The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings

ZrN-phase coatings with a cubic lattice (NaCl structure type) were produced by the method of vacuum-arc evaporation of a Zr cathode in nitrogen atmosphere at pressures PN between 0.02 and 0.64 Pa. The pressure increase at a bias potential of -150 V leads to formation of the growth texture [111] or t...

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Bibliographic Details
Date:2015
Main Authors: Sobol’, O.V., Andreev, A.A., Stolbovoy, V.A., Gorban’, V.F., Pinchuk, N.V., Meylekhov, A.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
Series:Вопросы атомной науки и техники
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/82450
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:The effects of nitrogen atmosphere pressure, constant and high-voltage pulse potentials of the substrate on the structure and properties of vacuum-arc ZrN coatings / O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, V.F. Gorban’, N.V. Pinchuk, A.A. Meylekhov // Вопросы атомной науки и техники. — 2015. — № 2. — С. 105-110. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine