Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

Gespeichert in:
Bibliographische Detailangaben
Datum:2010
Hauptverfasser: Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
Format: Artikel
Sprache:English
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2010
Schriftenreihe:Functional Materials
Schlagworte:
Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/135183
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-135183
record_format dspace
spelling irk-123456789-1351832018-06-15T03:04:02Z Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. Characterization and properties 2010 Article Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135183 en Functional Materials НТК «Інститут монокристалів» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Characterization and properties
Characterization and properties
spellingShingle Characterization and properties
Characterization and properties
Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
Functional Materials
format Article
author Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
author_facet Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
author_sort Zayats, M.S.
title Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_short Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_fullStr Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full_unstemmed Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_sort optical properties of aln/n-si(111) films obtained by method of hf reactive magnetron sputtering
publisher НТК «Інститут монокристалів» НАН України
publishDate 2010
topic_facet Characterization and properties
url http://dspace.nbuv.gov.ua/handle/123456789/135183
citation_txt Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.
series Functional Materials
work_keys_str_mv AT zayatsms opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT boikovg opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT gentsarpo opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT vuichykmv opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT lytvynos opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT stronskiav opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
first_indexed 2025-07-09T21:14:18Z
last_indexed 2025-07-09T21:14:18Z
_version_ 1837205474221490176
fulltext 2SWLFDO�SURSHUWLHV�RI�$O1�Q±6L������ILOPVREWDLQHG�E\�PHWKRG�RI�+)�UHDFWLYH�PDJQHWURQVSXWWHULQJ 0�6�=D\DWV��9�*�%RLNR��3�2�*HQWVDU�0�9�9XLFK\N��2�6�/\WY\Q��$�9�6WURQVNL� 9�/DVKNDU\RY�,QVWLWXWH�RI�6HPLFRQGXFWRU�3K\VLFV��1DWLRQDO�$FDGHP\�RI 6FLHQFHV�RI�8NUDLQH�����1DXNL�$YH���������.\LY��8NUDLQH 5HFHLYHG�'HFHPEHU�������� 7KH�����Ü����PP� WKLFN� $O1� ILOPV� RQ� VLOLFRQ� VLQJOH� FU\VWDO� Q±6L������ VXEVWUDWHV� ZLWK VSHFLILF� UHVLVWDQFH� ��Ü�����Ü��:�FP� KDYH� EHHQ� REWDLQHG� E\� HYDSRUDWLRQ� RI� DQ� DOXPLQLXP WDUJHW� LQ�$U�1�� �������� JDV�PL[�XVLQJ�KLJK�IUHTXHQF\�PDJQHWURQ� VSXWWHULQJ��7KH� VXUIDFHPRUSKRORJ\� DQG� RSWLFDO� SURSHUWLHV� RI� $O1�Q±6L������ ILOPV� KDYH� EHHQ� VWXGLHG� �UHIOHFWLRQ VSHFWUD�LQ����Ü����QP�UDQJH�DQG�LQ����Ü���PP�RQH���7KH�UHIUDFWLYH�LQGH[�RI�WKH�ILOPV�LQ WKH� ���Ü���� QP� ZDYHOHQJWK� UDQJH� LV� ������ 7KH� ILOPV� REWDLQHG� KDYH� EHHQ� VKRZQ� WR� EH SRO\FU\VWDOOLQH�� 7KH� GLIIHUHQFH� LQ� WKH� UHIOHFWLRQ� EDQG� DUUDQJHPHQW� EHWZHHQ� ILOPV� DQG FU\VWDO�LQ�,5�UHJLRQ�KDYH�EHHQ�H[SODLQHG�E\�WKH�SUHVHQFH�RI�PHFKDQLFDO�WHQVLOH�VWUHVVHV�DQG LQIOXHQFH�RI�KHDYLO\�GRSHG�Q±6L������VXEVWUDWHV�RQ�,5�UHIOHFWLRQ�RI�$O1�ILOPV� lË�º�ºä� m©°º}º�Ȱ�º�Óº�º� ¯ËÈ}�ÒmÓº�º� äÈ�ÓË�¯ºÓÓº�º� ¯È°¹©ãËÓÒ«� Èã äÒÓÒËmº® äÒ�ËÓÒ�m��ÈϺmº®�°ä˰Ò�$U�Ò�1���°ºº�mË�°�mËÓÓº��������¹ºã��ËÓ©�¹ºãÒ}¯Ò°�ÈããÒ�˰}Ò˹ãËÓ}Ò�$O1� �ºã�ÒÓº®�����Ü����ä}ä�ÓÈ�¹º�ãºÎ}Ȳ�ÒÏ�äºÓº}¯Ò°�ÈããÒ�˰}º�º�}¯ËäÓÒ« Q±6L������ °� ��Ëã Ó©ä� °º¹¯º�ÒmãËÓÒËä� ��y�����Ü��|ä�°ä�� j°°ãË�ºmÈÓº� 亯Áºãº�Ò � ¹º� m˯²Óº°�Ò�Ò�º¹�Ò�˰}ÒË�°mº®°�mÈ�¹ãËÓº}�$O1�Q±6L�������°¹Ë}�¯©�º�¯ÈÎËÓÒ«�m��ÒȹÈϺÓË ���Ü����Óä��°¹Ë}�¯©�º�¯ÈÎËÓÒ«�m��ÒȹÈϺÓË����Ü���ä}ä����ºã��ËÓÓºË�ÏÓÈ�ËÓÒË�¹º}È� ÏÈ�Ëã«� ¹¯ËãºäãËÓÒ«� ¹ãËÓº}� $O1�Q±6L������ m� �ÒȹÈϺÓË� �ãÒÓ� mºãÓ� ���Ü���� Óä� ¯ÈmÓº ������ cÈÏÓÒ�È� m� ¯ÈÏäË�ËÓÒÒ� ¹ºãº°©� º�¯ÈÎËÓÒ«� ¹ãËÓº}� Ò� }¯Ò°�ÈããÈ� m� jz� º­ãȰ�Ò °¹Ë}�¯È�º­�«°ÓËÓÈ�ÓÈãÒ�ÒËä�ä˲ÈÓÒ�˰}Ò²�Óȹ¯«ÎËÓÒ®�¯È°�«ÎËÓÒ«�Ò�mãÒ«ÓÒËä�°Òã � ÓºãË�Ò¯ºmÈÓÓ©²�¹º�ãºÎË}�Q±6L������ÓÈ�jz�º�¯ÈÎËÓÒ«�¹ãËÓº}�$O1� ���,QWURGXFWLRQ 7KH�ZLGHEDQG�DOXPLQXP�QLWULGH��$O1��KDV WKH�EDQGJDS�YDOXH��(J� ������H9��H[FHHGLQJFRQVLGHUDEO\� WKRVH� IRU� JHUPDQLXP�� VLOLFRQ� JDOOLXP� DUVHQLGH�� VLOLFRQ� FDUELGH�� JDOOLXP QLWULGH�DQG�VROLG�VROXWLRQV�RI�DOXPLQXP�DQG JDOOLXP� QLWULGHV�� %HVLGHV�� $O1� VKRZV� KLJK YDOXHV� RI� WKH� EUHDN�GRZQ� FULWLFDO� HOHFWULF ILHOG�� KLJK� UDGLDWLRQ� VWDELOLW\�� PHFKDQLFDO DQG� WKHUPDO� VWUHQJWK�� 7KH� GHYHORSPHQW� RI OLJKW� HPLWWLQJ� GHYLFHV� IRU� YLVLEOH� VSHFWUDO UDQJH� LV� SRVVLEOH� RQ� LWV� EDVH�� 8S� WR� QRZ� WKHUH�DUH�QR�LQWULQVLF�VXEVWUDWHV�IRU�$O1�DQG LWV� JURZWK� LV� UHDOL]HG� E\� KHWHURHSLWD[\ XVLQJ�VXEVWUDWHV�RI�RWKHU�PDWHULDOV�� LQFOXG� LQJ�VLOLFRQ�>�Ü�@�� �,Q�WKLV�ZRUN��$O1�ILOPV�ZHUH�REWDLQHG�RQ WKH� KHDYLO\� GRSHG� Q±6L������ VXEVWUDWHV� DQG WKH� LQIOXHQFH� RI� VXFK� VXEVWUDWHV� RQ� ILOP JURZWK�DQG�RSWLFDO�SURSHUWLHV��EHFDXVH�WKH�GRS� LQJ� LV� D� PHWKRG� WR� FRQWURO� D� GHYLFH� FKDUDF� WHULVWLFV��ZDV�LQYHVWLJDWHG� � ������������([SHULPHQWDO 7KH�$O1�ILOPV�ZHUH�REWDLQHG�E\�+)�PDJ� QHWURQ� VSXWWHULQJ� RI� DOXPLQXP� WDUJHW� LQ $U�1�� JDV� PL[WXUH� �������� UHVSHFWLYHO\�XVLQJ� D�PRGHUQL]HG� �&DWKRGH� �0�� LQVWDOOD� )XQFWLRQDO�0DWHULDOV�����1R��������� �������Û�67&��,QVWLWXWH�IRU�6LQJOH�&U\VWDOV� )XQFWLRQDO�PDWHULDOV������������� ��� WLRQ� �������0+]� IUHTXHQF\� ZDV� XVHG��� 7KH SUHVVXUH� YDOXH� 3ULRU� WR� WKH� SURFHVV� RQVHW� WKH� FKDPEHU� ZDV� HYDFXDWHG� GRZQ� WR �������Ü�� 3D� E\� D� 70������ RLO�IUHH� WXUER� PROHFXODU� SXPS�� 7KH� WRWDO� SUHVVXUH� LQ FKDPEHU� GXULQJ� WKH� SURFHVV� DPRXQWHG ����3D��,Q�RUGHU�WR�REWDLQ�D�PRUH�VWUXFWXUHG ILOP�� KLJK�IUHTXHQF\� GLVFKDUJH� SRZHU DPRXQWHG� DERXW� ���� :� �WDUJHW� GLDPHWHU ��� FP��� 7KH� ILOP� WKLFNQHVV� ZDV� FRQWUROOHG GXULQJ� GHSRVLWLRQ� RQWR� WKH� VXEVWUDWH� E\ GHSRVLWLRQ� UDWH� ZKLFK� DPRXQWHG� ���� WR �� QP�PLQ�� 7KH� REWDLQHG� $O1� ILOPV� ZHUH ����Ü����PP� WKLFN�� $IWHU� WKH� GHSRVLWLRQ FRPSOHWLRQ�� WKH� WKLFNQHVV� ZDV� FRQWUROOHG XVLQJ� DQ� LQWHUIHURPHWHU� �l,,����� 6LOLFRQ� RI HOHFWURQ� W\SH� Q±6L������ZLWK� WKH� UHVLVWLYLW\ RI� ��Ü�����Ü��:���FP� �HOHFWURQ� FRQFHQWUDWLRQ ���������FPÜ��� ZDV� XVHG� DV� D� VXEVWUDWH� 3ULRU� WR� WKH� ILOP�GHSRVLWLRQ��WKH�VXEVWUDWHV ZHUH� FKHPLFDOO\� HWFKHG�� &KHPLFDO� DQDO\VLV RI�ILOP�FRPSRVLWLRQ�ZHUH�SHUIRUPHG�E\�VHF� RQGDU\� LRQ� PDVV�VSHFWURPHWU\�� 7KH� VXE� VWUDWH� VXUIDFH�DQG�ILOP�PRUSKRORJ\�ZDV� LQ� YHVWLJDWHG�XVLQJ�DQ�$&0�1DQRVFRSH�,,,D�'L� PHQWLRQ�������'LJLWDO�,QVWUXPHQWV��8�6�k�� LQ� WKH�SHULRGLF� FRQWDFW�PRGH��7KH�PHDVXUH� PHQWV�ZHUH� FDUULHG� RXW� LQ� WKH� FHQWUDO� ]RQH RI� WKH� VDPSOH� XVLQJ� FRPPHUFLDO� VLOLFRQ SUREHV��17�0'7��5XVVLD��� ���([SHULPHQWDO�UHVXOWV 7KH� VXUIDFH� PRUSKRORJ\� VWXGLHV� RI Q±6L������ VXEVWUDWHV� KDYH� VKRZQ� WKDW� WKH VLOLFRQ�VXUIDFH�LV�W\SLFDO�RI�WKH�SROLVKHG�VLQ� JOH�FU\VWDO�SODWHV��7KH�VXUIDFH�RI�$O1�ILOP�LV IRUPHG�E\�VHSDUDWH�KRPRJHQHRXVO\�DUUDQJHG LVODQGV�RI����WR����QP�LQ�GLDPHWHU�DQG�IURP ��� WR� ��� KHLJKW�� UHVSHFWLYHO\��$PRQJ� WKRVH� ODUJHU� LVODQGV� FDQ� EH� VHHQ� ����� WR� ���� QP GLDPHWHU� DQG� ��� QP� DYHUDJH� KHLJKW�� DW� D GHQVLW\�XS� WR����SHU�PP���)LJ������ 7R� REWDLQ� LQIRUPDWLRQ� RQ� RSWLFDO� SURSHU� WLHV�RI�WKH�SUHSDUHG�ILOPV��WKH�UHIOHFWLRQ�VSHF� WUD�ZHUH�PHDVXUHG� LQ� WKH� ���Ü����QP� VSHF� WUDO�UDQJH��0'5����GLIIUDFWLRQ�JUDWLQJ�PRQR� FKURPDWRU�� IRU� WKH� Q±6L������ VXEVWUDWH� DQG $O1�Q±6L������ ILOP� �)LJ���D�� E��� $Q� LQWHUIHU� HQFH� SDWWHUQ� LV� REVHUYHG� IRU� WKH� UHIOHFWLRQ FXUYH�RI�$O1�Q±6L������ILOP��)LJ���D�E��FXUYH���� 7KH� ZHOO�NQRZQ� UHODWLRQV� >�@� FDQ� EH� XVHG� WR HVWLPDWH�WKH�YDOXHV�RI�RSWLFDO�SDUDPHWHUV�� PO�� ��Q��O��G�� ��� �P�����O�� ��Q��O�����G� ��� ZKHUH�P�LV�WKH�RUGHU�RI�LQWHUIHUHQFH�SDWWHUQ� O�� DQG�O���ZDYHOHQJWKV� FRUUHVSRQGLQJ� WR� WKHQHLJKERULQJ�PLQLPD�RU�PD[LPD��UHVSHFWLYHO\� G�� WKH� ILOP� WKLFNQHVV�� Q�O��� UHIUDFWLYH� LQGH[ RI�WKH�ILOP��)URP�����DQG������LW�LV�SRVVLEOH�WR REWDLQ� LQWHUUHODWLRQ� EHWZHHQ� WKH� ILOP� WKLFN� QHVV�G�DQG�UHIUDFWLYH�LQGH[�RI�WKH�ILOP�Q� G� � O����O� �ª¬Q��O�����O����Q��O��O�º¼ � ��� 1HJOHFWLQJ� WKH� UHIUDFWLYH� LQGH[� GLVSHU� VLRQ� LQ�WKH�O�� DQG�O��ZDYHOHQJWKV� LQWHUYDO�LW�LV�SRVVLEOH�WR�ZULWH Q� � O����O� �G�O����O��� ��� )LJ�����6XUIDFH�LPDJH�RI�$O1�ILOP�RQ�Q±6L������VXEVWUDWH�ZLWK�VSHFLILF�UHVLVWDQFH���Ü�����Ü��:�FP� 0�6�=D\DWV�HW�DO����2SWLFDO�SURSHUWLHV�RI���� ��� )XQFWLRQDO�PDWHULDOV������������� 7KH� UHIUDFWLYH� LQGH[� YDOXH� IRU� $O1�Q± 6L������ ILOP� LQ� WKH� ZDYHOHQJWK� UDQJH� ���Ü ����QP� �QHLJKERULQJ�PD[LPD�� REWDLQHG� DFFRUG� LQJ�WR�(T�����DQG�)LJ���E�LV�������$V�LV�VHHQ�IURP )LJ���D�� LQ�WKH�DUHD�FORVH�WR�����QP�WKH�UHIOHF� WDQFH� FRHIILFLHQW� LQFUHDVHV� �ORQJ�ZDYHOHQJWK� DE� VRUSWLRQ�HGJH�IRU�$O1�LV�QHDU�O� �����QP�� 7KH� UHIOHFWLRQ� VSHFWUD� RI� Q±6L������ VXE� VWUDWHV� �)LJ���D�� FXUYH���� DQG�$O1�Q±6L����� ILOPV� �)LJ���D�� FXUYH� ��� LQ� WKH� ���Ü��� PP UDQJH� �6SHFWUXP� %;,,� ,5� )RXULHU� VSHF� WURPHWHU�� KDYH� VKRZQ� WKDW� D� FKDUDFWHULVWLF DEVRUSWLRQ� EDQG� LV� REVHUYHG� LQ� WKH� ILOP� ,5 VSHFWUXP�ZKLFK� LV�GXH�WR�WKH�72�YLEUDWLRQV RI� WKH�$O±1� ERQGV�� 7KH� SRVLWLRQ� RI� WKH� DE� VRUSWLRQ� EDQG� PLQLPXP� FRUUHVSRQGV� WR ����FPÜ�� IUHTXHQF\� �IRU� FU\VWDOV�� WKLV� IUH� TXHQF\� LV� ���� FPÜ�� >�@��� 7KH� GLIIHUHQFH� LQ WKH�DEVRUSWLRQ�PLQLPD�IRU�WKH�JLYHQ�ILOP�LV H[SODLQHG� E\� WKH� GLVWULEXWLRQ� RI� WKH� ERQGV DQG� DQJOHV� EHWZHHQ� WKHP� FKDUDFWHULVWLF� IRU WKLV� ILOP�� SUHVHQFH� RI� PHFKDQLFDO� WHQVLOH VWUHVVHV��ODWWLFH�FRQVWDQW�RI�6L�D� �������QP DQG�$O1��D� �������QP��°� �������QP��>�@�DUH GLIIHUHQW�� WKXV�� DW� WKH� RQVHW� RI� $O1� ILOP JURZWK�RQ�WKH�Q±6L������VXEVWUDWH��PHFKDQLFDO VWUHVVHV� DW� WKH� VXEVWUDWH�ILOP� LQWHUIDFH� DULVH� ZKLFK�DUH�UHOD[HG�DV�WKH�JURZWK�SURFHHGV��DQG LQIOXHQFH� RI� WKH� KHDYLO\� GRSHG� Q±6L������ VXE� VWUDWH�RQ�WKH�,5�UHIOHFWDQFH�RI�$O1�ILOP� ,Q� WKH� VSHFWUXP� RI� Q±6L������ VXEVWUDWH� Û �)LJ���D��FXUYH�����SODVPD�IUHTXHQF\�LV�REVHUYHG �ZS� �ª¬H�1�HH�PRSW º¼ ��e���� ZKHUH� H� ������ >�@� H�� ���������Ü��)�P�� PRSW � ��P_ _�P% P%��P__ �� ZKHUH P__� �����P�� >��@�� � PA� �����P�� >��@�� ZKLFK� DPRXQWV� ���� °PÜ��� ,W� FDQ� EH� VHHQ IURP� )LJ���D�� FXUYH� ��� WKDW� WKH� UHIOHFWDQFH PLQLPXP� RI� Q±6L������ VXEVWUDWH� LV� QHDU ����FPÜ��� ,I� ZH� WDNH� VSHFLILF� UHVLVWDQFH� U HTXDO� WR� ������Ü��:���FP�� LW� LV� SRVVLEOH� WR HVWLPDWH� WKH� HOHFWURQ� PRELOLW\� PH� DV �������FP��9�F�� 7KH� SKHQRPHQRORJLFDO� SD� UDPHWHU�RI�UHIOHFWDQFH�VSHFWUXP�EURDGHQLQJ )LJ�����5HIOHFWLRQ�VSHFWUD�IRU�Q±6L������VXEVWUDWH�����DQG�$O1�Q±6L������ILOP����� )LJ�����D��)UHTXHQF\�GHSHQGHQFH�RI�UHIOHFWLRQ�IRU�Q±6L������VXEVWUDWH�����DQG�$O1�Q±6L������ILOP����� �E��GLIIHUHQFH�UHIOHFWLRQ�VSHFWUXP�RI�ILOP�DQG�VXEVWUDWH� 0�6�=D\DWV�HW�DO����2SWLFDO�SURSHUWLHV�RI���� )XQFWLRQDO�PDWHULDOV������������� ��� IRU� VXEVWUDWH� �*� �HK��PHPRSW �Ü�� >��@�� LV ���������� H9��%HFDXVH� WKH�PDLQ�PHFKDQLVP RI� WKH� IUHH� FKDUJH� FDUULHU� VFDWWHULQJ� LV� WKH VFDWWHULQJ� RQ� WKH� FKDUJHG� LPSXULWLHV�� WKHQ UHOD[DWLRQ� WLPH� WL� �WL� �K��*�� LV� ��������Ü���V�,W�LV�WR�QRWH�WKDW�UHOD[DWLRQ�WLPH�RQ�LPSXOVH�WSHVWLPDWHG� IURP� GDWD� RQ� UHIOHFWDQFH� VSHFWUXP RI�Q±6L������VXEVWUDWH��)LJ���D��FXUYH����XVLQJ WKH�'UXGH�IRUPXOD�LV�RI�WKH�VDPH�RUGHU� ,Q� )LJ���E�� WKH� GLIIHUHQFH� UHIOHFWDQFH VSHFWUXP� �5�Ü5���ZKHUH�5�� LV� UHIOHFWLRQ� RIQ±6L������� 5��� UHIOHFWLRQ� RI� $O1�Q±6L����� ILOP��� WKDW� HYLGHQFHV� WKH� SUHGRPLQDQW� FRQ� WULEXWLRQ� IURP� WKH� VXEVWUDWH� LQWR� WRWDO� UH� IOHFWLRQ� FDSDELOLW\� RI� WKH� H[WHUQDO�PHGLXP� ILOP�VXEVWUDWH�V\VWHP� ���&RQFOXVLRQV 7KXV�� WKH� LQYHVWLJDWLRQV� RI� WKH� VXUIDFH PRUSKRORJ\�DQG�RSWLFDO�SURSHUWLHV�RI�$O1�Q± 6L������ ILOPV� �UHIOHFWDQFH� VSHFWUD� LQ� ���Ü ����QP�UDQJH� DQG� LQ����Ü���PP�RQH�� KDYH VKRZQ�WKDW�REWDLQHG�ILOPV�XVLQJ�+)�PDJQH� WURQ� VSXWWHULQJ�DUH�SRO\FU\VWDOOLQH��7KH� UH� IUDFWLYH� LQGH[� RI� WKH� ILOPV� LQ� WKH� ���Ü ���� QP� ZDYHOHQJWK� UDQJH� LV� ������ 7KH� DU� UDQJHPHQW� GLIIHUHQFH� RI� UHIOHFWLRQ� EDQG EHWZHHQ� ILOPV� DQG� FU\VWDO� LQ� ,5� UHJLRQ� DUH H[SODLQHG� E\� WKH� SUHVHQFH� RI� PHFKDQLFDO WHQVLOH� VWUHVVHV� DQG� LQIOXHQFH� RI� KHDYLO\ GRSHG�Q±6L������ VXEVWUDWHV�RQ� ,5�UHIOHFWLRQ RI�$O1�ILOPV� 5HIHUHQFHV � ���3�<X��0�&DUGRQD�� )XQGDPHQWDOV� RI� 6HPLFRQ� GXFWRUV��6SULQJHU��%HUOLQ��������3�<X��0�&DU� GRQD�� 3ULQFLSOHV� RI� 6HPLFRQGXFWRU� 3K\VLFV� )L]PDWOLW��0RVFRZ��������>LQ�5XVVLDQ@� � ���$EVWU��RI��UG�5XVVLDQ�6FKRRO�RI�6FLHQWLVWV�DQG <RXQJ� 6SHFLDOLVWV� RQ� 3K\VLFV�� 0DWHULDO� 6FL� HQFH�DQG�0DQXIDFWXULQJ�7HFKQRORJ\�RI�6LOLFRQ DQG�'HYLFH�6WUXFWXUHV�%DVHG�7KHUHRQ��6LOLFRQ� 6FKRRO��������-XO\��Ü���������0,6,6��0RVFRZ ������� � ���$�$�/HEHGHY�� 9�(�&KHOQRNRY�� )L]��7HNKQ� 3ROXSURY������������������� � ���0�&�/XR�� ;�/�:DQJ�� -�0�/L� HW� DO��� -��&U\VW� *URZWK������������������ � ���+��(�&KHQJ�� 7��&�/LQ�� :��&�&KHQ�� 7KLQ� 6RO� )LOPV����������������� � ���0�$�$XJHU��/�9D]TXH]��0�-HUJHO�HW�DO���6XUI� DQG�&RDW��7HFK������Ü���������������� � ���&�+�/DL��$�&KLQ��%�)�+XQJ�HW�DO���,(((�(OHF� 'HY��/HWW��������������������� � ���7�0RVV��*�%XUUHO��%�(OOLV����6HPLFRQGXFWRU�2SWR� HOHFWURQLFV�� +DOVWHG� 3UHVV�� 1HZ� <RUN�� ������� 7�0RVV��*�%XUUHO��%�(OOLV����6HPLFRQGXFWRU�2SWR� HOHFWURQLFV��0LU��0RVFRZ��������>LQ�5XVVLDQ@� � ���9�<�'DY\GRY�� <�(�.LWDHY�� ,�1�*RQFKDUXN� HW DO���3K\V��5HY��%������������������� ����$�,�$QVHOP�� ,QWURGXFWLRQ� WR� WKH� 7KHRU\� RI 6HPLFRQGXFWRUV�� 1DXND�� 0RVFRZ� ������� >LQ 5XVVLDQ@� ����$�0�(YVWLJQHHY�� 3�$�*HQWVDU�� 6�$�*UXVKD� HW DO���)L]��7HNKQ��3ROXSURY������������������� |¹�Ò�ÓL�mãȰ�Òmº°�L�¹ãLmº}�$O1�Q±6L������º�¯ÒäÈÓÒ²�äË�º�ºä�mÒ°º}º�Ȱ�º�Óº�º�¯ËÈ}�ÒmÓº�ºäÈ�ÓË�¯ºÓÓº�º�¯ºÏ¹ÒãËÓÓ«�� l�v�~È«� ��{���rº®}º����|��ËÓ�ȯ ��l�{�{�®�Ò}�|�v��Ò�mÒÓ��|�{�v�¯ºÓ° }Ò®� lË�º�ºä� mÒ°º}º�Ȱ�º�Óº�º� ¯ËÈ}�ÒmÓº�º� äÈ�ÓË�¯ºÓÓº�º� ¯ºÏ¹ÒãËÓÓ«� Èã äLÓL¼mº� äL�ËÓL����ÈϺmL®�°�äL�L�$U�L�1���mL�¹ºmL�Óº��������º�¯ÒäÈÓº�¹ºãL}¯Ò°�ÈãL�ÓL�¹ãLm}Ò�$O1�ºm�ÒÓº �����Ü����ä}ä�ÓÈ�¹L�}ãÈ�}Ȳ�LÏ�äºÓº}¯Ò°�ÈãL�Óº�º�}¯ËäÓL �Q±6L������Ï�¹Ò�º� äÒä� º¹º¯ºä� ��y����Ü��|ä�°ä��iº°ãL�ÎËÓº�亯Áºãº�L � ¹ºm˯²ÓL� �È� º¹�Ò�ÓL� mãȰ�Òmº°�L ¹ãLmº}� $O1�Q±6L������ �°¹Ë}�¯Ò� mL�­ÒmÈÓÓ«� �� �LȹÈϺÓȲ� ���Ü���� Óä� �È� ���Ü��� ä}ä�� |�¯ÒäÈÓË� ÏÓÈ�ËÓÓ«� ¹º}ÈÏÓÒ}È� ÏÈãºäãËÓÓ«� ¹ãLmº}� $O1�Q±6L������ �� �LȹÈϺÓL� �ºmÎÒÓ ²mÒã � ���Ü���� Óä� �º¯LmÓ ¼� ������ cLÏÓÒ� � �� ¯ºÏäL�ËÓÓL� äLÓLä�ä�� °ä��Ò� mL�­ÒmÈÓÓ« ¹ãLmº}� �È� }¯Ò°�ÈãÈ� m� , � º­ãȰ�L� °¹Ë}�¯�� ¹º«°ÓËÓº� ÓÈ«mÓL°� � ä˲ÈÓL�ÓÒ²� Óȹ¯�ÎËÓ ¯ºÏ�«����È�m¹ãÒmºä�°Òã ÓºãË�ºmÈÓº��¹L�}ãÈ�}Ò�Q±6L������ÓÈ�, �mL�­ÒmÈÓÓ«�¹ãLmº}�$O1� 0�6�=D\DWV�HW�DO����2SWLFDO�SURSHUWLHV�RI���� ��� )XQFWLRQDO�PDWHULDOV�������������