Investigation of residual stresses in sapphire plates after grinding and polishing
The method of flexure determination was used to investigate the dependence of residual stresses on the depth of damaged layer in sapphire plates with a diameter of 100 mm after grinding and polishing. The flexure was determined from nonflatness of the control side of the plate using an interferomete...
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Datum: | 2012 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | English |
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НТК «Інститут монокристалів» НАН України
2012
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Schriftenreihe: | Functional Materials |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Zitieren: | Investigation of residual stresses in sapphire plates after grinding and polishing / A.T. Budnikov, E.A. Vovk, V.N. Kanishchev, S.I. Krivonogov // Functional Materials. — 2012. — Т. 19, № 4. — С. 478-482. — Бібліогр.: 14 назв. — англ. |