Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction

Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction has been developed based on the studies of electrical conductivity and magnetoresistance of silicon and germanium microcrystals in the temperature range 4.2—70 K, strain ±1.5⋅10–3 rel.un. and m...

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Bibliographic Details
Date:2017
Main Authors: Druzhinin, A.A., Khoverko, Yu.М., Kutrakov, A.P., Liakh-Kaguy, N.S., Yatsukhnenko, S.Yu.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
Series:Технология и конструирование в электронной аппаратуре
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction / A.A. Druzhinin, Yu.М. Khoverko, A.P. Kutrakov, N.S. Liakh-Kaguy, S.Yu. Yatsukhnenko // Технология и конструирование в электронной аппаратуре. — 2017. — № 6. — С. 3-7. — Бібліогр.: 13 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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Summary:Sensitive element of multifunctional sensor for measuring temperature, strain and magnetic field induction has been developed based on the studies of electrical conductivity and magnetoresistance of silicon and germanium microcrystals in the temperature range 4.2—70 K, strain ±1.5⋅10–3 rel.un. and magnetic fields of 0—14 T. The feature of the sensitive element is the using of the p- and n-type conductivity germanium microcrystals as mechanical and magnetic field sensors, respectively, and the p-type silicon microcrystal — as temperature sensor. That allows providing the compensation of temperature influence on piezoresistance and on sensitivity to the magnetic field.