Structure of polycrystalline diamond coatings deposited by СVD method in the plasma of glow discharge with the use of pulse power supply
The structure of CVD carbon coatings synthesized in a hydrogen-methane mixture in the plasma of a glow discharge stabilized by a magnetic field using a pulsed power supply was studied by X-ray diffraction analysis and optical microscopy. The range of deposition parameters is determined, which ensure...
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| Date: | 2021 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2021
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194957 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure of polycrystalline diamond coatings deposited by СVD method in the plasma of glow discharge with the use of pulse power supply / K.I. Koshevoy, Yu.Ya. Volkov, V.E. Strel’nitskij, E.N. Reshetnyak // Problems of Atomic Science and Technology. — 2021. — № 2. — С. 113-118. — Бібліогр.: 22 назв. — англ. |