Mechanism of AlN film formation at thermochemical nitridization of sapphire

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Bibliographic Details
Date:2011
Main Authors: Kaltaev, Kh.Sh.-ogly, Nizhankovskiy, S.V., Sidelnikova, N.S., Rom, M.A., Dan'ko, A.Ya., Dobrotvorskaya, M.V., Belyaev, A.Ye., Strelchuk, V.V., Kolomys, A.F.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2011
Series:Functional Materials
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135411
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Mechanism of AlN film formation at thermochemical nitridization of sapphire / Kh.Sh.-ogly Kaltaev, S.V. Nizhankovskiy, N.S. Sidelnikova, M.A. Rom, A.Ya. Dan'ko, M.V. Dobrotvorskaya, A.Ye. Belyaev, V.V. Strelchuk, A.F. Kolomys // Functional Materials. — 2011. — Т. 18, № 1. — С. 41-49. — Бібліогр.: 27 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine