Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters
In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron cooling with both filters, allowing effective formation of negative ions vi...
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| Date: | 2012 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2012
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| Series: | Физическая инженерия поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/98924 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Comparative study of positive and negative ion flows extracted from downstream plasmas beyond magnetic and electrostatic electron filters / S. Dudin, D. Rafalskyi, L. Popelier, A. Aanesland // Физическая инженерия поверхности. — 2012. — Т. 10, № 1. — С. 22–28. — Бібліогр.: 26 назв. — англ. |