Spectral-ellipsometric examining the films of gold nanoparticles on Si/SiO₂ substrate
We have investigated optical properties of films of gold nanoparticles on Si/SiO₂ substrate by using the method of spectroscopic ellipsometry in dependence on morphology of the films. Different morphology of the films was obtained by flashannealing at various temperatures of identical sputtered t...
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Date: | 2012 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2012
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Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Spectral-ellipsometric examining the films of gold nanoparticles on Si/SiO₂ substrate / E.G. Bortchagovsky, V.Z. Lozovski, T.O. Mishakova, K. Hingerl // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 360-364. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of UkraineSummary: | We have investigated optical properties of films of gold nanoparticles on
Si/SiO₂ substrate by using the method of spectroscopic ellipsometry in dependence on
morphology of the films. Different morphology of the films was obtained by flashannealing
at various temperatures of identical sputtered thin gold layers. Ellipsometric
spectra were compared with account of pictures of the films obtained by scanned electron
microscopy. Remarkable dependence of depolarization of the reflected light with the
frequency of localized plasmon resonance versus the film morphology was found. |
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