Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge
The paper presents measurements of the electron temperature and plasma concentration in both stationary and pulsed operation modes of a longitudinal planar MDC with a magnetically insulated anode in stationary and highcurrent pulsed operation modes with a high-voltage impulse voltage addition. The...
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| Date: | 2018 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/149062 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge / А.G. Chunadra, К.N. Sereda, I.K. Tarasov // Вопросы атомной науки и техники. — 2018. — № 6. — С. 252-254. — Бібліогр.: 4 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | The paper presents measurements of the electron temperature and plasma concentration in both stationary and
pulsed operation modes of a longitudinal planar MDC with a magnetically insulated anode in stationary and highcurrent pulsed operation modes with a high-voltage impulse voltage addition. The measurements were carried out
according to the standard procedure for Langmuir double probes. The obtained volt-ampere characteristics of a
double probe show that the electron temperature increases by a factor of two in the pulsed mode of operation of the
magnetron in comparison with the steady-state regime, and the density of the pulsed plasma increases by three
orders of magnitude. |
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