Discharge characteristics of combined low energy ion source – magnetron sputtering system
The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude and topology of magnetic field have been researched both for autonomous operati...
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| Date: | 2020 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194668 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Discharge characteristics of combined low energy ion source – magnetron sputtering system / A. Zykov, N. Yefymenko, S. Dudin, S. Yakovin // Problems of atomic science and tecnology. — 2020. — № 6. — С. 169-173. — Бібліогр.: 10 назв. — англ. |