Mechanism of AlN film formation at thermochemical nitridization of sapphire
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Date: | 2011 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Published: |
НТК «Інститут монокристалів» НАН України
2011
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Series: | Functional Materials |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/135411 |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Mechanism of AlN film formation at thermochemical nitridization of sapphire / Kh.Sh.-ogly Kaltaev, S.V. Nizhankovskiy, N.S. Sidelnikova, M.A. Rom, A.Ya. Dan'ko, M.V. Dobrotvorskaya, A.Ye. Belyaev, V.V. Strelchuk, A.F. Kolomys // Functional Materials. — 2011. — Т. 18, № 1. — С. 41-49. — Бібліогр.: 27 назв. — англ. |