Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source
In a present activity the experimental results on application of metallic coating onto inner parts of various tools are presented. Plasma was generated by means of HF- source with low external magnetic field. The main characteristics of coatings dependent on operating conditions were investigated.
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| Zitieren: | Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source / V.V. Gasilin, Yu.N. Nezovibat’ko, G.S. Poklipach, V.S. Taran, O.M. Shvets // Вопросы атомной науки и техники. — 2005. — № 2. — С. 176-178. — Бібліогр.: 4 назв. — англ. |
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irk-123456789-797802015-04-05T03:02:31Z Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source Gasilin, V.V. Nezovibat’ko, Yu.N. Poklipach, G.S. Taran, V.S. Shvets, O.M. Low temperature plasma and plasma technologies In a present activity the experimental results on application of metallic coating onto inner parts of various tools are presented. Plasma was generated by means of HF- source with low external magnetic field. The main characteristics of coatings dependent on operating conditions were investigated. Надані результати металевого нанесення покриття на внутрішні поверхні металевих і діелектричних труб. Металева плазма створювалась за допомогою високочастотного джерела з малим зовнішнім магнітним полем. Досліджені основні характеристики покриття в залежності від умов оперуємого процесу. Представлены результаты нанесения металлических покрытий на внутренние поверхности металлических и диэлектрических труб. Металлическая плазма создавалась при помощи высокочастотного источника с малым внешним магнитным полем. Исследованы основные характеристики покрытий в зависимости от условий оперируемого процесса. 2005 Article Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source / V.V. Gasilin, Yu.N. Nezovibat’ko, G.S. Poklipach, V.S. Taran, O.M. Shvets // Вопросы атомной науки и техники. — 2005. — № 2. — С. 176-178. — Бібліогр.: 4 назв. — англ. 1562-6016 PACS: 52.77.Dq http://dspace.nbuv.gov.ua/handle/123456789/79780 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
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Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies |
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Low temperature plasma and plasma technologies Low temperature plasma and plasma technologies Gasilin, V.V. Nezovibat’ko, Yu.N. Poklipach, G.S. Taran, V.S. Shvets, O.M. Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source Вопросы атомной науки и техники |
| description |
In a present activity the experimental results on application of metallic coating onto inner parts of various tools are presented. Plasma was generated by means of HF- source with low external magnetic field. The main characteristics of coatings dependent on operating conditions were investigated. |
| format |
Article |
| author |
Gasilin, V.V. Nezovibat’ko, Yu.N. Poklipach, G.S. Taran, V.S. Shvets, O.M. |
| author_facet |
Gasilin, V.V. Nezovibat’ko, Yu.N. Poklipach, G.S. Taran, V.S. Shvets, O.M. |
| author_sort |
Gasilin, V.V. |
| title |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source |
| title_short |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source |
| title_full |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source |
| title_fullStr |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source |
| title_full_unstemmed |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source |
| title_sort |
application of coatings on inner surfaces of metallic and dielectric pipes with the use of hf -plasma source |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2005 |
| topic_facet |
Low temperature plasma and plasma technologies |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/79780 |
| citation_txt |
Application of coatings on inner surfaces of metallic and dielectric pipes with the use of HF -plasma source / V.V. Gasilin, Yu.N. Nezovibat’ko, G.S. Poklipach, V.S. Taran, O.M. Shvets // Вопросы атомной науки и техники. — 2005. — № 2. — С. 176-178. — Бібліогр.: 4 назв. — англ. |
| series |
Вопросы атомной науки и техники |
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2025-07-06T03:45:45Z |
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| fulltext |
APPLICATION OF COATINGS ON INNER SURFACES OF METALLIC
AND DIELECTRIC PIPES WITH THE USE OF HF -PLASMA SOURCE
V.V. Gasilin, Yu.N. Nezovibat’ko, G.S. Poklipach, V.S. Taran, O.M. Shvets
Institute of Plasma Physics, NSC KIPT, Kharkov, Ukraine
In a present activity the experimental results on application of metallic coating onto inner parts of various tools are
presented. Plasma was generated by means of HF- source with low external magnetic field. The main characteristics of
coatings dependent on operating conditions were investigated.
PACS: 52.77.Dq
INTRODUCTION
Ion-plasma deposition methods are widely
used for strengthening of cutting tools and machinery
parts. Methods based on arc and magnetron plasma
sources have attracted considerable attention due to
possibility of application of multi-layer and composite
coatings [1,2]. Some difficulties can arise during
application of coatings onto inner surfaces of tools,
especially on tools having irregular geometry. In [3] there
was proposed a method in which arc-plasma source and
HF - field applied to the sample were used for the
deposition of coatings. Utilization of HF - field allowed
application of coatings onto dielectric materials. At
present a number of experiments are focused on
application of HF plasma sources for the deposition of
coating on inner parts of tools that allowed to produce
films without formation of droplets. For instance, plasma
immersion ion implantation (PIII) methods are among
them [4]. In the present activity the experimental surfaces
of metallic and dielectric pipes with the use of HF plasma
source are presented. At the basis of this method lies the
dispersion of the cathode material with high energy ions
of argon (Ar+) during creation of HF plasma in the weak
magnetic field of up to 150 Gauss.
EXPERIMENTAL
The experimental scheme of the device used is shown in
Fig.1. It consists of a vacuum chamber (1), which was
evacuated to 10-5 Torr with the following working gas
inlet with a required pressure of 10 -2 Torr.
Fig.1. Scheme of the experimental device: 1 –chamber,
2 – focusing coil, 3 – substrate (metallic tube),4 –
cathode (Al, Cu, Ti, stainless steel), 5 – cooled moving
electrode
A cooled cylindrical cathode (4) with reflective
elements placed on its ends made of different materials
(Al, Cu, Ti, and stainless steel) served as a metallic
plasma source. The cathode was supplied with a
mechanism for longitudal displacement and fixed in a
cylindrical pipe (3), made of stainless steels or titanium.
External magnetic field was created with the help of
magnetic coils (2). The presence of external magnetic
field in such a device ensured drift and oscillatory motion
of electrons and allowed to generate plasma within 10 -1 –
10-4 Тоrr range of pressures.
Deposition was carried out onto glass and metallic
samples placed inside a cylindrical pipe. For our first
experiments we used a combined cooper and aluminum
cathode.
Before the application of the coatings the samples
were cleaned with HF- plasma so that HF-voltage was
applied to cylindrical pipe during 5-10 minutes. The HF
generator was operated at ≤ 3 kW and the frequency was
1-15 MHz. As it follows from the dependence of the
dispersion of materials on the energy of ions Ar+ that in
our case took place the effective dispersion of the cathode
material (Cu, Al, stainless steel, Ti). Measured with the
help of the thermocouple, the cathode temperature did not
exceed 350oC. Therefore, the flow of atoms was caused
not by evaporation, but due to dispersion of the electrode
material.
Fig.2 shows the measured temperatures of the central
(sputtered) electrode and the internal cylinder as well as
the cooling-down time after switching-off HF-voltage.
0 1 0 2 0 3 0 4 0
0
5 0
1 0 0
1 5 0
2 0 0
2 5 0
3 0 0
3 5 0
3
2
1
T
e
m
p
e
r
a
tu
r
e
,
С
t i m e , m i n .
176 Problems of Atomic Science and Technology. Series: Plasma Physics (11). 2005. № 2. P. 176-178
Fig.2. Time-temperature characteristics of the cooper
target and the substrate:1-heating of the cooper target
during deposition (without target cooling) Р=3·10-3 Тоrr
U = - 1000 V, 2 – cooling-down of the cooper target after
deposition of coating, 3 – substrate heating during
deposition of cooper Р=3·10-3 Тorr, U = -1000 V
The dependence of the coating thickness on the length
of the glass plates placed inside a cylindrical pipe during
operation with the cooper cathode is depicted in Fig.3.
0 5 0 1 0 0
0
1
2
3
4
5
6
7
8
9
1 0
δ
,
µ
k
m
l , m m
Fig.3. The changing of the coating thickness (Cu) on
an inner surface of a cylinder within the limits of the
target length (l)(target length 100 mm,
cylinder diameter D = 45 mm)
Fig.4. shows the dependence of the coating thickness
on the pressure. It is shown that the maximum thicknesses
of the copper coating on glass plates correspond to two
values of pressures. At low pressure takes place a more
intense dispersion of the central electrode. The second
maximum of the coating thickness at larger pressures may
be connected with an increase of plasma density due to
such a method of its creation.
1 x 1 0 - 3 1 x 1 0 - 2
0
2
4
6
8
1 0
1 2
1 4
δ
,
µ
k
m
P A r , T o r r
Fig.4. Dependence of the coating thickness on the Ar
pressure D = 45 mm; PAr= 1,33 Pa; Есм=-1000 V (target
potential); deposition time 1,5 h
It should be noted that at low working gas pressure take
place a decrease of the coating growth rate in some cases
leading to a full stopping of deposition. This may happen
not only due to the dispersion of the central electrode by a
working gas flow but also because of dispersion of the
inner surface of external cylinder and tools placed on it.
The dependence of the growth rate of the coating of glass
samples on the distance to the central electrode is shown
in Fig.5. As it is seen from this figure the growth rate
decreases with increasing the distance from the central
electrode. The glass tubes coated inside wall by stainless
steel is shown in Fig.6.
A number of experiments were carried out on
dispersing of high-cutting steels with their following
deposition onto samples made of titanium and glass. The
obtained coatings were droplet-free, possessed good
adhesion properties and were reproducible. Some glass
samples coated with high-cutting steel had good adhesion
and homogeneity. In most cases the pryout force of the
coatings comprised 1.5 - 2.4 kg/mm2. The similar
adhesion properties were also observed for titanium
samples coated with high-cutting steel.
1 0 2 0 3 0 4 0
0
5
1 0 C u
A l
V
,
µ
k
m
/
h
z , m m
Fig.5. The dependence of the growth rate on the distance
target-substrate z =R-r:
■ – Cu, PAr=2•10-2 Тоrr; Еcm = -1000 V
● – Al (alloy), PAr=4•10-3 Тоrr; Еcm= -700 V
R –radius of the inner surface of cylinder (Ti-substrate)
r – target radius (7,5 mm)
3.
Fig.6. The glass tubes coated inside wall by stainless
steel
CONCLUSIONS
1. There was developed a plasma-vacuum source on the
base of HF-generator for the deposition of coatings onto
inner parts of pipes.
2. Droplets-free coatings with good adhesion were
obtained using dispersion of various materials (Cu,Al, Ti)
and HF-generator.
2. The discharge parameters were optimized to obtain
deposition rates compared with PVD.
REFERENCES
177
1. V.G. Marinin, V.S. Taran. About the influence of ion-
plasma coatings on lifetime of steel // Proceedings of 4th
International Symposium “Vacuum Technologies and
Equipment”, Kharkov, ISVTE-4, 2001, v.3. p. 314 – 318.
2. V.F. Gorban’, A.A. Andreev, V.V. Sychov,
G.N.Kartmazov, Yr.N. Nezovibat’ko, V.S. Taran.
Tribological Characteristics of Multi-Layer Ion-Plasma
Coatings based on Chromium and Titanium Nitrides //
Proceeding 5-th conference on modification of materials
with particle beams and plasma flows, Tomsk, 2000, v.3,
p.494-496.
3. V.S. Taran, V.V. Gasilin, Yu.N. Nezovibat’ko et al.
Inner surface modification of tubular glass samples by
PVD method // IV International Conference “Plasma
Physics and Technology”,Minsk, Belarus, September 15-
19, 2003. Contributed Papers. V II , p.522-525.
4. Xuchu Zeng, Baoyin Tang, Paul K. Chu. Improving
the plasma immersion ion implantation impact energy
inside a cylindrical bore by using an auxiliary electrode //
J. Appl. Phys. Lett. 1996, 69 (25), p. 3815 – 3817.
НАНЕСЕНИЕ ПОКРЫТИЙ НА ВНУТРЕННИЕ ПОВЕРХНОСТИ МЕТАЛЛИЧЕСКИХ
И ДИЭЛЕКТРИЧЕСКИХ ТРУБ С ПРИМЕНЕНИЕМ
ВЫСОКОЧАСТОТНОГО ПЛАЗМЕННОГО ИСТОЧНИКА
В.В. Гасилин, Ю.Н.Незовибатько, Г.С. Поклипач, В.С. Таран, О.М. Швец
Представлены результаты нанесения металлических покрытий на внутренние поверхности металлических и
диэлектрических труб. Металлическая плазма создавалась при помощи высокочастотного источника с малым
внешним магнитным полем. Исследованы основные характеристики покрытий в зависимости от условий
оперируемого процесса.
НАНЕСЕННЯ ПОКРИТТЯ НА ВНУТРІШНІ ПОВЕРХНІ
МЕТАЛЕВИХ І ДІЕЛЕКТРИЧНИХ ТРУБ З ВИКОРИСТАННЯМ
ВИСОКОЧАСТОТНОГО ПЛАЗМОВОГО ДЖЕРЕЛА
В.В. Гасілін, Ю.М. Незавибатько, Г.С. Поклiпач, В.С. Таран, О.М. Швець.
Надані результати металевого нанесення покриття на внутрішні поверхні металевих і діелектричних труб.
Металева плазма створювалась за допомогою високочастотного джерела з малим зовнішнім магнітним полем.
Досліджені основні характеристики покриття в залежності від умов оперуємого процесу.
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