The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy
Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm with Ar⁺ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and 1350 eV. With the methods of microscopy and profilometry of microrelief th...
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| Zitieren: | The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy / V.N. Bondarenko, V.G. Konovalov, S.I. Solodovchenko, A.F. Shtan′, I.V. Ryzhkov, V.S. Voitsenya, P.M. Lytvyn, O.V. Byrka, O.A. Skorik // Вопросы атомной науки и техники. — 2018. — № 6. — С. 134-136. — Бібліогр.: 5 назв. — англ. |
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irk-123456789-1488552019-02-19T01:25:14Z The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy Bondarenko, V.N. Konovalov, V.G. Solodovchenko, S.I. Shtan′, A.F. Ryzhkov, I.V. Voitsenya, V.S. Lytvyn, P.M. Byrka, O.V. Skorik, O.A. Динамика плазмы и взаимодействие плазма-стенка Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm with Ar⁺ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and 1350 eV. With the methods of microscopy and profilometry of microrelief the positive correlation was shown between the r. m. s. roughness, the power spectral density of the Fourier spectrum of the longitudinal wavelengths, on one hand, and the energy of ions, on the other hand. Чотири зразки дзеркал із нержавіючої сталі були розпилені до однакової середньої товщини еродованого шару 2 мкм іонами Ar⁺ . Кожен зразок експонувався до іонів з наступною кінетичною енергією:300, 600, 1000 і 1350 еВ. З використанням методів мікроскопії і профілометрії мікрорельєфу було показано позитивну кореляцію між середньоквадратичною шорсткістю, спектральною густиною потужності спектра Фур'є поздовжніх довжин хвиль з одного боку, та енергією іонів з іншого боку Четыре образца зеркал из нержавеющей стали были распылены до одинаковой средней толщины эродированного слоя 2 мкм ионами Ar⁺ . Каждый образец экспонировался к ионам со следующей кинетической энергией: 300, 600, 1000 и 1350 эВ. С использованием методов микроскопии и профилометрии микрорельефа была показана положительная корреляция между среднеквадратичной шероховатостью, спектральной плотностью мощности спектра Фурье продольных длин волн с одной стороны, и энергией ионов с другой стороны. 2018 Article The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy / V.N. Bondarenko, V.G. Konovalov, S.I. Solodovchenko, A.F. Shtan′, I.V. Ryzhkov, V.S. Voitsenya, P.M. Lytvyn, O.V. Byrka, O.A. Skorik // Вопросы атомной науки и техники. — 2018. — № 6. — С. 134-136. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 52.40.Hf; 79.20.Rf; 81.40.Tv http://dspace.nbuv.gov.ua/handle/123456789/148855 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Динамика плазмы и взаимодействие плазма-стенка Динамика плазмы и взаимодействие плазма-стенка |
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Динамика плазмы и взаимодействие плазма-стенка Динамика плазмы и взаимодействие плазма-стенка Bondarenko, V.N. Konovalov, V.G. Solodovchenko, S.I. Shtan′, A.F. Ryzhkov, I.V. Voitsenya, V.S. Lytvyn, P.M. Byrka, O.V. Skorik, O.A. The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy Вопросы атомной науки и техники |
| description |
Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm
with Ar⁺
ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and
1350 eV. With the methods of microscopy and profilometry of microrelief the positive correlation was shown
between the r. m. s. roughness, the power spectral density of the Fourier spectrum of the longitudinal wavelengths,
on one hand, and the energy of ions, on the other hand. |
| format |
Article |
| author |
Bondarenko, V.N. Konovalov, V.G. Solodovchenko, S.I. Shtan′, A.F. Ryzhkov, I.V. Voitsenya, V.S. Lytvyn, P.M. Byrka, O.V. Skorik, O.A. |
| author_facet |
Bondarenko, V.N. Konovalov, V.G. Solodovchenko, S.I. Shtan′, A.F. Ryzhkov, I.V. Voitsenya, V.S. Lytvyn, P.M. Byrka, O.V. Skorik, O.A. |
| author_sort |
Bondarenko, V.N. |
| title |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy |
| title_short |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy |
| title_full |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy |
| title_fullStr |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy |
| title_full_unstemmed |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy |
| title_sort |
microrelief studies of stainless steel mirrors sputtered with ar⁺ ions of different energy |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2018 |
| topic_facet |
Динамика плазмы и взаимодействие плазма-стенка |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/148855 |
| citation_txt |
The microrelief studies of stainless steel mirrors sputtered with Ar⁺ ions of different energy / V.N. Bondarenko, V.G. Konovalov, S.I. Solodovchenko, A.F. Shtan′, I.V. Ryzhkov, V.S. Voitsenya, P.M. Lytvyn, O.V. Byrka, O.A. Skorik // Вопросы атомной науки и техники. — 2018. — № 6. — С. 134-136. — Бібліогр.: 5 назв. — англ. |
| series |
Вопросы атомной науки и техники |
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ISSN 1562-6016. ВАНТ. 2018. №6(118)
134 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2018, № 6. Series: Plasma Physics (118), p. 134-136.
THE MICRORELIEF STUDIES OF STAINLESS STEEL MIRRORS
SPUTTERED WITH Ar+ IONS OF DIFFERENT ENERGY
V.N. Bondarenko, V.G. Konovalov, S.I. Solodovchenko, A.F. Shtan′, I.V. Ryzhkov,
V.S. Voitsenya, P.M. Lytvyn1, O.V. Byrka, O.A. Skorik
National Science Center “Kharkov Institute of Physics and Technology”,
Institute of Plasma Physics, Kharkiv, Ukraine;
1V. Lashkaryov Institute of Semiconductor Physics of NASU, Kyiv, Ukraine
E-mail: vnbondarenko65@kipt.kharkov.ua
Four stainless steel mirror specimens were sputtered to an identical mean thickness of the eroded layer 2 μm
with Ar+ ions. Each specimen was exposed to ions with one kinetic energy from the followings: 300, 600, 1000, and
1350 eV. With the methods of microscopy and profilometry of microrelief the positive correlation was shown
between the r. m. s. roughness, the power spectral density of the Fourier spectrum of the longitudinal wavelengths,
on one hand, and the energy of ions, on the other hand.
PACS: 52.40.Hf; 79.20.Rf; 81.40.Tv
INTRODUCTION
In the conditions of sputtering the polycrystalline
stainless steel mirror specimens with ions, the optical
reflectance degradation increases with ion energy
increasing [1, 2]. If the mean thickness of the eroded
layer on several specimens, measured by the weight
loss, is identical, it is clear that reflectance degradation
is the result of the rise of the surface roughness. The
roughness grows for the reason of the increase of the
difference between sputtering rates of grains with
different orientation when ion energy is increasing in
the experiment.
In this study, we analyzed the surface irregularity
parameters, such as root mean square (r. m. s.)
roughness and the longitudinal wavelength on the
surface of stainless steel mirror specimens after
sputtering with Ar+ ions of the different energy.
1. EXPERIMENTS ON SPUTTERING AND
METHODS OF MICRORELIEF STUDY
Before the start of sputtering procedures, the
specimens were polished to obtain the surface with
minimal irregularities. Each of identical specimens
denoted as S1, S2, S3, and S4 was exposed to
monoenergetic Ar+ ions accelerated to the kinetic
energy E0 = 300, 600, 1000, and 1350 eV, respectively.
As an ion source, the Ar plasma in a DSM-2 stand was
used [3]. The mean sputtered thickness of each
specimen was chosen to be equal to 2 μm for the correct
comparison of irregularity parameters of the specimens.
As a result of sputtering, the microrelief appeared on
each specimen. Two methods to proceed the data on
microrelief heights were applied: 1) optical microscopy
supplemented by atomic force microscopy (AFM), and
2) profilometry to obtain a profile of the microrelief of
the surface.
For each specimen, the optical microscopy was used
to produce a microphotograph with a size of
480 × 280 μm, Fig. 1.
Fig. 1. The microphotographs of the specimens:
a) S1, b) S2, c) S3, and d) S4
ISSN 1562-6016. ВАНТ. 2018. №6(118) 135
Each microphotograph consists of 1500 × 875 pixels
of a gray color with different brightness. Each pixel was
transformed into a cell of a matrix, containing pixel
brightness B. The brightness was recalculated into a
height h of the microrelief in arbitrary units (0 ≤ h ≤ 1),
assuming direct proportionality of h and B. The optical
microscopy provided the measurements in the arbitrary
units only. Therefore, for each specimen the matrix data
was recalculated in μm, according to the measured data
of the profilometry and AFM.
A trajectory of the measurement of microrelief
height was a rectangular serpentine path with a total
length of 18.7 mm.
The sizes of AFM microphotographs were
50 × 50 μm. The AFM provided the highest spatial
resolution in this study, with a total sampling length of
2 mm. The profilometry of relief heights was used along
a straight segment 4 mm in length, on each sample. The
samplings of the relief shape from an optical
microscope, AFM and a profilometer were considered
as the basic initial data.
2. RESULTS OF STATISTICAL ANALYSIS
As is clear from the microphotographs in Fig. 1, the
relief developed as a result of sputtering procedures
depends strongly on the ion energy. When increasing
the energy E0 of Ar+ ions, the surface relief becomes
more and more noticeable, as is seen by eye. On the S1
specimen surface, the irregularities are almost not seen.
The surface of the S4 specimen is characterized by а
wide variety of reliefs: micropores, microneedles and
etching pits that can be clearly distinguished. This kind
of the surface features was found only for the energy
E0 = 1350 eV of Ar+ ions and was not observed on
specimens S1 – S3.
The statistical distributions of irregularity heights for
the specimens, ΔN/Δh were computed (Fig. 2), based on
these measurements.
Fig. 2. The distributions of irregularity heights ΔN/Δh.
The S1 specimen ordinate is reduced by three times
for clarity of comparison
Here ΔN indicates a number of heights located in the
k-th interval, hk ± Δh, where k = 1…114, Δh = 0.02 μm,
according to the standards [4]. The diagrams are
moderately asymmetric, and have, approximately, a
Gaussian shape. With increasing the ion energy, the
width of the diagrams becomes larger and the height
decreases.
For each specimen, a roughness parameter Rq (that
is, r. m. s. height of irregularities) and a mean period Sm
of longitudinal waves of the irregularities were
calculated, following a procedure described in [5].
The roughness parameter Rq correlates positively with
the energy of ions E0 and takes the values 0.02, 0.16, 0.27
and 0.35 μm, as is shown in Fig. 3. The Rq value
increases significantly, by 75 % relative to its average
value calculated on the base of these four values.
Fig. 3. The dependence of the roughness parameter Rq
and the mean period Sm of longitudinal waves
on the ion energy
The wavelength distributions ΔN/ΔΛ depend on the
wavelength Λ for the different ion energies and are
close to each other, excluding the short-wavelength
region, Λ ≤ 18 μm. Here ΔN is a number of wavelengths
in the k-th interval of wavelengths, Λk ± ΔΛ, where
k = 1…20, ΔΛ = 3 μm.
At the same time, the mean period Sm of longitudinal
waves changes similar to a sinusoid half, in the range of
about 11…15 μm, taking the values of 11.7, 14.6, 14.5,
and 12.1 μm (see Fig. 3). The Sm changes in the
amplitude slowly, by ~10 % relative to its average
value. The average longitudinal size of surface
irregularities, as is seen from the value of the Sm period,
almost does not depend on the ion energy. The
longitudinal dimensions of grains visible by eye in the
microphotographs depend on the ion energy also
insignificantly.
It should be noted that the power spectral density
function PSD (Λ) provides here more reasonable
dependence on the wavelength Λ than the distributions
ΔN/ΔΛ. The PSD (Λ) is shown in Fig. 4 after
smoothing.
Fig. 4. The power spectral density function PSD (Λ)
increases and shifts to the short-wavelength range with
increasing the ion energy
136 ISSN 1562-6016. ВАНТ. 2018. №6(118)
The function PSD (Λ) was found on the basis of the
Fourier spectrum of height samplings.
The PSD functions of the specimens increase in the
amplitude and shift toward a short-wavelength region
noticeably with increasing the ion energy.
The PSD (Λ, S1) function is the lowest one. The
PSD (Λ, S4) function is substantially higher, especially
in its short-wave part, Λ ≤ 12 μm. This part corresponds
to micro-pores and micro-needles that appeared on the
specimen S4 that was sputtered with ions of energy
E0 = 1350 eV. The micro-objects are clearly visible in
(see Fig. 1,d) but are not visible in the distributions
ΔN/ΔΛ. This is due to the fact that waves of low
amplitude, located near the middle line of the
microrelief profile and intersecting this line, are taken
into account in the distribution ΔN/ΔΛ. But such low
waves located on the prominent or the lowest surfaces
of grains are not taken into account in the distributions
since such waves do not intersect the middle line.
CONCLUSIONS
The surface irregularity parameters, such as r.m.s.
roughness and the longitudinal wavelength on the
surfaces of four polycrystalline stainless steel mirror
specimens were analyzed, using the samplings of
heights measured by the optical microscopy, AFM, and
profilometry. The specimens were sputtered with Ar+
ions in the DSM-2 stand with plasma, each specimen
with one energy from the followings: 300, 600, 1000,
and 1350 eV. The mean sputtered thickness was taken
to be 2 μm, identical for all specimens.
It was shown that with increasing the energy E0 of
ions:
– The irregularity heights, as seen in the height
distributions ΔN/Δh, increased noticeably, and the
roughness parameter Rq increased significantly, by 75 %
relative to its average value.
– On the contrary, the longitudinal wavelength
distributions ΔN/ΔΛ are close to each other, excluding
the short-wavelength range. And the mean period Sm of
a longitudinal wavelength changes in the amplitude not
so noticeably, by ~10 % relative to its average value. In
other words, the average longitudinal size of surface
irregularities almost does not depend on the ion energy.
At the same time, the longitudinal dimensions of the
grains depend on the ion energy insignificantly.
– The power spectral density PSD (Λ), built on the basis
of Fourier transform, increases and shifts to a short-
wavelength region. In contrast to ΔN/ΔΛ distributions,
the PSD functions depend on the ion energy noticeably.
In prospect, the developed methods and obtained
results can be considered for mirror specimens made of
other kinds of metal.
REFERENCES
1. A.F. Bardamid et al. // Vacuum. 2000, v. 58, p. 10.
2. V.G. Konovalov et al. // Problems of Atomic Science
and Technology. Ser. “Plasma Physics” (18). 2012,
№ 6, p. 114.
3. A.F. Bardamid et al. // Surface and Coatings
Technology. 1998, v. 103-104, p. 365.
4. An American national standard ASME B46.1-1995,
Surface Texture (Surface Roughness, Waviness, and
Lay). The American Society of Mechanical Engineers,
New York, USA, 1996.
5. V.S. Voitsenya et al. // Nuclear Instruments and
Methods in Physics Research, Section B. 2013, v. 302,
p. 32.
Article received 20.10.2018
ИССЛЕДОВАНИЯ МИКРОРЕЛЬЕФА ЗЕРКАЛ ИЗ НЕРЖАВЕЮЩЕЙ СТАЛИ, РАСПЫЛЕННЫХ
ИОНАМИ Ar+ РАЗНОЙ ЭНЕРГИИ
В.Н. Бондаренко, В.Г. Коновалов, С.И. Солодовченко, А.Ф. Штань, И.В. Рыжков, В.С. Войценя,
П.М. Литвин, О.В. Бырка, O.A. Скорик
Четыре образца зеркал из нержавеющей стали были распылены до одинаковой средней толщины
эродированного слоя 2 мкм ионами Ar+. Каждый образец экспонировался к ионам со следующей
кинетической энергией: 300, 600, 1000 и 1350 эВ. С использованием методов микроскопии и профилометрии
микрорельефа была показана положительная корреляция между среднеквадратичной шероховатостью,
спектральной плотностью мощности спектра Фурье продольных длин волн с одной стороны, и энергией
ионов с другой стороны.
ДОСЛІДЖЕННЯ МІКРОРЕЛЬЄФУ ДЗЕРКАЛ З НЕРЖАВІЮЧОЇ СТАЛІ, РОЗПИЛЕНИХ ІОНАМИ
Ar+ РІЗНОЇ ЕНЕРГІЇ
В.М. Бондаренко, В.Г. Коновалов, С.І. Солодовченко, А.Ф. Штань, І.В. Рижков, В.С. Войценя,
П.М. Литвин, О.В. Бирка, O.О. Скорик
Чотири зразки дзеркал із нержавіючої сталі були розпилені до однакової середньої товщини еродованого
шару 2 мкм іонами Ar+. Кожен зразок експонувався до іонів з наступною кінетичною енергією:300, 600,
1000 і 1350 еВ. З використанням методів мікроскопії і профілометрії мікрорельєфу було показано позитивну
кореляцію між середньоквадратичною шорсткістю, спектральною густиною потужності спектра Фур'є
поздовжніх довжин хвиль з одного боку, та енергією іонів з іншого боку.
|