The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure
The combined inductive-capacitive RF discharge at low gas pressure is considered for a case of collisionless ion motion. The power distribution model in the combined RF discharge in case of two asymmetric RF electrodes is developed in term of a ratio of the electrode areas and in term of a magnitude...
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| Date: | 2003 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2003
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure / A.V. Zykov, K.I. Polozhiy, V.I. Farenik // Вопросы атомной науки и техники. — 2003. — № 1. — С. 130-132. — Бібліогр.: 12 назв. — англ. |