ СИСТЕМЫ ФОРМИРОВАНИЯ ИСТОЧНИКА
РЕАКТИВНЫХ ИОНОВ С МАЛЫМ НАТЕКАНИЕМ ГАЗА
П.А. Мартыненко
Работа посвящена исследованию системы постускорения ионов азота, использованной в прикладном
источнике реактивных ионов. Проведены численные расчёты геометрии электродов для получения
ускоренных ионов азота. Проводится оптимизация систем ускорения-формирования источника ионов
реактивных газов для использования в установке прикладного назначения. Проведено сравнение
результатов расчёта с экспериментальными данными.
ЧИСЕЛЬНЕ МОДЕЛЮВАННЯ СИСТЕМИ ФОРМУВАННЯ ДЖЕРЕЛА РЕАКТИВНИХ
ІОНІВ ЗІ ЗНИЖЕНИМ НАТІКАННЯМ ГАЗУ
П.О. Мартиненко
Робота присвячена дослідженням системи постприскорення іонів азоту, що використана в прикладному
джерелі реактивних іонів. Проведені обчислення геометрії електродів для отримання прискорених іонів
азоту. Проводиться оптимізація системи прискорення-формування джерела іонів реактивних газів для
використання в установці прикладного призначення. Проведено порівняння результатів обчислення з
експериментальними даними.
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