Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample
The dependences of the growth rate and intrinsic stress on the accelerating potential for coating TiN deposited from the Ti⁺ ion flow on the surface of cylindrical article are investigated theoretically. The sample rotates around the symmetry axis perpendicular to the flow of incident ions. The stud...
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| Datum: | 2019 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample / A.I. Kalinichenko, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 142-144. — Бібліогр.: 6 назв. — англ. |