The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings
ZrN-phase coatings with a cubic lattice (NaCl structure type) were produced by the method of vacuum-arc evaporation of a Zr cathode in nitrogen atmosphere at pressures PN between 0.02 and 0.64 Pa. The pressure increase at a bias potential of -150 V leads to formation of the growth texture [111] or t...
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Date: | 2015 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/82450 |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings / O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, V.F. Gorban’, N.V. Pinchuk, A.A. Meylekhov // Вопросы атомной науки и техники. — 2015. — № 2. — С. 105-110. — Бібліогр.: 15 назв. — англ. |