Numerical simulation of multibeam systems by EL&ION code
Based on the tube method, taking into account the three second law for the current in each tube, the program EL&ION for preliminary rapid numerical analysis of the electron-optical system was developed, using which the system was developed for generating an ion beam of reactive gases with an ene...
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Datum: | 2020 |
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Format: | Artikel |
Sprache: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
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Schriftenreihe: | Вопросы атомной науки и техники |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Zitieren: | Numerical simulation of multibeam systems by EL&ION code / P.A. Martynenko // Problems of atomic science and tecnology. — 2020. — № 3. — С. 92-93. — Бібліогр.: 12 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of UkraineZusammenfassung: | Based on the tube method, taking into account the three second law for the current in each tube, the program EL&ION for preliminary rapid numerical analysis of the electron-optical system was developed, using which the system was developed for generating an ion beam of reactive gases with an energy of up to 50 keV and a current of 10…20 mA in the presence of high-density electron beam. |
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