Ion source of reactive gases with decreased neutral gas inleakage
Ion source with an original system of ions extraction from the discharge chamber, allowing more then on order of magnitude reducing of neutral gas incoming to the chamber of ion beam acceleration and use is described. The parameters of a received beam of nitrogen ions and possible variants of the so...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2005
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| Цитувати: | Ion source of reactive gases with decreased neutral gas inleakage / А.G. Lymar, P.А. Mаrtynenko, V.А. Pоpоv // Вопросы атомной науки и техники. — 2005. — № 2. — С. 173-175. — Бібліогр.: 4 назв. — англ. |
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irk-123456789-797782018-03-21T12:53:42Z Ion source of reactive gases with decreased neutral gas inleakage Lymar, A.G. Martynenko, P.A. Pоpоv, V.A. Low temperature plasma and plasma technologies Ion source with an original system of ions extraction from the discharge chamber, allowing more then on order of magnitude reducing of neutral gas incoming to the chamber of ion beam acceleration and use is described. The parameters of a received beam of nitrogen ions and possible variants of the source application have been given. Описано іонне джерело із оригінальною системою добування іонів з розрядної камери, що дозволяє більш ніж на порядок знизити надходження нейтрального газу в камеру прискорення і використання іонного пучка. Приведені параметри отриманих пучків іонів азоту та можливі варіанти застосування таких джерел. Описан ионный источник с оригинальной системой извлечения ионов из разрядной камеры, позволяющей более чем на порядок снизить натекание нейтрального газа в камеру ускорения и использования ионного пучка. Приведены параметры получаемых пучков ионов азота и возможные варианты применения таких источников. 2005 Article Ion source of reactive gases with decreased neutral gas inleakage / А.G. Lymar, P.А. Mаrtynenko, V.А. Pоpоv // Вопросы атомной науки и техники. — 2005. — № 2. — С. 173-175. — Бібліогр.: 4 назв. — англ. 1562-6016 PACS: 29.25.Ni http://dspace.nbuv.gov.ua/handle/123456789/79778 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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English |
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Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies |
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Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies Lymar, A.G. Martynenko, P.A. Pоpоv, V.A. Ion source of reactive gases with decreased neutral gas inleakage Вопросы атомной науки и техники |
| description |
Ion source with an original system of ions extraction from the discharge chamber, allowing more then on order of magnitude reducing of neutral gas incoming to the chamber of ion beam acceleration and use is described. The parameters of a received beam of nitrogen ions and possible variants of the source application have been given. |
| format |
Article |
| author |
Lymar, A.G. Martynenko, P.A. Pоpоv, V.A. |
| author_facet |
Lymar, A.G. Martynenko, P.A. Pоpоv, V.A. |
| author_sort |
Lymar, A.G. |
| title |
Ion source of reactive gases with decreased neutral gas inleakage |
| title_short |
Ion source of reactive gases with decreased neutral gas inleakage |
| title_full |
Ion source of reactive gases with decreased neutral gas inleakage |
| title_fullStr |
Ion source of reactive gases with decreased neutral gas inleakage |
| title_full_unstemmed |
Ion source of reactive gases with decreased neutral gas inleakage |
| title_sort |
ion source of reactive gases with decreased neutral gas inleakage |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2005 |
| topic_facet |
Low temperature plasma and plasma technologies |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/79778 |
| citation_txt |
Ion source of reactive gases with decreased neutral gas inleakage / А.G. Lymar, P.А. Mаrtynenko, V.А. Pоpоv // Вопросы атомной науки и техники. — 2005. — № 2. — С. 173-175. — Бібліогр.: 4 назв. — англ. |
| series |
Вопросы атомной науки и техники |
| work_keys_str_mv |
AT lymarag ionsourceofreactivegaseswithdecreasedneutralgasinleakage AT martynenkopa ionsourceofreactivegaseswithdecreasedneutralgasinleakage AT popovva ionsourceofreactivegaseswithdecreasedneutralgasinleakage |
| first_indexed |
2025-07-06T03:45:40Z |
| last_indexed |
2025-07-06T03:45:40Z |
| _version_ |
1836867692334678016 |
| fulltext |
ION SOURCE OF REACTIVE GASES WITH DECREASED
NEUTRAL GAS INLEAKAGE
А.G. Lymar, P.А. Маrtynenko, V.А. Pоpоv
Institute of Plasma Electronics and New Methods of Acceleration,
NSC KIPT, Kharkov, Ukraine, e-mail: lymar@kipt.kharkov.ua
Ion source with an original system of ions extraction from the discharge chamber, allowing more then on order of
magnitude reducing of neutral gas incoming to the chamber of ion beam acceleration and use is described. The
parameters of a received beam of nitrogen ions and possible variants of the source application have been given.
PACS: 29.25.Ni
One of problems of obtaining and using high current
beams of charged particles extracted from the discharge
plasma is the large amount of neutral gas incoming from
the gas discharge chamber into space of particle
acceleration and application.
To decrease neutral gas incoming from the discharge
chamber it is possible to use difference in the behavior of
neutral and charged particles in the electrical field. The
electrical field influences on the charged particles
movement only.
Fig.1a shows the typical scheme of ion extraction
from the discharge region through the hole in the cathode
on an example of the hollow cathode discharge. The
plasma area is shaded, by the light interval between the
plasma and chamber wall is schematically shown the
cathode fall layer, which electrical field accelerates ions
towards the wall.
Fig.1b shows the offered scheme of ion extraction
from the discharge chamber.
Problems of Atomic Science and Technology. Series: Plasma Physics (11). 2005. № 2. P. 173-175 173
mailto:lymar@kipt.kharkov.ua
Fig. 1: 1 – cathode; 2 – anode; 3 – generated plasma; 4 – hole, through which ions and neutral gas incoming into the
area of acceleration and application of ions; 5 – accelerating electrode; 6 – sphere segment shaped grid
The unique difference from the scheme, shown in Fig.1a,
is the presence of the grid of the sphere segment shape
between the area occupied by the plasma and the output
hole located so that the sphere center is on the
symmetrical axis of the system in plane of output hole.
In this scheme ions in the boundary between the
plasma and the grid are accelerated by the layer potential
difference in the direction to the hole. In the ideal case of
all ions, accelerated by the layer potential difference,
passing through the output hole, the incoming decrease
equals to the plasma contact area with the grid and output
hole area ratio. Really such an ideal picture may occur
only in case of small ion beam currents, when the ion
beam volume charge cannot appreciably influence on
their trajectories. The ion beam volume charge may result
in beam swelling and loosing part of ion beam on the face
wall near the output hole. As a rule, when the ion beam
passes the drift space free from external electrical fields
its volume charge compensation by electrons occurs,
therefore only the experiment may answer, what ion beam
part does not pass through the output hole due to the
volume charge or any other cause.
As possible variants of plasma generation in a
discharge chamber next methods, described in literature,
have been tested:
− Discharge chamber with a cold hollow cathode and
extraction system with one grid without and with the
magnetic multipole system of constant polarity [1,2];
− Plasma generation by Penning discharge [3].
The plasma generation method should satisfy to the
following requirements: plasma generation of given
density with the minimal gas incoming into the discharge
chamber; simplicity of realization; possibility of ion
reactive gas generation.
Results of researches in case of Penning discharge are
given below. This variant of plasma generation turned out
the best one. Gas incoming here is rather less than in case
of discharge with the hollow cathode and there are no
problems with discharge ignition. The ion source scheme
is presented in Figure 2. Electrodes 1, 2 (stainless still
wire grid) and 4 are the cathodes and electrode 3 is the
discharge anode. The potential applied to the electrode 4
differed from the potential of electrodes 1 and 2 allows to
improve to some extent the accelerated ion current
homogeneity at the collector.
Fig.2. Penning’s ion source scheme: 1, 2 and 4 – cathode electrodes (2 – grid); 3 – anode; 5 – tube for gas incoming;
6 – magnetic solenoid; 7 – intermediate accelerating electrode being under the potential versus the ground;
8 – grounded electrode
The ion accelerating and forming system is the three
electrodes, axial-symmetric one. For decreasing of the
back electron flux from the ion drift space, inducing
parasitic loading of high voltage source, emission
electrode heating, appearance of X-ray radiation (the last
two effects may induce breakdowns in the accelerating
gap) the negative potential which is 5...10% of
accelerating one is applied to the intermediate electrode 7.
The electrode 8 is grounded. The geometry of
174
accelerating and forming electrodes has been chosen in
accordance with recommendations given in the work [4].
The ion source is joined to the 500 mm diameter
chamber of 500 mm length.
To measure the ion beam profile in the chamber, two
normal each other lines of Faraday cups (8 in every line)
are placed symmetrically versus chamber axis. These
lines are fastened on the copper cooled by water disc of
245 mm in diameter and thickness of 2 mm. There is the
orifice in the copper disc through that the central part of
ion beam passes to an analyzer.
The high vacuum pump with the water jalousie trap
has the speed of pumping about 500 l/s. As an operating
liquid in it the polyphenil ethier of N-PFE mark is used.
The typical ion source parameters for which the
current near the maximum is generated are given below.
Operating mode Continuous
Kind of ions generated Nitrogen ions
Ion energy (keV) 50
Ion current (mA) 25
Discharge voltage (V) 700
Discharge current (A) 0.4
Magnetic field in discharge (Tl) 0.02
Pressure in ion drift space (mPa) 8
Gas input (m3mPa/s) 4
For the diameter of the output hole 12 mm and
accelerating voltage of 50 kV the maximal accelerated ion
current is 25 mA. During movement in the drift space
such beam increases its diameter approximately linearly
to the distance passed. At a distance of 725 mm from the
output hole the beam diameter is approximately equal
250mm. The ion current density homogeneity is not
worse than 5% inside the circle of 200 mm in diameter.
The spectrum of the accelerated ions is shown in Fig.3.
Fig.3. Dependence of ion current on the output of the
magnetic mass analyzer on the current of winding of the
deflected electromagnet
For the accelerated current more than 30 mA melting
in the central part of the stainless still grid occurs, induced
most likely by electrons, which are formed in the
accelerating gap and move towards ions.
Estimations show that in our case the proposed ion
extraction scheme reduces neutral gas incoming from the
discharge chamber approximately in one order of value.
Such sources may be used in ion implanters and
devices for ion beam assisted film deposition. for
generating high current ion beams with energy less than
hundred of keV ( reducing gas incoming probably will
allow to increase energy of received ions in the case of
gas pumping through the accelerating tube). They also
can be used as injectors for high current linear
accelerators.
Authors gratefully acknowledge to doctor
А.G. Guglya for the financial support of researches
carried out.
REFERENCES
1. A.I. Stognij, V.A. Nikitinskij, B.I. Zhuravlev // JTPh.
1988, №3, p.993-995 (in Russian).
2. A.I. Stognij, A.I. Demchenko, A.I. Dubovik,
A.I.Zelenko, S.N. Mosyagin // PTE. 1990, №5,
p.42-44 (in Russian).
3. M.D. Gabovich, N.V. Pleshivtsev, N.N. Semashko.
Ion and atom beams for controlled nuclear fusion and
technological purposes. М.: “Energoizdat”, 1986 (in
Russian).
4. N.S.Cooper, K.N. Berker, R.V. Pile // Nuclear
Fusion. 1972, №12 p.263.
ИСТОЧНИК ИОНОВ РЕАКТИВНЫХ ГАЗОВ С ПОНИЖЕННЫМ
НАТЕКАНИЕМ НЕЙТРАЛЬНОГО ГАЗА
175
А.Г. Лымарь, П.А. Мартыненко, В.А. Попов
Описан ионный источник с оригинальной системой извлечения ионов из разрядной камеры, позволяющей
более чем на порядок снизить натекание нейтрального газа в камеру ускорения и использования ионного пучка.
Приведены параметры получаемых пучков ионов азота и возможные варианты применения таких источников.
ДЖЕРЕЛО ІОНІВ РЕАКТИВНИХ ГАЗІВ ІЗ ЗНИЖЕНИМ
НАТІКАННЯМ НЕЙТРАЛЬНОГО ГАЗУ
А.Г. Лимар, П.А. Мартиненко, В.А. Попов
Описано іонне джерело із оригінальною системою добування іонів з розрядної камери, що дозволяє більш
ніж на порядок знизити надходження нейтрального газу в камеру прискорення і використання іонного пучка.
Приведені параметри отриманих пучків іонів азоту та можливі варіанти застосування таких джерел.
176
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