Double magnetron cluster set-up for synthesis of micro and nano structure coatings
In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron current-voltage characteristics as well as dependencies of the magnetron current, vo...
Saved in:
| Date: | 2015 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
|
| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Double magnetron cluster set-up for synthesis of micro and nano structure coatings / S. Yakovin, A. Zykov, S. Dudin, M. Sergiec, V. Farenik // Вопросы атомной науки и техники. — 2015. — № 1. — С. 187-189. — Бібліогр.: 6 назв. — англ. |