Development of anti-reflecting surfaces based on Si micropyramids and wet-chemically etched Si nanowire arrays

In this paper experimental results on study of optical properties of Si wafers with surface textures in form of Si random pyramids, Si nanowire arrays, and pyramidal Si combined with Si nanowire arrays are presented. It is shown that the use of the metal-assisted chemical etching method allows to fa...

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Datum:2018
Hauptverfasser: Druzhinin, A.A., Yerokhov, V.Y., Nichkalo, S.I., Ostapiv, O.Y.
Format: Artikel
Sprache:English
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2018
Schriftenreihe:Functional Materials
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Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/157185
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Development of anti-reflecting surfaces based on Si micropyramids and wet-chemically etched Si nanowire arrays / A.A. Druzhinin, V.Y. Yerokhov, S.I. Nichkalo, O.Y. Ostapiv // Functional Materials. — 2018. — Т. 25, № 4. — С. 675-680. — Бібліогр.: 44 назв. — англ.

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