Influence of intensive etching processes on structure and properties of carbon nitride films

The influence of electromagnetic radiation and oxygen impurity in the growth atmosphere on the growth processes of nanostructured carbon nitride CNx films has been studied. The oxygen impurity in the gas mixture and an UV irradiation has been found to decrease the thickness and refraction index of c...

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Бібліографічні деталі
Дата:2008
Автори: Shalaev, R.V., Varyukhin, V.N., Prudnikov, A.M., Linnik, A.I., Zhikharev, I.V., Belousov, N.N., Raspornya, D.V., Ulyanov, A.N.
Формат: Стаття
Мова:English
Опубліковано: НТК «Інститут монокристалів» НАН України 2008
Назва видання:Functional Materials
Теми:
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/136548
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Influence of intensive etching processes on structure and properties of carbon nitride films // R.V. Shalaev, V.N. Varyukhin, A.M. Prudnikov, A.I. Linnik, I.V. Zhikharev, N.N. Belousov, D.V. Raspornya, A.N. Ulyanov // Functional Materials. — 2008. — Т. 15, № 4. — С. 580-584. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-136548
record_format dspace
spelling irk-123456789-1365482018-06-17T03:12:28Z Influence of intensive etching processes on structure and properties of carbon nitride films Shalaev, R.V. Varyukhin, V.N. Prudnikov, A.M. Linnik, A.I. Zhikharev, I.V. Belousov, N.N. Raspornya, D.V. Ulyanov, A.N. Technology The influence of electromagnetic radiation and oxygen impurity in the growth atmosphere on the growth processes of nanostructured carbon nitride CNx films has been studied. The oxygen impurity in the gas mixture and an UV irradiation has been found to decrease the thickness and refraction index of carbon nitride films, while increasing the optical band gap width. The intensive etching processes result in the formation of closepacked columnar film nanostructures of carbon nitride. Подано результати досліджень впливу електромагнітного випромінювання і домішок кисню у ростовій атмосфері на процеси росту наноструктурних плівок нітриду вуглецю CNx. Виявлено, що домішка кисню у газовій суміші і ультрафіолетове опромінювання зменшують товщину і коефіцієнт заломлення плівок нітриду вуглецю, збільшують ширину забороненої зони. Показано, що інтенсивні процеси травлення приводять до утворення щільноупакованих колонарних плівкових наноструктур нітриду вуглецю. Представлены результаты исследований влияния электромагнитного излучения и примесей кислорода в ростовой атмосфере на процессы роста наноструктурных пленок нитрида углерода CNx. Обнаружено, что примесь кислорода в газовой смеси и УФ облучение уменьшают толщину и коэффициент преломления пленок нитрида углерода и увеличивают ширину запрещенной зоны. Интенсивные травящие процессы приводят к образованию плотноупакованных колонарных пленочных наноструктур нитрида углерода. 2008 Article Influence of intensive etching processes on structure and properties of carbon nitride films // R.V. Shalaev, V.N. Varyukhin, A.M. Prudnikov, A.I. Linnik, I.V. Zhikharev, N.N. Belousov, D.V. Raspornya, A.N. Ulyanov // Functional Materials. — 2008. — Т. 15, № 4. — С. 580-584. — Бібліогр.: 15 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/136548 en Functional Materials НТК «Інститут монокристалів» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Technology
Technology
spellingShingle Technology
Technology
Shalaev, R.V.
Varyukhin, V.N.
Prudnikov, A.M.
Linnik, A.I.
Zhikharev, I.V.
Belousov, N.N.
Raspornya, D.V.
Ulyanov, A.N.
Influence of intensive etching processes on structure and properties of carbon nitride films
Functional Materials
description The influence of electromagnetic radiation and oxygen impurity in the growth atmosphere on the growth processes of nanostructured carbon nitride CNx films has been studied. The oxygen impurity in the gas mixture and an UV irradiation has been found to decrease the thickness and refraction index of carbon nitride films, while increasing the optical band gap width. The intensive etching processes result in the formation of closepacked columnar film nanostructures of carbon nitride.
format Article
author Shalaev, R.V.
Varyukhin, V.N.
Prudnikov, A.M.
Linnik, A.I.
Zhikharev, I.V.
Belousov, N.N.
Raspornya, D.V.
Ulyanov, A.N.
author_facet Shalaev, R.V.
Varyukhin, V.N.
Prudnikov, A.M.
Linnik, A.I.
Zhikharev, I.V.
Belousov, N.N.
Raspornya, D.V.
Ulyanov, A.N.
author_sort Shalaev, R.V.
title Influence of intensive etching processes on structure and properties of carbon nitride films
title_short Influence of intensive etching processes on structure and properties of carbon nitride films
title_full Influence of intensive etching processes on structure and properties of carbon nitride films
title_fullStr Influence of intensive etching processes on structure and properties of carbon nitride films
title_full_unstemmed Influence of intensive etching processes on structure and properties of carbon nitride films
title_sort influence of intensive etching processes on structure and properties of carbon nitride films
publisher НТК «Інститут монокристалів» НАН України
publishDate 2008
topic_facet Technology
url http://dspace.nbuv.gov.ua/handle/123456789/136548
citation_txt Influence of intensive etching processes on structure and properties of carbon nitride films // R.V. Shalaev, V.N. Varyukhin, A.M. Prudnikov, A.I. Linnik, I.V. Zhikharev, N.N. Belousov, D.V. Raspornya, A.N. Ulyanov // Functional Materials. — 2008. — Т. 15, № 4. — С. 580-584. — Бібліогр.: 15 назв. — англ.
series Functional Materials
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first_indexed 2025-07-10T01:37:30Z
last_indexed 2025-07-10T01:37:30Z
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