Field emission of electrons from laser produced silicon tip arrays
The new preparation method of silicon tips with nanocomposite structure, namely laser modification of silicon is developed. The laser direct-write process has been applied, one by one (single) laser pulses formed the single rather uniform conical tips. In this process a silicon substrate is locally...
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| Date: | 2000 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2000
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| Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Field emission of electrons from laser produced silicon tip arrays / A.A. Evtukh, E.B. Kaganovich, V.G. Litovchenko, Yu.M. Litvin, D.V. Fedin, E.G. Manoilov, S.V. Svechnikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 4. — С. 474-478. — Бібліогр.: 16 назв. — англ. |