Vacuum-arc equipment for ion-plasma deposition of coatings
A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the deve...
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| Date: | 2000 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the developments of high-efficiency butt-end plasma sources, vacuum-arc evaporators with extended (cylindrical and planar) cathodes, magnetic filters for removal of macroparticles from plasma, and also a number of devices to form various-purpose coatings. |
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