Dynamic method of gas mixtures creation for plasma technologies

The issue of creating multicomponent gas mixtures intended for use in plasma installations is considered. A dynamic method for obtaining gas mixtures based on supercritical outflow of gases from tanks through calibrated holes. It is shown that with an appropriate choice of the volume of capacities...

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Bibliographic Details
Date:2018
Main Authors: Plankovskyy, S.I., Shypul, O.V., Zaklinskyy, S.A., Tryfonov, O.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Series:Вопросы атомной науки и техники
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/148824
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Dynamic method of gas mixtures creation for plasma technologies / S.I. Plankovskyy, O.V. Shypul, S.A. Zaklinskyy, O.V. Tryfonov // Вопросы атомной науки и техники. — 2018. — № 6. — С. 189-193. — Бібліогр.: 12 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine