Structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma
The results of investigations of the structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings deposited from the filtered vacuum-arc plasma under high voltage pulsed bias potential on the substrate are presented. It was found that axial texture [110] is formed in coatings when pulses potential...
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| Datum: | 2014 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/79928 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma/ E.N. Reshetnyak // Вопросы атомной науки и техники. — 2014. — № 1. — С. 159-162. — Бібліогр.: 17 назв. — анг. |