Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

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Bibliographische Detailangaben
Datum:	2010
Hauptverfasser:	Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
Format:	Artikel
Sprache:	English
Veröffentlicht:	НТК «Інститут монокристалів» НАН України 2010
Schriftenreihe:	Functional Materials
Schlagworte:	Characterization and properties
Online Zugang:	http://dspace.nbuv.gov.ua/handle/123456789/135183
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Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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