Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters
In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron cooling with both filters, allowing effective formation of negative ions vi...
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| Date: | 2012 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2012
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| Series: | Физическая инженерия поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/98924 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters / S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland // Физическая инженерия поверхности. — 2012. — Т. 10, № 1. — С. 22–28. — Бібліогр.: 26 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | In the present paper we compare the positive and negative ion flows created using a recently developed
electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements
show electron cooling with both filters, allowing effective formation of negative ions via electron
dissociative attachment in the region of low electron temperature. The energy distribution functions
of positive and negative ions extracted from the filtered plasmas are measured in both systems showing
an almost monoenergetic nature of the ions with the energy corresponding to the imposed extraction
potential. It is shown that in both cases strongly electronegative plasmas where the negative ion
density is much larger than the electron density can be formed downstream of the filter. Biasing an
internal electrode or the electrostatic filter grid allows control of the plasma potential. In the case of
the electrostatic filter the plasma could be biased negatively compared to ground and effective extraction
of negative ion was achieved. |
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